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CHEMICAL ENGINEERING ANALYSIS AND CONTROL OF GROWTH PROCESS OF BULK SINGLE CRYSTALS FOR OPTO-ELECTRONICS DEVICES

Research Project

Project/Area Number 07305060
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 化学工学一般
Research InstitutionKYUSHU UNIVERSITY

Principal Investigator

IMAISHI Nobuyuki  KYUSHU UNIVERSITY INSTITUTE OF ADVANCED MATERIAL STUDY,PROFESSOR, 機能物質科学研究所, 教授 (60034394)

Co-Investigator(Kenkyū-buntansha) HOSHIKAWA Keigo  SINSHU UNIVERSITY,DEPT.OF EDUCATION,PROFESSOR, 教育学部, 教授 (10231573)
KUMAGAWA Masasi  SHIZUOKA UNIVERSITY,RES.INST.ELECTRONICS,PROFESSOR, 電子工学研究所, 教授 (30022130)
TSUKADA Takao  TOHOKU UNIVERSITY,RES.INST.CHEMICAL REACTION,ASSOCIATE PROFESSOR, 反応化学研究所, 助教授 (10171969)
HIRATA Akira  WASEDA UNIVERSITY,DEPT.APPLIED CHEMISTRY,PROFESSOR, 理工学部, 教授 (00063610)
OZOE Hiroyuki  KYUSHU UNIVERSITY INSTITUTE OF ADVANCED MATERIAL STUDY,PROFESSOR, 機能物質科学研究所, 教授 (10033242)
Project Period (FY) 1995 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 1997: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 1996: ¥1,400,000 (Direct Cost: ¥1,400,000)
KeywordsSingle Crystal Growth / Numerical Analysis / Transport Phenomena / Melt Convection / Flow Control / Thermal Stress / Thermo-Physical Properties of Melts / Marangoni Convection / 移動現象論 / バルク単結晶 / 移動現象 / 結晶育成工学 / 気相内対流 / シミュレーション / 光・電子材料用バルク単結晶
Research Abstract

This project aimed to establish scientific fundamentals of bulk single crystal growth for opto-electronics devices. Czochralski process for semiconductor and oxide crystals have been analyzed experimentally and numerically.
Gas phase transport phenomena was numerically investigated and a device was proposed to increase mass transfer rate of SiO.Fluid flow and heat transfer in melt pool was numerically analyzed and the application of magnetic field was revealed effective to control the oscillatory melt flows. Effect of buoyancy and thermocapillary forces on melt flow of compound semiconductors was analyzed experimentally and numerically. Thermal stress analysis and dislocation kinetic model was combined to predict dislocation density in semiconductor single crystals.
Global analysis code was developed for a RF heated Czochralski furnace for oxide crystal growth. The code has been effectively used to optimize the structure and operation of the furnace. The temperature distributions thus obtained was used to thermal-stress and crack formation analyzes. Thermo-physical properties of some oxide melts have been measured.

Report

(4 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • Research Products

    (124 results)

All Other

All Publications (124 results)

