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Ecology and Dynamics of Hydrogen at Semiconductor Surface

Research Project

Project/Area Number 07305049
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section総合
Research Field 表面界面物性
Research InstitutionOsaka University

Principal Investigator

OURA Kenjiro  Osaka University, Faculty of Engineering, Professor, 工学部, 教授 (60029288)

Co-Investigator(Kenkyū-buntansha) TAKAHAGI Takayuki  Hiroshima University, Faculty of Engineering, Professor, 工学部, 教授 (40271069)
HONGO Shozo  Kobe University, Faculty of Engineering, Assistant professor, 工学部, 助教授 (00029232)
UEDA Kazuyuki  Toyota Technological Institute, Faculty of Engineering, Professor, 工学部, 教授 (60029212)
SAIKI Koichiro  University of Tokyo, Graduate School of Science, Assistant professor, 大学院・理学研究科, 助教授 (70143394)
TSUKADA Masaru  University of Tokyo, Graduate School of Science, Professor, 大学院・理学研究科, 教授 (90011650)
生地 文也  九州共立大学, 工学部, 教授 (00093419)
吉村 雅満  豊田工業大学, 工学部, 助教授 (40220743)
綿森 道夫  大阪大学, 工学部, 助手 (80222412)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥4,800,000 (Direct Cost: ¥4,800,000)
Fiscal Year 1996: ¥4,800,000 (Direct Cost: ¥4,800,000)
Keywordssurface hydrogen / ecology of hydrogen / ion beam / scanning tunneling microscopy / epitaxy
Research Abstract

Since hydrogen is the most simple element, it is difficult to detect hydrogen atoms especially when they reside on solid surfaces. Under the present condition, using several limited methods, several properties of surface hydrogen such as absolute amounts, electronic states, atomic arrangements are independently investigated in a fragmentary manner, and the behavior of surface hydrogen is being discussed under inference. The purpose of this research project is to elucidate the ecology and dynamics at semiconductor surfaces by means of intensive studies on surface hydrogen conducted by researchers who have achievements on specialized experimental methods and theorists.
In this research project, with getting in close touch between researchers, we have studied the influence of surface hydrogen on the behaviors of metal atoms and substrate silicon atoms at atomic hydrogen adsorption on the metal-silicon shallow interface structures by means of structure analysis, evaluation of chemical state, and theoretical calculation. The result worthy of special mention was that we have investigated the structural changes of the In/Si (111) surface induced by atomic hydrogen exposure and found that the substrate Si atoms ware self-organized to peculiar structures induced by adsorption of hydrogen with being strongly dependent on the substrate reconstruction.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] K. Oura 他4名: "Atomic-hydrogen-induced Ag clvster formation on Si (111) -√<3>×√<3>-Ag surface observed by scanning tunneling microscopy" J. Vac. Sci. Technol.B14. 988-991 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Oura 他4名: "Thin-film growth-mode anaoysis by low energy ion scattering" Surf. Sci.363. 161-165 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Oura 他3名: "Observation of the diffusion Ag atoms through an a-Si layer on Si (111) by low energy ion scattering" Surf. Sci.363. 156-160 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Ueda 他1名: "Surfactant effect of hydrogen for nickel growth on Si (111) 7×7 surface" Surf. Sci.357-358. 910-916 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H. Hongo 他4名: "New desorption state of D_2 from deuterium-terminated Si (100) by potassium adsorption" Surf. Sci.357-358. 698-702 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T. Takahagi 他4名: "Aluminum-selective chemical vapor deposition induced by hydrogen desorption on silicon" Jpn. J. Appl. Phys.35-2B. 1010-1013 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Oura, H.Ohnishi, Y.Yamamoto, I.Katayama and Y.Ohba: "Atomic-Hydrogen-Induced Ag Cluster Formation on Si (111) -ROO<3>xROO<3>-Ag Surface Observed by Scanning Tunneling Microscopy" J.Vac.Sci.Technol.B14. 988-991 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Tanaka, H.Morishita, J.-T.Ryu, I.Katayama and K.Oura: "Thin-Film Growth-Mode Analysis by Low Energy Ion Scattering" Surf.Sci.363. 161-165 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Kawamoto, T.Mori, S.Kujime and K.Oura: "Observation of the Diffusion of Ag Atoms through an a-Si Layr on Si (111) by Low Energy Ion Scattering" Surf.Sci.363. 156-160 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Murano and K.Ueda: "Surfactant Effect of Hydrogen for Nickel Growth on Si (111) 7*7 Surface" Surf.Sci.357-358. 910-916 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Hongo, S.Taniguchi, N.Fujimoto, T.Urano and T.Kanaji: "New Desorption State of D_2 from Deuterium-Terminated Si (100) by Potassium Adsorption" Surf.Sci.357-358. 698-702 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Sakaue, Y.Katsuda, S.Konagata, S.Shingubara and T.Takahagi: "Aluminum-Selective Chemical Vapor Deposition Induced by Hydrogen Desorption on Silicon" Jpn.J.Appl.Phys.35. 1010-1013 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Oura 他4名: "Atomic-hydrogen-induced Ag Cluster formation on Si(111)-√<3>×√<3>-Ag surface observed by scanning tunneling microscopy" J.Vac.Sci.Technol.B14. 988-991 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Oura 他4名: "Thin-film growth-mode analysis by low energy ion scattering." Surf.Sci.363. 161-165 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Oura 他3名: "Observation of the diffusion of Ag atoms throgh an a-Si layer on Si(111) by low energy ion scattering" Surf.Sci.363. 156-160 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Ueda 他1名: "Surfactant effect of hydrogen for nickel growth on Si(111) 7×7 surface" Surf.Sci.357-358. 910-916 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Hongo 他4名: "New desorption state of D_2 From deuterium-terminated Si(100) by potassium adsorption" Surf,Sci.357-358. 698-702 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Takahagi 他4名: "Aluminum-selective chemical vapor deposition induced by hydrogen desorption on silicon" Jpn.J.Appl.Phys.35-2B. 1010-1013 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 尾浦憲治郎: "半導体表面における水素媒介エピタキシ-" まてりあ.

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Oura 他 4名: "Scanning tunneling microscopy observation of hydrogen-indvced Ag cluster formation of the Si(111)surfaces" J.Vac.Sci.Technol. A13. 1438-1442 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Oura 他 5名: "The initral stage of Pb tnin film growth on Si(111)surface studied by TOF-ICISS" Nucl.Instr.& Methods. B(印刷中). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Ueda: "Highly Sensitire defection of oxygen from Si(111)7×7 surface by time-of-flight type electron stimulate-desorptron spectroscopy" Jpn.J.Appl.Phys.34-3. 1648-1651 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Ueda 他2名: "Oxygen adsorption study on Rh(100)surfaces by electron stimulated desorption" Jpn.J.Appl.Phys.34-7A. 3662-3665 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Ueda 他1名: "Surfactant effect of hydrogen for nickel growth on Si(111)7×7 svrface" Svrf.Sci. (印刷中).

    • Related Report
      1995 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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