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Duplex Surface Treatment due to Combined ECR Plasma Nitriding and Ceramic Coatings

Research Project

Project/Area Number 06650823
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field Material processing/treatments
Research InstitutionFukui National College of Technology

Principal Investigator

YASUMARU Naoki  Fukui Natl. Coll. Tech., Department of Mechanical Engineering, Associate Professor, 機械工学科, 助教授 (90158006)

Co-Investigator(Kenkyū-buntansha) IDEHARA Toshitaka  Fukui University, Department of Applied Physics, Professor, 工学部, 教授 (80020197)
TANAKA Shigetoshi  Fukui Natl. Coll. Tech., President, 校長 (20025240)
OKIMURA Kunio  Fukui Natl. Coll. Tech., Department of Electrical and Information Engineering, L, 電子情報工学科, 講師 (00194473)
Project Period (FY) 1994 – 1995
Project Status Completed (Fiscal Year 1995)
Budget Amount *help
¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1995: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1994: ¥1,400,000 (Direct Cost: ¥1,400,000)
Keywordsplasma treatment / nitriding / ceramic coating / surface treatment / duplex treatment
Research Abstract

(1) Production of Arc Ion Plating (AIP) system with high density plasma source
2.45 GHz microwave was introduced into the plasma port where the cusp-type magnet field was generated by utilizing a rare earth magnet through a quartz window. This plasma port was set up at an upper flange of a vacuum chamber of AIP equipment. In this chamber, the specmens were mounted on the stage which could be heated up to 600゚C and biased untill -1 kV.Plasma nitriding and ceramic coating were done in this system.
(2)Mechnical properties of duplex suraface treated steels
Nitride films of TiN (Hv2200) and CrN (Hv2000), carbide film of TiC (Hv3000), hyderide film of TiH_2 (Hv500), oxide film of TiO_2 (Hv1200) and diamond like carbon film of DLC (Hv2600) were examined in this study. The mechanical properties of the duplex treated steels are as follows. (1) TiN or CrN-coated specimens after plasma nitriding showed the best wear resistance even under a heavy load. (2) Ceramic films showed good resistance tocorrosion mostly. Especially, we found the corrosion current density of TiH_2 film is very small. (3) The fatigue limit of the duplex treated specimens increased largely compared to that of the untreated one. The quality of the nitrided layr is most effective according to the fatigue resistance.

Report

(3 results)
  • 1995 Annual Research Report   Final Research Report Summary
  • 1994 Annual Research Report
  • Research Products

    (23 results)

All Other

All Publications (23 results)

  • [Publications] 安丸尚樹: "セラミックコーティング材の摩耗特性" 福井工業高専研究紀要 自然科学・工学. 11-16 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Naoki Yasumaru: "Mechanical Properties of Pre-Nitrided and TiN-Coated Steels" Surface Modification Technologies VII. 89-101 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Kunio Okimura: "Preparation of Rutile TiO_2 Films by RF Magnetron Sputtering" Jpn. J. Appl. Physics. 34. 4950-4955 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 沖村 邦雄: "TiO_2薄膜堆積用RFマグネトロンスパッタプロセスの気相診断" 電気学会プラズマ研究会資料(EP-95-119). 105-113 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] Kunio Okimura: "Characterization of RF Magnetron Sputtering for TiO_2 Deposition" Proc. 3rd Int. Symp. on Sputtering and Plasma Processes. 435-442 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 沖村 邦雄: "Al-Ar混合気体放電のプラズマパラメータとペニング効果" J. of Plasma and Fusion Research. 70. 1109-1116 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N.Yasumaru: "Wear Properties of Ceramic-Coated Materials" Research Reports of Fukui Natl. Coll. of Tech.11-16 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] N.Yasumaru: "Mechanical Properties of Pre-Nitrided and TiN-Coated Steels" Surface Modification Technologies. VII. 89-101 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Okimura: "Preparation of Rutile TiO_2 Films by RF Magnetron Sputtering" Jpn. J.Appl. Physics. vol.34. 4950-4955 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Okimura: "Plasma Diagnostics in RF Magnetron Sputtering for TiO_2 Deposition" Technical Report of IEE Japan. EP-95-119. 105-113 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Okimura: "Characterization of RF Magnetron Sputtering for TiO_2 Deposition" Proc. of the 3rd Int. Symp. on Sputtering and Plasma Processes. 435-442 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] K.Okimura: "Plasma Parameters and Penning Effect in an Al-Ar Mixture Discharge" J.of Plasma and Fusion Research. vol.70. 1109-1116 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1995 Final Research Report Summary
  • [Publications] 安丸尚樹: "セラミックコーティング材の摩耗特性" 福井工業高専研究紀要 自然科学・工学. 11-16 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Naoki Yasumaru: "Mechanical Properties of Pre-Nitrided and TiN-Coated Steels" Surface Modification Technologies VII. 89-101 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] Kunio Okimura: "Preparation of Rutile TiO_2 Films by RF Magnetron Sputtering" Jpn. J. Appl. Physics. 34. 4950-4955 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 沖村邦雄: "TiO_2薄膜堆積用RFマグネトロンスパッタプロセスの気相診断" 電気学会プラズマ研究会資料(EP-95-119). 105-113 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Kunio Okimura: "Characterization of RF Magnetron Sputtering for TiO_2 Deposition" Proc. 3rd Int. Symp. on Sputtering and Plasma Processes. 435-442 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 沖村邦雄: "Al-Ar混合気体放電のプラズマパラメータとペニング効果" J. of Plasma and Fusion Research. 70. 1109-1116 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] Naoki Yasumaru: "Mechanical Properties of Pre-Nitrided and Tin-Coated Steels" Surface Modification Technologies VII. 89-101 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 安丸尚樹: "窒化後、TiNまたはTiCを被覆された鋼の機械的性質" 日本金属学会北陸信越支部・日本鉄鋼協会北陸支部平成6年度連合講演会概要集. 147-148 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] 沖村邦雄: "Al-Ar混合気体放電のプラズマパラメータとペニング効果" プラズマ・核融合学会誌. 70. 1109-1116 (1994)

    • Related Report
      1994 Annual Research Report
  • [Publications] Kunio Okimura: "Diagnostics for TiO_2 Deposition Process by RF Magnetron Sputtering" Proc.12th Symp.on Plasma Processing. 477-480 (1995)

    • Related Report
      1994 Annual Research Report
  • [Publications] 田中茂利: "長時間炉心トカマクプラズマ制御に関する調査研究" 社団法人 プラズマ・核融合学会, 217 (1995)

    • Related Report
      1994 Annual Research Report

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Published: 1994-04-01   Modified: 2016-04-21  

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