  • [Publications] Y.Okano: "Effect of growth atmosphere on convection in LiTaO_3 melt" J.Materials processing & Manufacturing Science. Vol.4. 41-44 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Masuda: "Numerical simulation of heat transfer in floating zone single crystal growth process with radio-frequency induction heating." Int.J.Heat Mass Transfer. Vol.39. 3035-3043 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Hayakawa: "Rapid Diffusion of Ga into InSb and Precipitation of In" J.Crystal Growth. Vol.163. 220-225 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Hayakawa: "Effect of Ampoule Rotation on Growth of InGaAsa Ternary Bulk Crystals from Solution" Crystal Research and Technology. Vol.31. 567-575 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] W.Hu: "Diffusion dominated process for the crystal growth of a binary alloy" J.Crystal Growth. Vol.169. 380-392 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 平田 彰: "濃度差マランゴニ対流に基づく多元系化合物半導体融液の均一分散・混合化" 日本マイクログラビティ応用学会誌. Vol.13. 165-170 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Okitsu: "Gravitational Effecta on Mixing and Growth Morphology of an In0.5Ga0.5Sb system" Crystal Research and Technology. Vol.31. 969-978 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Ozawa: "InGaAs Mixed Cryatals Grown by the Temparature-Diffrence Method and the Numerical Analysis of Solution Convection" J.Crystal Growth. Vol.166. 463-468 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Yasuhiro: "Numerical Simulation of solutal Marangoni convection during liquid mixing under microgravity" Microgravity Science and Technology. Vol.9. 237-244 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 岩本 光生: "Cz法融液対流に関する融液深さの影響" 化学工学シンポジウムシリーズ. Vol.51. 44-50 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 岩本 光生: "Cz法振動流に対するルツボ温度分布の影響"" 化学工学シンポジウムシリーズ. Vol.52. 51-56 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] N.Miyazaki: "Quantiative assesment for cracking in oxide bulk single crystals during Czochralski growth:Development of a computer program for thermal stress analysis" J.Crystal Growth. Vol.162. 83-88 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] A.Ikari: "Influence of hydrogen and oxygen on the melt properties and the crystal growth in silicon" J.Materials Science and Engineering. Vol.B36. 42-45 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Kumagawa: "Rapid and High Concentrated Permeation of Ga into InSb" J.Material Science and Engineering. Vol.B44. 301-303 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Okitsu: "Melt Mixing of the 0.3In/0.7GaSb/0.3Sb Solid Combination by Diffusion under Microgravity" Japanese J.Applied Physics. Vol.36. 3613-3619 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 宮崎 則幸: "半導体バルク単結晶CZ育成過程における転位密度評価" 日本機械学会論文集(A編). Vol.63,No.607. 636-642 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] N.Miyazaki: "Thermal shock craccking of lithium-niobate single crystal" J.Materials Science : Materials in Electronics. Vol. 8. 133-138 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 宮崎 則幸: "GSO単結晶の熱応力解析" 日本機械学会論文集(A編). Vol.63,No.612. 1744-1749 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Kobayashi: "Effect of internal radiation heat transfer on the convection in CZ oxide melt" J.Crystal Growth. Vol.180. 157-166 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Tsukada: "Numerical and experimental studies on crack formation in LiNbO_3 single crystal" J.Crystal Growth. Vol.180. 543-550 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Maeda: "Analysis of deposits evaporated from boron-doped silicon melt" Japanese.J.Applied Physics,Part 2. Vol.36 No.8. L971-L974 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Keigo Hoshikawa: "Oxygen concentration control and magnetic field application technologies in Czichralski silicon crystal growth" Trends in Materials Science TiMs-97. 163-174 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Arafune: "Investigation of steady Marangoni convection in low and high prandtl number fluids" J.Chemical Engineering of Japan. (印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Abe: "Oxygen solubility in Si melts;the influence of carbon addition" J.Electrochemical Society. (印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] N.Nakanishi: "The ring depression technique for measuring surface tension of molten germanium" J.Crystal Growth. (印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] X.Huang: "Analysis on Oxygen dissolution process concerning with CZ Si crystal growth by sessile drop method" Japanese J.Applied Physics. (印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] X.Huang: "Analysis on Oxygen evaporation rate and dissolution rate concerning with CZ Si crystal growth:Effect of Ar pressure" Japanese J.Applied Physics. (印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Machida: "The effect of argon gas fiow rate and furnace pressure on oxygen concentration in transverse magnetic field applied Czochralski grown silicon crystals" J.Crystal Growth. (印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Iwamoto: "The oscillatory convection in the melt of Czochralski crystal growth" 3rd KSME-JSME Thermal Eng.Conf.,'96-Kyongju(Kyongju, Korea). Vol.2. 