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Integration of Fabrication Technology for Micromechatronics

Research Project

Project/Area Number 07044122
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionJoint Research
Research InstitutionThe University of Tokyo

Principal Investigator

MASUZAWA Takahisa  Institute of Industrial Science, the University of Tokyo, Professor, 生産技術研究所・第2部, 教授 (60013215)

Co-Investigator(Kenkyū-buntansha) 川勝 英樹  東京大学, 生産技術研究所・第2部, 助教授 (30224728)
HIRAMOTO Toshirou  VLSI Design and Education Center, the University of Tokyo, 大規模集積システム設計教育研究センター, 助教授 (20192718)
FUJITA Hiroyuki  Institute of Industrial Science, the University of Tokyo, 生産技術研究所・第3部, 教授 (90134642)
HASHIMOTO Hideki  Institute of Industrial Science, the University of Tokyo, 生産技術研究所・第3部, 助教授 (30183908)
PORTE Henri  LOPMD/CNRS, LOPMD研究所, 研究員
HARASHIMA Fumio  Institute of Industrial Science, the University of Tokyo, 生産技術研究所・第3部, 教授 (60013116)
DUCROQUET Frederique  IEMN/CNRS, IEMN研究所, 研究員
PLANA Robert  LAAS/CNRS, LAAS研究所, 研究員
FUJINO Masatoshi  Institute of Industrial Science, the University of Tokyo, 生産技術研究所・第2部, 助手 (90242130)
TOSHIYOSHI Hiroshi  Institute of Industrial Science, the University of Tokyo, 生産技術研究所・第3部, 講師 (50282603)
CAMON Henri  LAAS/CNRS, LAAS研究所, 研究員
MOLLIER Pasca  LOPMD/CNRS, LOPMD研究所, 研究員
MINOTTI Partrice  LMARC/CNRS, LMARC研究所, 研究員
GORECKI Christophe  LOPMD/CNRS, LOPMD研究所, 研究員
PIERALLI Christian  LOPMD/CNRS, LOPMD研究所, 研究員
HAESE Nahtalie  IEMN/CNRS, IEMN研究所兼リール大学, 研究員助教授
ROLLAND Paul-Alain  IEMN/CNRS, IEMN研究所, グループ長
DECARPIGNY J  フランス国立科学研究センター, ISEN研究所, 所長
HOUDEN Daniel  LPMO/CNRS, LPMO研究所, 所長
GAGNEPAIN Je  フランス国立科学研究センター, 工学部門, 部長
DECARPIGNY Jean-Noel  ISEN/CNRS
GAGNEPAIN Jean-Jaeques  CNRS
HAUDEN Danie  フランス科学研究庁, LPMO研究所, 所長
JEANーJAEQUES ガニュパン  フランス科学研究庁, 工学部門, 部長
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥11,600,000 (Direct Cost: ¥11,600,000)
Fiscal Year 1996: ¥6,200,000 (Direct Cost: ¥6,200,000)
Fiscal Year 1995: ¥5,400,000 (Direct Cost: ¥5,400,000)
Keywordsmicromachine / fine machining / optical system / atomic force microscope / semiconductor process / electropolishing / mill wave / plastic deformation of Si / micromachining
Research Abstract

