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Microsystems Using Intelligent Materials

Research Project

Project/Area Number 07044117
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionJoint Research
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionTohoku University

Principal Investigator

TANI Junji  Tohoku University, Institute of Fluid Science, Professor, 流体科学研究所, 教授 (30006192)

Co-Investigator(Kenkyū-buntansha) KOHL M.  カールスルーエ研究センター, 研究員
HAGENA Otto  IMT,Forschungszentrum Karlsruhe, Professor, 機械工学部, 教授
HAYASE Toshiyuki  Tohoku University, Institute of Fluid Science, Associate Professor, 流体科学研究所, 助教授 (30135313)
TAKAGI Toshiyuki  Tohoku University, Institute of Fluid Science, Associate Professor, 流体科学研究所, 助教授 (20197065)
HAYASHI Satoru  Tohoku University, Institute of Fluid Science, Professor, 流体科学研究所, 教授 (10021982)
KOHL Manfred  Karlsruhe Research Center, Researcher
GEBHARD U.  カールスルーエ研究センター, 研究員
BACHER W.  カールスルーエ研究センターマイクロストラクチャー, 工学部, 副リーダー
MENZ W.  カールスルーエ大学, 機械工学部, 教授
裘 進浩  東北大学, 流体科学研究所, 助手 (60241585)
WALLRABE U.  カールスルーエ研究センター, 研究員
古屋 泰文  東北大学, 工学部, 助手 (20133051)
Project Period (FY) 1995 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥9,500,000 (Direct Cost: ¥9,500,000)
Fiscal Year 1997: ¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 1996: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1995: ¥2,900,000 (Direct Cost: ¥2,900,000)
KeywordsIntelligent material / Microactuator / Microsystem / Micro fluidics / Biofluid / Shape memory alloy / Actuator / Sensor / 知的化 / LIGAテクニック / 磁性形状記憶合金 / 機能性発現
Research Abstract

The purpose of this research projects is to investigate the basic structures and performances of microsystems, such as microactuators, microsensors, etc. The research activity in this project focused on microfluidic actuators and microsystems using electromagnetically functional materials.
For the purpose of an application of laminar proportional fluidic amplifier to micro-fluidics, a device controlling the low pressure is proposed and the static characteristics have been investigated.
Application of micro-fluidcs to flow control problems has been investigated. Numerical analysis has been performed on the microcirculation of the human body as a fundamental consideration of bio-fluid control with micro-fluidics. Optimum condition of turbulent flow control with micro-valves has also been investigated via numerical analysis.
Optical alignment technique using shape memory alloy (SMA) actuator was studied. It is shown that the SMA actuator is useful for precise optical alignment and for miniatureize the optical system.

Report

(4 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • Research Products

    (40 results)

All Other

All Publications (40 results)