83-86 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Shimabukuro: "Numerical computation for the Czochralski momentum, heat and mass transfer under a cusp-shaped magnetic field" Proc.3rd Int.Thermal Energy Congress(Kitakyushu). 221-227 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Takao: "Numerical and experimental studies on crack formation in LiNbO_3 single crystal" 2nd Int.Workshop on Modeling in Crystal Growth(Durby, Belgium). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Akamatsu: "Effect of crucible rotation on the melt convection and the structure in a Czochralski method" Proc.Transport Phenomena in Thermal Science and Process Engineering. Vol.3. 637-642 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Keigo Hoshikawa: "Control of oxygen concentration in Czochralski silicon crystal growyh by a cusp magnetic field" Pro.2nd Int.Symp.Advanced Sci.Techn.Silicon Materials(Kona,Hamaii,USA). 85-94 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Noriyuki Miyazaki: "Dislocation density analyses of bulk semiconductor crystals growth using dislocation kinetics model" 3rd Asia-Pacific Symp. Advances in Engineering Plasticity and its Applications AEPA'96,(Hiroshima). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Noriyuki Miyazaki: "Thermal stress analyses of GSO bulk single crystal" Int.Conf.on Computational Engineering Science(San Jose,Costa Rica). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Noriyuki Miyazaki: "Dislocation density analyses of bulk semiconductor single crystals during Czochralski growth" Int.Conf.on Computational Engineering Science,(San Jose,Costa Rica). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masasi Kumagawa: "Rapid and High Concentrated Permeation of Ga into InSb" 3rd Int.Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies,(Freiburg,Germany). (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Hayakawa: "Melting and Solidification of In/GaSb/Sb Combinations under Microgravity" 4th Japan-Canada Joint Workshops-Fluid and Material in Microgravity(Kyoto). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Ozawa: "Computational Analysis of Growth Rate for InGaAs Mixed Semiconductors Grown by Temperature Gradient Method"" In.Conf.on Computational Engineering Science(San Jose,Costa Rica). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Hayakawa: "Melting and Solidification of Semiconductors under Microgravity" Proc.JISCAST'97(Jointo Int.Conf.on Advanced Sci.and Techn.)(China). 99-102 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] X.Xie: "The Programmable Multiple Zone and Power Shifting Integrated Furnace and Big-diameter GaAs Crystal Growth Experiment Piggybacked on Satellite" Proc.48th Int.Astronautical Congress(Turin,Italy). 1-14 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yasunori Okano: "Convective Phenomena in Melt during In SbSingle Crystal Growth by RF Heating Czochralski Method" Proc.47th Canadian Cemical Engineering Conference,(Edmonton,Alberta,Canada. 733 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yasunori Okano: "Transient analysis of transport phenomena in bulk single crystal growth by the liquid encapusulated vertical gradient freezing(LE-VGF)method" Int.Conf.Computational Engineering Science(San Jose,Costa Rica). 232-237 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yasunori Okano: "Investigation of Steady Marangoni convection in low and high Prandtl number fluids" 16^<th> Canadian Congress of Applied Mechanics(CANCAM97)(Quebec,Canada). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] X.Huang: "A study of the oxygen dissolution process from silica to silicon melt" Electro Chemical Society,Spring Meeting(San Diego). (発表予定). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Sakai: "Measurement of oxygen dissolution rate from silica glass to silicon melt with sessile drop method" Electro Chemical Society, Spring Meeting ( San Diego ). (発表予定). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Sakai: "Oxygen dissolution rate from various kinds of silica glasses to silicon melt by silicon sessile drop method" Int.Conf.Crystal Growth-12,(Jersalem,Israel). (発表予定). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Kouiti Terashima: "Influence of boron addition into solicon melts on oxygen atom behavior in Cz pulling system" CCS Silicon Symposium. (発表予定). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masuda, M., T.Tsukada, M.Hozawa and N.Imaishi: "Numerical simulation of heat transfer in floating zone single crystal growth process with radio-frequency induction heating." Int.J.Heat Mass Transfer. Vol.39, No.14. 