The research project aims at the integration of micromachining technologies to fabricate micromechatronic systems ; these systems are composed of microstructures, actuators, electronic circuits, sensors and optical devices. Because the process technologies for these elements differ each other, it is difficult to apply them all together to built a mcirosystem.
We have selected three target systems : (1) Micro optical systems, (2) scanning probe microscopes, and (3) Scanner for mili-wave anttena. Design, fabrication processes and testing of the systems were carried out.
(1) As for micro optical systems, an optical aligner based on a microactuated stage was designed. The stage should have three dimensional (3-D) shapes to enable multi-degree-of-freedom alignment. We have developed a new technology to self-assemble 3-D microstructures made of polysilicon films. Surface micromachined thin films, i.e.flat microstructures, were elastically deformed into 3-D shapes by the force of microactuators … More . The deformation was fixed by annealing structures with Joule heating. No manual manipulation of structures was needed in the process.
(2) As for scanning probe microscopes, an atomic force microscope (AFM) using a very small vibrational probe, called nano-cantilever, was designed. Due to the small mass of the cantilever and the associated high vibrational frequency, it is expected to have extra high sensitivity. The tip of the cantilever was electrochemically etched in a thin film of electrolite. We succeeded to apply the probe in the AFM.
(3) The scanner for mili-wave antena was composed of a tortional stage with the antenna on top, a triangular support with electrostatic driving electrodes and a mili-wave oscillator. The anntena was patterned using thin-film technology. The stage and the support were bulk-micromachined from a fused-quartz substrate and a silicon substrate, respectively. The oscillator was made by the compound semiconductor technology, At the last process, all of them are assembled together. We confirmed the motion of scanner by electrostatic actuation and also the mili-wave emission from the antenna. Thus we demostrated the feasibility of the combined usage of different micromachining processes. Less

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (28 results)

All Other

All Publications (28 results)

  • [Publications] ドミニック・コラール,ミシェル・ド・ラバシェルリ-,ムサ・ウマディー,ハネス・プロイレル,藤田博之,平本俊郎,橋本英樹,川勝英樹,増沢隆久: "フランス科学技術庁(CNRS)と東京大学生産技術研究所(IIS)のマイクロメカトロニクスに関する共同研究" 生産研究. vol.47 No.5. 244-249 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Yamato Fukuta,Terunobu Akiyama,Hiroyuki Fujita: "A Reshaping Technology with Joule Heat for Three Dimensional Silicon Structure" The 8th International Conference on Solid-State Sensors and Actuators(TRANSDUCERS′95). vol.1. 174-177 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] B.Kim,C.Bergaud S.Konishi,T.Masuzawa H.Fujita: "Fabrication of micro twin probe for dimensional measurement of microholes" 平成8年度電気学会全国大会論文集. E. 3162 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Egashira.,T.Masuzawa,M.Fujino and X.Q.Sun: "Micro-USM technique by fabricating microtools on the machine" Proceedings of the 3rd France-Jpan Congress & 1st Europe-Asia Congress on Mechatronics. vol.2. 509-512 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Fujita: "A Decade of MEMS and its Future" Proceedings IEEE the 10th Annual International Workshop on Micro Electro Mechanical Systems. vol.1. 1-8 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] D.Chauvel,N.Haese,P-A Rolland,D.Collard,H.Fujita: "A Micromachined Microwave Antenna Integrated with its Electrostatic Spiral Scanning" Proceedings IEEE the 10th Annual International Workshop on Micro Electro Mechanical Systems. vol.1. 84-89 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 藤田博之: "自律分散をめざすロボットシステム" マイクロマシンの世界, 23 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] D.Collard, M.Labachelerie, M.Hoummady, H.Fujita, T.Hiramoto, H.Hashimoto, H.Kawakatsu, T.Masuzawa: "Joint Research on micromechatronics between the 'CNRS' AND 'IIS'" SEISANKENKYUU. 47. 244-249 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Yamato Fukuda, Terunobu Akiyama, Hiroyuki Fujita: "A Reshaping Technology with Joule Heat for Three Dimensional Silicon Structure" The 8th International Conference on Solid-State Sensors and Actuators (Transducers '95). 1. 174-177 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] B.Kim, C.Bergaud, S.Konishi, T.Masuzawa, H.Fujita: "Fabrication of micro twin probe for dimensinal mesurement of microholes" 1996 National Convention Record I.E.E.Japan. E. 3162-3162 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Egashira, T.Masuzawa, M.Fujino and X.Q.Sun: "Micro-USM technique by fabricating microtools on the machine" Proceedings of the 3rd France-Japan Congress & 1st Europe-Asia Congress on Mechatronics. 2. 509-512 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Fujita: "A Decade of MEMS and its Future" Proceedings IEEE the 10th Annual International Workshop on Micro Electro Mechanical Systems. 1. 1-8 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] D.Chauvel, N.Haese, P-A Rolland, D.Collard and H.Fujita: "A Micromachined Microwave Antenna Integrated with its Electrostatic Spiral Scanning" Proceedings IEEE the 10th Annual International Workshop on Micro Electro Mechanical Systems. 1. 84-89 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Egashira,T.Masuzawa,M.Fujino and X.Q.Sun: "Micro-USM technique by fabricating microtools on the machine" Proceedings of the 3rd France-Japan Congress & 1st Europe-Asia Congress on Mechatronics. vol.2. 509-512 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Hiroyuki Fujita,Manabu Ataka,Satoshi Konishi: "Group workof distributed microactuators" International Journal of Information,Education and Research in Robotics and Artificial Intelligence (Robotica). vol.14. 487-492 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Fujita: "A Decade of MEMS and its Future" Proceedings IEEE the 10th Annual International Workshop on Micro Electro Mechanical Systems. 1-8 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] D.Chauvel,N.Haese,P-A Rolland,D.Collard,H.Fujita: "A Micromachined Microwave Antenna Integrated with its Electrostatic Spiral Scanning" Proceedings IEEE the 10th Annual International Workshop on Micro Electro Mechanical Systems. 84-89 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Nakamura,S.Nakamura,L.Buchaillot,H.Fujita: "A Three-Dimensional Shape Memory Alloy Loop Actuator" Proceedings IEEE the 10th Annual International Workshop on Micro Electro Mechanical Systems. 262-266 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Fukuta,D.Collard T.Akiyama,E.H.Yang H.Fujita: "Microactuated Self-Assembling of 3D Polysilicon Structures with Reshaping Technology" Proceedings IEEE the 10th Annual International Workshop on Micro Electro Mechanical Systems. 477-481 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] C.Gorecki,A.Chebbour,G.Tribillon,: "“Multifunction wavelength-shift interferometry:absolute distance and velocity measurements"," Congres SPIE,Varosive(Pologne). Juin. (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] D.Hauden,M.Hoummady,N.Tirole,B.Hivert,: "“Capteurs resonnants a ondes elastiques de surface"" L′Onde Electrique. vol.74.n°2. 43-47 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] J.P.Goedgebuer,H.Porte,P.Mollier,: "“Coherence modulation and correlation of stochastic light fields"" J. Phys. III. vol.3. 1413-1433 (1993)