  • [Publications] 高木 敏行, 谷 順二, 田中 洋彦, 林 叡, 藤本 智也, Ute Gebhard: "フィードバック発振形流体素子の動特性に関する解析と実験" 日本機械学会論文集(C)編. 63. 3790-3795 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hisaki Shimizu, Satoru Hayashi: "A Pressure-Regulating Mechanism Using Laminar Proportional Amplifer" Proceedings of The Fifth International Symposium on Fluid Control,Measurement and Visualization,FLUCOME'97. 2. 575-579 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Toshiyuki Hayase, Yupeng Xia, Satoru Hayashi: "Numerical Analysis of Transient Flow through a Spool valve(Modeling of Transient Characteristic in High Reynolds Number Flow)" Proceedings of The Fifth International Symposium on Fluid Measurement,Control and Vibration,FLUCOME'97. 1. 379-384 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Hane: "Analytical Modeling of Micromachined Resonator Sensor Activated by CW Laser Irradiation" 1997 Int.Conf.Solid-State Sensors and Actuators(Digest of Technical Papers). 2. 105-108 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] O.F.Hagena: "Micromechanical Testing of Microstructured Actuator Components" Intern Conf.on Advanced Technology in Experimental Mechanics(ATEM'97). 5-10 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Kohl, K.D.Skrobanek: "Linear Microactuators Based on the Shape Memory Effect" Proc.Transducers 97. 785-788 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Takagi, J.Tani, H.Tanaka, S.Hayashi, T.Fujimoto and U.Gebhard: "Simulation and Experiment on the Dynamic Bdhavior of a Fluidic Device for Microactuator Applications" Proc.of Fifth Triennial Int.Symp.on Fluid Control, Measurement and Visualization. 545-550 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Takagi, J.Tani, S.Suzuki, M.Matsumoto, S.Chonan and Y.Tanahashi: "An Application of All-Round Shape Memory Alloy Plates to Flow Control Using Induced Heating" Proc.of the Japan-France Seminar on Intell.Mater.and Struct.243-246 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Matsumoto, T.Takagi, J.Tani, A.N.Vasilev and N.S.Perov: "Phase Transformation of Ni_2Mn_<1-x>Ga" Proc.of the Japan-France Seminar on Intell.Mater.and Struct.247-250 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Shimizu and S.Hayashi: "A Pressure-Regulating Mechanism Using Laminar Proportional Amplifier" Proc.of Fifth Int.Symp.on Fluid Control, Measurement and Visualization FLUCOME'97. 575-579 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Hayashi: "Stability and Nonlinear Behavior of Poppet Valve Circuit" Proc.of Fifth Int.Symp.on Fluid Control, Measurement and Visualization FLUCOME'97. 13-20 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] I.Iimura, S.Hayashi, S.Miyakawa and Y.Mochizuki: "Stability of a Water Hydraulic Regulation Valve" Proc.of Fifth Int.Symp.on Fluid Control, Measurement and Visualization FLUCOME'97. 307-312 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Hayase, S.Hayashi and K.Kojima: "Micro Stick-Slip Vibration in Hydraulic Servo Systems" Tans.of the Japan Society of Mechanical Engineering. Vol.63. 444-450 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Hane: "Analytical Modeling of Micromachined Resonator Sensor Activated CW Laser Irradiation" Int.Conf.Solid-State Sensors and Actuators (Digest of Technical Papers). Vol.2. 105-108 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Sasaki, Y.Arai and K.Hane: "Automatic Alignment of Pinhole Integrated with Photodiode Using Shape Memory Alloy" Int.Conf.on Optical MEMS and their Applications (Technical Digest). 263-267 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Ohara and T.Aihara: "MD Study on Microscopic Structure of Water in Bulk Liquid and Liquid-Vapor Interface Regions" Proc.Int.Conf.on Fluid Eng.Vol.3. 1491-1496 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] J.Tanba, T.Ohara and T.Aihara: "MD Study on Interface-like Phenomena in Super critical Fluid" Microscale Thermophysical Eng.Vol.1 No.1. 19-30 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] O.F.Hagena: "Micromechanical Testing of Microstructured Actuator Components" Int.Conf.on Advanced Technology in Experimental Mechanics. 5-10 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Kohl, K.D.Skrobanek: "Linear Microactuators Based on the Shape Memory Microvalves" Proc.Transducers 97. 785-788 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Gebhard, Hein: "Just and Ruther, Combination of a Micro-oscillator and a Micro Actuator in LIGA Technique for Medical Application" Transducers'97. 761-764 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 高木 敏行, 谷 順二, 田中 洋彦, 林 叡, 藤本 智也, Ute Gebhatd: "フィードバック発振形流体素子の動特性に関する解析と実験" 日本機械学会論文集(C)編. 63. 3790-3795 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hisaki Shimizu, Satoru Hayashi: "A Pressure-Regulating Mechanism Using Laminar Proportional Amplifer" Proceedings of The Fifth International Symposium on Fluid Control, Measurement and Visualization, FLUCOME′97. 2. 575-579 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Toshiyuki Hayase, Yupeng Xia, Satoru Hayashi: "Numerical Analysis of Transient Flow through a Spool valve (Modeling of Transient Charadteristic in High Reynolds Number Flow)" Proceedings of The Fiffth International Symposium on Fluid Measurement, Control and Vibration, FLUCOME′97. 1. 379-384 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] K. Hane: "Analytical Modeling of Micromachined Resonator Sensor Activated by CW Laser Irradiation" 1997 Int. Conf. Solid-State Sensors and Actuators(Digest of Technical Papers). 2. 105-108 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] O. F. Hagena: "Micromechnical Testing of Microstructured Actuator Components" Intern Conf. on Advanced Technology in Experimental Mechanics(ATEM′97). 5-10 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] M. Kohl, K. D. Skrobanek: "Linear Microactuators Based on the Shape Memory Effect" Proc. Transducers 97. 785-788 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] J.Tani,T.Takagi,H.Nakaniwa,K.Ohtomo,K.Kosugo: "Vibration Suppression Effect of Liquid Crystal under Electromagnetic Field" Journal of Intelligent Material Systems and Structures. 7-5. 272-277 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 谷順二: "インテリジェント複合材料システム" 機能材料. 16-4. 17-22 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Kohl,K.D.Skrobanek,C.M.Goh,D.M.Allen: "Mechanical characterisation of shape memory micromaterials" SPIE. 2880. 108-118 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 松本寛、谷順二、高木敏行、A.N.Vasil'ev: "強磁性形状記憶合金Ni_2MnGaの特性と応用" Proceedings of Fifth MAGDA Conference JSAEM. 99-102 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 高木敏行、谷順二、林叡、田中洋彦、Ute Gebhard: "マイクロフルイディクスのアクチュエータ応用への基礎的検討" 電気学会 マグネティックス研究会資料. 37-44 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 林叡: "流体制御技術の最近の動向" 計測と制御. 32-2. 99-105 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 谷順二、古屋泰文、江田弘、森下信、名取通弘、樋口健: "知的複合材料と知的適応構造物" 養賢堂, 198 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] W.Menz: "Fluidic Components in Microsystems Technologies" Proceedings of the International Symposium on Microsystems,Intelligent Materials and Robots. 17-20 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] U.Gebhard,H.Hein,W.Menz,P.Ruther: "A Fluidic Micro-Oscillator to Steer a Linear Tool" Proceedings of International Symposium on Microsystems,Intelligent Materials and Robots. 41-44 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] J.Qiu,J.Tani,T.Takagi W.Menz,P.Ruther: "Control of Forced Vibration of a Cylindrical Shell Using the Hybrid Control Method" Proceedings of the International Symposium on Microsystems,Intelligent Materials and Robots. 370-373 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Takagi,S.Suzuki,J.Tani,M.Matsumoto: "Magneto-Thermo-Mechanical Response of A SMA Plate" Proceedings of the International Symposium on Microsystems,Intelligent Materials and Robots. 451-454 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] J.Tani,H.Nakaniwa,T.Takagi K.Ohtomo,K.Kosugo: "Vibration Suppression Effect of Liquid Crystal under Electromagnetic Field" Proceedings of the International Symposium on Microsystems,Intelligent Materials and Robots. 482-485 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] A.Shimamoto,Y.Furuya,M.Taya: "Active Control of Crack-tip Stress Intensity By Contraction of Shape Memory TiNi Fibers Embedded in Epoxy Matrix Composite" Proceedings of the International Symposium on Microsystems,Intelligent Materials and Robots. 463-466 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] J.Tani,M.Esashi(eds.): "Proceedings of the International Symposium on Microsystems,Intelligent Materials and Robots" 660 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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