3035-3043 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Okano, Y., Y.Tsuji, D.H.Yoon and T.Fukuda: "Effect of growth atmosphere on convection in LiTa_3, melt" J.Materials Processing & Manufacturing Science. vol.4. 41-44 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hayakawa, Y., E.Hamakawa, T.Koyama & M.Kumagawa: "Repid Diffusion of Ga into InSb and Precipitation of In" J.Crystal Growth. vol.163 [3]. 220-225 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hayakawa, Y., T.Ozawa, M.Ando, T.Koyama, M.Masaki, K.Takahashi & M.Kumagawa: "Effect of Ampoule Rotation on Growth of InGaAsa Ternary Bulk Crystals from Solution"" Cryst.Res.Technol. vol.31 [5]. 567-575 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] W.Hu, A.Hirata, , S.Nishizawa: "Diffusion dominated process for the crystal growth of a binary alloy" J.Crystal Growth. vol.169. 380-392 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hirata, A., K.Arafune, S.Fujiwara, M.Kumagawa, Y.Hayakawa, K.Okitsu, N.Imanishi, S.Yasuhiro, Y.Okano, S.Sakai, T.Osaka, S.Yoda and T.Oida: "Mixing of multi-component semiconductor melts by solutal Marangoni effect" J.Japan Society of Micro Gravity Application. vol.13 [3]. 165-170 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Okitsu, K., Y.Hayakawa, A.Hirata, S.Fujiwara, Y.Okano, N.Imaishi, S.Yoda, T.Oida, T.Yamaguchi, M.Kumagawa: "Gravitational Effecta on Mixing and Growth Morphology of an In0.5Ga0.5Sb system"" Cryst.Res.Technol.vol.31 [8]. 969-978 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Ozawa, T., M.Ando, Y.Hayakawa & M.Kumagawa: "InGaAs Mixed Cryatals Grown by the Temparature-Diffrence Method and the Numerical Analysis of Solution Convection"" J.Cryst.Growth. vol.166. 463-468 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yasuhiro.S., T.Sato, N.Imaishi, A.Hirata & M.Kumagawa: "Numerical simulation of solutal Marangoni convection during liquid mixing under microgravity"" Microgravity Sci.Technology. vol.IX/4. 237-244 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Iwamoto, M., S.Shinnmyo, M.Nagai, H.Fukui, H.Ozoe: "Effect of melt depth on melt convection in Cz method" Chemical Engineering Symp.Series. No.51. 44 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Iwamoto, H.Tagami, M.Nagai, H.Fukui, H.Ozoe, T.Fukuda, S.Tozawa: "Effect of temperature distribution on melt flow in Cz method" Chemical Engineering Symp.Series. No.52. 51-56 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Miyazaki, N., H.Uchida, .T.Tsukada & T.Fukuda: "Quantitative assessment for cracking in oxide bulk single crystals during Czochralski growth : Development of a computer program for thermal stress analysis"" J.Cryst.Growth. vol.162. 83-88 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Ikari, A., H.Sasaki, E.Tokizaki, K.Terashima, S.Kimura: "Influence of hydrogen and oxygen on the melt properties and the crystal growth in silicon" J.Materials Science and Engineering. B36. 42-45 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Kumagawa, M., H.Ohtsu, E.Hamakawa, T.Koyama, M.Masaki, K.Takahashi, V.G.Lifshits & Y.Hayakawa: "Repid and High Concentrated Permeation of Ga into InSb" J.Materials Science and Engineering. vol.B44. 301-303 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Okitsu, K., Y.Hayakawa, T.Yamaguchi, A.Hirata, S.Fujiwara, Y.Okano, N.Imaishi, S.Yoda, T.Oida and M.Kumagawa: "Melt Mixing of the 0.3In/0.7GaSb/0.3Sb Solid Combination by Diffusion under Microgravity"" Jpn.J.Appl.Phys.vol.B36. 3613-3619 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Miyazaki, N.and S.Okuyama: "Evaluation of dislocation density during Cz growth of semiconductor crystals" Trans.JSME,Part A. vol.63 No.607. 636-642 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Miyazaki, N., A.Hattori & H.Uchida: "Thermal shock craccking of lithium-niobate single crystal" J.Materials Science : Materials in Electronics. vol.18. 133-138 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Miyazaki, N., T.Tamura, K.Kurashige, H.Ishibashi, H.Susa: "Thermal stress analysis of GSO single crystals" Trans.JSME,Part A. vol.63, No.612. 1744-1749 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Kobayashi, M., T.Tsukada and M.Hozawa: "Effect of internal radiation heat transfer on the convection in CZ melt"" J.Crystal Growth. vol.180. 157-166 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Tsukada T., K.Kakinoki, M.Hozawa, N.Imaishi, K.Shimamura and T.Fukuda: "Numerical and experimental studies on crack formation in LiNbO_3 single crystal"" J.Crystal Growth. vol.180. 543-550 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Maeda, S., M.Kato, K.Abe, H.Nakanishi, K.Hoshikawa, and K.Terashima: "Analysis of deposits evaporated from boron-doped silicon melt" Jpn.J.Apple.Physics. vol.36, Part 2, No.8. L971-L974 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Maeda, S., M.Kato, K.Abe, H.Nakanishi, K.Hoshikawa, and K.Terashima: "Temperature variations of the surface of a silicon melt due to evaporration of chemical species, 1.Antimony addetion" J.Electrochem.Soc.vol.144. 