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Plasma Science

Research Project

Project/Area Number 07308036
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section総合
Research Field プラズマ理工学
Research InstitutionTohoku University

Principal Investigator

SATO Noriyoshi  Tohoku University, Department of Electorical Engineering, Professor, 大学院・工学研究科, 教授 (40005252)

Co-Investigator(Kenkyū-buntansha) INUTAKE Masaaki  Tohoku University, Dep. of Electorical Eng., Professor, 大学院・工学研究科, 教授 (90023738)
WATANABE Yukio  Kyushu University, Dep. of Inf. Sci., Professor, システム情報科学研究科, 教授 (80037902)
KATO Yoshiaki  Osaka University, Institute for Laser Eng., Professor, レーザー核融合研究センター, 教授 (30093397)
SATO Tetsuya  National Institute for Fusion Scientce, Professor, 教授 (80025395)
AMAGISHI Yoshimitsu  Shizuoka Umiversity, Dep. of Physics, Professor, 理学部, 教授 (10042409)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥8,000,000 (Direct Cost: ¥8,000,000)
Fiscal Year 1996: ¥3,800,000 (Direct Cost: ¥3,800,000)
Fiscal Year 1995: ¥4,200,000 (Direct Cost: ¥4,200,000)
KeywordsPlasma Science / プラズマ / 材料プロセス / 地球・宇宙環境 / 核融合
Research Abstract

Plasma science, which has the plasma physics as its base, are closely related to many important scientific fields, including nuclear fusion science, space and astrophysics, and many plasma applications. As a result, there appears a separation of plasma scientists in the various fields of the plasma science. Now it is difficult to have an opportunity to discuss common interests among the plasma scientists
In this project, we have discussed how to promote the plasma science under the above circumstance. After various kinds of discussions at the meetings and workshops, it has been widely recognized that a soft "plasma scientists network"should be established among plasma scientists working in the various fields closely related to the plasma science.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] 佐藤 徳芳: "エッチングプラズマのパラメータ制御" プラズマ核融合学会誌. 71. 717-725 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 天岸 祥光: "「群速度」再考-異常分散媒質中の波束伝播速度-" 日本物理学会誌. 50. 429-434 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Sato: "Complexity in Plasma:From Self-Organization to Geodynamo" Physcs of Plasmas. 3. 2135-2142 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Iizuka: "Control of Negative Ion Production" Proc.of 3rd International Conference on Reactive Plasmas. 415-416 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Li: "Production of Large-Diameter Uniform Plasma by Modified Magnetron-Typed RF Discharge" Proc.of 3rd International Conference on Reactive Plasmas. 211-212 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Kato: "Ion and Electron Energy Control in an RF Silane Plasma" Proc.of 3rd International Conference on Reactive Plasmas. 413-414 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Sato: "Plasma-Parameter Control for Dry Etching" J.Plasma and Fusion Research. Vol.71. 717-725 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Amagishi: "Reconsideration of "Group Velocity"" BUTURI. Vol.50. 429-434 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Sato: "Complexity in Plasma : From Self-Organization to Geodynamo" Physcs of Plasmas. Vol.3. 1996-2135 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Iizuka: "Control of Negative Ion Production" Proc. of 3rd International Conference on Reactive Plasmas. 415-416 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Li: "Production of Large-Diameter Uniform Plasma by Modified Magnetron-Typed RF Discharge" Proc. of 3rd International Conference on Reactive Plasma. 211-212 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Kato: "Ion and Electron Energy Control in an RF Silane Plasma" Proc. of 3rd International Conference on Reactive Plasmas. 413-414 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 佐藤徳芳: "エッチングプラズマのパラメータ制御" プラズマ核融合学会誌. 71. 717-725 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] 天岸祥光: "「群速度」再考-異常分散媒質中の波速伝播速度-" 日本物理学会誌. 50. 429-434 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Sato: "Complexity in Plasma : From Self-Organization to Geodynamo" Physcs of Plasmas. 3. 2135-2142 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Iizuka: "Control of Negative Ion Production" Proc.of 3rd International Conference on Reactive Plasmas. 415-416 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Li: "Production of Large-Diameter Uniform Plasma by Modified Magnetron-Typed RF Discharge" Proc.of 3rd International Conference on Reactive Plasmas. 211-212 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Kato: "Ion and Electron Energy Control in an RF Silane Plasma" Proc.of 3rd International Conference on Reactive Plasmas. 413-414 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 佐藤徳芳: "エッチングプラズマのパラメータ制御" プラズマ核融合学会誌. 71. 717-725 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 天岸祥光: "「群速度」再考-異常分散媒質中の波束伝播速度-" 日本物理学会誌. 50. 429-434 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Sato: "Complexity in Plasma:From Self-Organization to Geodynamo" Physcs of Plasmas. (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y.Li: "Control of sputtering in a modified magnetron-typed RF discharge" Proccedings of 8th Symposium on Plasma Science for Materials. 81-85 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M.Shiratani: "Simultaneous in-situ measurements of properties of particulates in rf silane plasmas using a polarization-sensitive-laser scattering method" Journal of Appllied Physics. 79. 104-109 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y.Kiwamoto: "Detection of Thermonuclear Fusion Neutrons from Deuterium-Proton Mixed Plasma in the GAMMA10 Tandem Mirror" Physics of Plasmas. 3. (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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