    • Related Report
      1995 Annual Research Report
  • [Publications] ドミニック・コラール,ミッシェル・ド・ラバシェルリ-,ムサ・ウマディ,ハネス・ブロイレル,藤田博之,平本俊郎,橋本秀紀,川勝英樹,増沢隆久: "フランス科学研究庁(CNRS)と東京大学生産技術研究所(IIS)のマイクロメカトロニクスに関する共同研究" 生産研究. vol.45 No.5. 244-249 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Fujita,T.Iizuka: "A Threaded Wobble Motor-A micro motor generating large linear displacement-" The 8th International Conference on Solid-State Sensors and Actuators(Transducers 95),Stockholm Sweden. vol.2. 408-411 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Yamato Fukuta,Terunobu Akiyama,Hiroyuki Fujita: "A Reshaping technology with Joule Heat for Three Dimensional Silicon Structures" The 8th International Conference on Solid-State Sensors and Actuators(TRANSDUCERS'95). vol.1. 174-177 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] D.Kobayashi,H.Fujita: "Control of a Micro Tunneling Unit Under Atomic Force Proceedings of the 1995 IEEE/RSJ International Conference on" Intelligent Robots and Systems. vol.2. 218-223 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] B.Kim,C.Bergaud,S.Konishi,T.Masuzawa,H.Fujita: "Fabrication of micro twin probe for dimensional mesurement of microholes" 平成8年電気学会全国大会論文集. (発表予定). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 福田和人、秋山照伸、藤田博之: "アクチュエータによる駆動と塑性変形を利用した3次元マイクロ構造の自己構成法" 平成8年電気学会全国大会論文集. (発表予定). (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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