3185 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Abe, K., T.Matsumoto, S.Maeda, H.Nakanishi, K.Hoshikawa, and K.Terashima: "Oxygen solubility in Si melts ; influence of boron addition" J.Crystal Growth. vol.181. 41-47 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Okano, Y., S.kunitaka, T.fujioka, S.Sakai and M.Koyama: "Axisymmetric two-dimensional steady Marangoni convection in a floating half-zone under microgravity condition"" Numerical Heat Transfer, Part A. vol.31. 407-418 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hoshikawa, K.: "Oxygen concentration control and magnetic field application technologies in Czochralski silicon crystal growth" Trends in Materials Science TiMS-97. 163-174 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Abe, K., T.Matsumoto, S.Maeda, H.Nakanishi, and K.Terashima: "Oxygen solubility in Si melts ; the influence of carbon addition" J.Electorochem.Soc.(in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Nakanishi, H., K.Nakazato, K.Abe, S.Maeda, and K.Terashima: "The ring depression technique for measuring surface tension of molten germanium" J.Crystal Growth. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Huang, X., K.Saitou, S.Sakai, K.Terashima, and K.Hoshikawa: "Analysis on oxygen dissolution process concerning with CZSi crystal growth by sessile drop method" Jpn.J.Apple.Phys.(in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Huang, X., S.Saitou, S.Sakai, K.Terashima, and K.Hoshikawa: "Analysis on oxygen evaporation rate and dissolution rate concerning with CZ Si crystal growth : Effect of Ar pressure"" Jpn.J.Appl.Phys.(in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Machida, M., K/Hoshikawa, and Y.Shimizu: "The effect of argon gas flow rate and furnace pressure on oxygen concentration in transverse magnetic field applied Czochralski grown silcon crystals" J.Cryst. Growth. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Arafune, K., M.Sugiura and A.Hirata: "Investigation of steady Marangoni convection in low-and high Prandtl number fluids" J.Chem.Eng.Japan. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Tsukada T., K.Kakinoki, M.Hozawa, N.Imaishi, K.Shimamura and T.Fukuda: "Numerical and experimental studies on crack formation in LiNbO_3 single crystal" 2nd Int.Workshop on Modelling in Crystal Growth. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Iwamoto, M., H.Ozoe, T.Obata, M.Akamatsu, T.Fukuda and S.Tozawa: "The oscillatory convection in the melt of Czochralski crystal growth" 3rd KSME-JSME Thermal Eng.Conf., '96-Kyongju, Kyongju, Korea. Vol.2. 83-88 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Shimabukuro, Y., T.Tagawa, K.Kakimoto, and H.Ozoe: "Numerical computation for the Czochralski momentum, heat and mass transfer under a cuspshaped magnetic field" 3rd Int.Thermal Energy Congress, Kitakyushu. 221-227 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Akamatsu, M., K.Kakimoto and H.Ozoe: "Effect of crucible rotation on the melt convection and the structure in a Czochralski method" Transport Phenomena in Thermal Science and Process Engineering. Vol.3. 637-642 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hoshikawa, K.and H.Hirata: "Control of oxygen concentration in Czochralski silicon crystal growth by a cusp magnetic field" Proc.2nd Int.Symp.Advanced Sci.Techn.Silicon Materials (Kona, Hawaii, USA). 85-94 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Miyazaki, N.& S.Okuyama: "Dislocation density analyzes of bulk semiconductor crystals growth using dislocation kinetics model, The 3rd Asia-Pacific Symp.Advances in Engineering Plasticity and its Applications AEPA '96" Proc.appeared in " Advances in Engineering Plasticity and its Applications, Eds by T.Abe and T.Tsuta" Hiroshima, Japan. 513-518 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Miyazaki, N.& T.Tamura: "Thermal stress analyzes of GSO bulk single crystal" Int.Conf.on Computational Engineering Science, Proc.appeared in "Advances in Computational Engineering Science, Eds by S.N.Atluri and G.Yagawa"p.250, San Jose, Costa Rica. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Miyazaki, N.& S.Okuyama: "Dislocation density analyzes of bulk semiconductor single crystals during Czochralski growth"" Int.Conf.on Computational Engineering Science, Proc.appeared in "Advances in Computational Engineering Science, Eds by S.N.Atluri and G.Yagawa"pp.262-267, San Jose, Costa Rica. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Ozawa, T., M.Ando, Y.Hayakawa & M.Kumagawa: "Effect of Temperature Gradient on InGaAs Crystal Growth and its Numerical Analysis" Int.Symp.on Surfaces and Thin Films of Electronic Materials, Proc.in "Special Issue of the Bulletin of the Research Institute of Electronics, Shizuoka University". vol.30 [3]. 131-134 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hayakawa, Y., H.Ohsawa, H.Nakano, T.Koyama, M.Masaki, K.Takahasi, A.Muller, B.Dedavid, C.Eleani & M.Kumagawa: "Anormalous Segregation of Al during Growth of Al-doped GaSb" Int.Symp.on Surfaces and Thin Films of Electronic Materials, Proc.in "Special Issue of the Bulletin of the Research Institute of Electronics, Shizuoka University" Hamamatsu. vol.30 [3]. 135-138 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Kumagawa, M., E.Hamakawa, H.Ohtsu, T.Koyama, M.Masaki, K.Takahasi, V.G.Lifshits & Y.Hayakawa: "Rapid and High Concentrated Permeation of Ga into InSb" 3rd Int.Workshop on Expert Evaluation and Control of Compound Semiconductor Materials and Technologies, Freiburg, Germany. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hayakawa, Y., A.Hirata, Y.Okano, N.Imaishi, K.Okitsu, K.Arafune, S.Yoda, T.Oida & M.Kumagawa: "Melting and Solidification of In/GaSb/Sb Combinations under Microgravity" The 4th Japan-Canada Joint Workshops-Fluid and Material in Microgravity-, pp207-212, Kyoto. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Ozawa, T., Y.Hayakawa, H.Ono, T.Koyama & M.Kumagawa: "Computational Analysis of Growth Rate for InGaAs Mixed Semiconductors Grown by Temperature Gradient Mcthod." In.Conf.on Computational Engineering Science, Proc.in"Advances in Computational Engineering Science, ed.by S.N.Atluri and G.Yagawa"p.238, San Jose, Costa Rica. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Hayakawa, Y., A.Hirata, K.Okitsu, T.Yamaguchi, Y.Okano, N.Imaishi, S.Yoda, T.Oida & M.Kumagawa: "Melting and Solidification of Semiconductors under Microgravity, Joint Int.Conf.on Advanced Sci.and Techn.by Shizuoka University and Zhejiang University" Proc.appeared in "Proc.JISCAST' 97"pp.99-102.Republic of China. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Xie, X., X.Risheng, Z.Tao, Z.Liehua, H.Xiaowen, Y.Xiaohui, M.Lin, L.Lanying, Z.Xingru, C.Jiagui, F.Ji, C.Ruidong, B.Yingjun, Z.Guagjie, A.Hirata, Y.Okano, M.Kumagawa, Y.Hayakawa, Y.Kumagiri & B.Yuan: "The Programmable Multiple Zone and Power Shifting Integrated Furnace and Big-diameter GaAs Crystal Growth Experiment Piggybacked on Satellite" 48th Int.Astronautical Congress, Proc.appeared in "Proc.48th Int.Astronautical Congress"pp.1-14, Turin, Italy. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Okano, Y., K.Yamamoto, Y.Hayakawa & M.Kumagawa: "Convective Phenomena in Melt during InSb Single Crystal Growth by RF Heating Czochralski Method" 47th Canadian Cemical Engineering Conference, 733, Edmonton, Alberta, Canada. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Okano, Y., S.Kunikata, S.sakai, T.Fujioka, A.Hirata, M.Sakurai, M.Koyama, and T.Morita: "Numerical and experimental study on Marangoni convection in a floating zone under microgravity field Int.Conf.Computational Engineering Science, San Jose, Costa Rica, 1997" Proc.appeared in "Advances in Comput.Eng.Sci.232-237 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Okano, Y., T.Morita, and S.Sakai: "Transient analysis of transport phenomena in bulk single crystal growth by the liquid encapusulated vertical gradient freezing (LE-VGF) method" Proc.16^<th> Canadian Congress of Applied Mechanics (CANCAM97), Quebec. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Huang, X., K.Saitou, S.Sakai and K.Hoshikawa: "A study of the oxygen dissolution process from silica to silicon melt" ECS Spring Meeting, May 1998 in San Diego.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Sakai, S., X.Huang, K.Saitou, Y.Okano and K.Hoshilkawa: "Measurement of oxygen dissolution rate from silica glass to silicon melt with sessile drop method" ECS Spring Meeting, May 1998 in San Diego.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Sakai, X.Huang, K.Saitou, Y.Okano, S.Ohishi and K.Hoshikawa: "Oxygen dissolution rate from various kinds of silica glasses to silicon melt by silicon sessilc drop method" ICCG-12, June 1998 in Jersalem.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Terashima, K., K.Abe, S.Maeda, and H.Nakanishi: "Influence of boron addition into solicon melts on oxygen atom behavior in Cz pulling system" CCS Silicon Symposium, May 1998.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Takao Tsukada: "Effect of internal radiation heat transfer on the convection in Cz oxide melt" J.Crystal Growth. Vol.180. 157-166 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Takao Tsukada: "Numerical and experimental studies on crack formation in LiNbO_3 single crystal" J.Crystal Growth. Vol.180. 543-550 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Noriyuki Miyazaki: "Thermal shock cracking of lithium niobate single crystal" J.Materials Science:Materials in Electrnics. Vol.8. 133-138 (1997)

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      1997 Annual Research Report
  • [Publications] 宮崎則幸: "GSO単結晶の熱応力解析" 日本機械学会論文集(A編). Vol.63,No.612. 1744-1749 (1997)

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      1997 Annual Research Report
  • [Publications] 宮崎則幸: "半導体バルク単結晶CZ育成過程における転位密度評価" 日本機会学会論文集(A編). Vol.63,No.162. 636-642 (1997)

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      1997 Annual Research Report
  • [Publications] Keigo Hoshikawa: "Oxygen concentration control and magnetic field application technologies in Czichralski silicon crystal growth" Trends in Materials Science TiMs-97. 163-174 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Hiroyuki Ozoe: "Effect of crucible rotation on the melt convectionand the structure in a Czochralski method" Proc.10^<th> Transport Phenomena in Thermal Science and Process Engineering. Vol.3. 637-642 (1997)

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      1997 Annual Research Report
  • [Publications] Akira Hirata: "Investigation of steady Marangoni convection in low and high Prandtl number fluids" J.Chemical Engineering of japan. (発表予定). (1998)

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      1997 Annual Research Report
  • [Publications] 塚田 隆夫,今石 宣之 他: "Numerical simulation of heat transfer in floating zone single crystal growth process with radio-frequency induction heating" International Journal of Heat and Mass transfer. 39・14. 3035-3043 (1996)

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      1996 Annual Research Report
  • [Publications] 平田 彰 他: "Diffusion Dominated Process for the Crystal Growth of a Binary alloy" Journal of Crystal Growth. 169. 380-392 (1996)

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      1996 Annual Research Report
  • [Publications] 宮崎 則幸: "半導体バルク単結晶CZ育成過程における転位密度評価" 日本機械学会科論文集 A編. 63・607(掲載決定). (1997)

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      1996 Annual Research Report
  • [Publications] 塚田 隆夫、今石 宣之 他: "Numerical simulation and Experimental Studies on Grack Formation i_n LiNbO3 Single" Abstract of“2nd Int.Workshop on Modeling in Crystal Crowth"(Belgium,Oct.13-16,1996)Journal of Crystal Growth(1997)に掲載予定. 111-113 (1996)

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      1996 Annual Research Report
  • [Publications] 熊川 征司 他: "Effect of ampoule rotation on growth of InGaAs ternary bulk crystals from solution" Crystal Research and Technology. 31・5. 567-575 (1996)

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      1996 Annual Research Report
  • [Publications] 干川 圭吾 他: ""Control of oxygen concentration in Czochralski silicon crystal growth by a cusp magnetic field"" Proceedings of 2nd International Symposium on Advanced Science and Technology of Silicon Materials. 85-94 (1996)

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      1996 Annual Research Report
  • [Publications] 今石宣之(分担執筆): "解いてわかる材料工学(熱移動の部分を担当)" 金属学会編 丸善株式会社, (1997)

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      1996 Annual Research Report
  • [Publications] Y. Hayakawa: "Crystal Growth of AlGaSb Bulk Crystal" Proc. 15th Canadian Congress of Applied Mechanics. 2. 760-761 (1995)

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      1995 Annual Research Report
  • [Publications] T. Ozawa: "InGaAs Mixed Crystals grown by Temperature Gradient Method and its Numerical Analysis of Solution Convection" J. Cryst. Growth. in press (1996)

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      1995 Annual Research Report
  • [Publications] Y. Okano: "Effect of Various Parameters on Flow and Temperature Fields during Czochralski Growth of Oxide Single Crystals" Proc. the Computational Mechnichs‘95. 1. 550-555 (1995)

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      1995 Annual Research Report
  • [Publications] Y. Okano: "Effect of growth atmosphere on convection in LiTaO_3 melt" J. Materials Processing & Menufacturing Science. 4. 1-4 (1995)

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      1995 Annual Research Report
  • [Publications] H. Ozoe: "The study on the natural convection of liquid metal in various directions of external magnetic field with an application on the Czochralski crystal growth" Proc. 1st Int. Joint Symp. 43-48 (1995)

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      1995 Annual Research Report
  • [Publications] T. Tsukada: "Effect of internal radiation within crystal and melt on Cz crystal growth of oxide" Int. J. Heat Mass Transfer. 38. 2707-2714

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      1995 Annual Research Report
  • [Publications] 今石 宣之: "結晶成長ハンドブック" 共立出版, 248-253 (1995)

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      1995 Annual Research Report
  • [Publications] 今石 宣之: "新編 伝熱工学の進展" 養賢堂, 227-338 (1995)

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      1995 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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