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Flexible micro motion-systems having distributed actuators

Research Project

Project/Area Number 07405006
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionTohoku University

Principal Investigator

ESASHI Masayoshi  Tohoku Univ., Faculty of Eng., Prof., 大学院・工学研究科, 教授 (20108468)

Co-Investigator(Kenkyū-buntansha) KOYANAGI Mitsumasa  Tohoku Univ., Faculty of Eng., Prof., 大学院・工学研究科, 教授 (60205531)
UCHIYAMA Masaru  Tohoku Univ., Faculty of Eng., Prof., 大学院・工学研究科, 教授 (30125504)
KURABAYASHI Tohru  Tohoku Univ., Faculty of Eng., Lecturer, 大学院・工学研究科, 講師 (90195537)
MINAMI Kazuyuki  Tohoku Univ., Faculty of Eng., Lecturer, 大学院・工学研究科, 講師 (00229759)
Project Period (FY) 1995 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥36,600,000 (Direct Cost: ¥36,600,000)
Fiscal Year 1997: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1996: ¥5,900,000 (Direct Cost: ¥5,900,000)
Fiscal Year 1995: ¥27,300,000 (Direct Cost: ¥27,300,000)
KeywordsMicroactuator / Micromachine / Micromachining / Active catheter / Micro motion system / Flexible machine / Distributed machine / Three-dimensinal machining / マイクロマシ-ニング / 分布型機械 / 能動力カテーテル / 文体的微細加工
Research Abstract

Micro motion-systems which have distributed actuators have been studied. These systems include active catheters which move like a snake in blood vessel, tactile display devices which has two-dimensional array actuators, and electrostatic actuators which move like bellows. The main subject of this project is the active catheters which have small multi-joint structures and inner and outer tubes. The joints are Shape Memory Alloy (SMA) coils which shrink by a current heating and the link-joint unit moves in 6 directions. Several types of which links are made of silicon or polymer have been developed. Integrated circuits for communication and control and micro-assembly method have been also developed for the active catheters. The active catheter can be multi-functional by incorporating sensors in it. For the purpose of advanced ultrasonic imaging devices at the end of catheter, microfabrication process for PZT 1-3 composite structures has been developed. Micromachined silicon is used as a mold during sintering of ceramics. Other sensors as small size optical fiber pressure sensors and distributed bending sensors which are made of optical wave guide and Bragg gratings have been also developed.
The project on flexible motion systems using distributed actuators was successfully carried out and achievements have been obtained as planned.

Report

(4 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • Research Products

    (80 results)

All Other

All Publications (80 results)

  • [Publications] G.Lim: "Multi-lind Active Catheter Snake-Like Motion" Robotica. 14・5. 499-506 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] G.Lim: "Future of Active Catheters" Sensors and Actuators. A56. 113-121 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.T.Park: "An Integrated Communication and Control System for a Multi-link Active Catheter" J.of Micromeshanics and Microengineering. 6・2. 345-351 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 杉原 正久: "連続紫外線レーザによる高速CVDを利用したマイクロアセンブリ" 電気学会論文誌E. 117-E・1. 3-9 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 江刺 正喜: "マイクロ能動カテーテル" 骨・関節・靭帯. 10・4. 417-423 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Watanabe: "Fabrication Methods for High Aspect Ratio Microstructures" J.of Intelligent Material System and Sturctures. 8・2. 173-176 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] G.Lim: "Active Catheter for Medical Intracoronary Intervetion" intern.Symp.on Microsystems,Intelligent Materials and Robots.91-94 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Haga: "Active Catheter Using Polymer Links" 9th Annual Intern.Meeting,Minimally Invasive Therapy&Allied Technologies. 56 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Katsumata: "Fiber-Optic Minature Pressure Sensor" Intn.Conf.Optical MEMS and Their. 141-146 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Tomiyoshi: "Distributed Optical Bending Sensors with Bragg Gratings in Optical Waveguide" Intn.Conf.on Optical MEMS and Their. 200-205 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.N.Wang: "Novel Processing of High Aspect Ratio 1-3Structures of High Density PZT" Proc.of the Micro Electro Mechanical Systems‘98. 223-228 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Haga: "Small Diameter Active Catheter Using Shape Memory Alloy" Proc.of the Micro Electro Mechanical Systems‘98. 419-424 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.T.Park: "Integrated Communication and Control Circuit for Multi-Link Active Catheter" The 6th Conf.on Sensor Teshnology‘95. 6・1. 510-516 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.T.Park: "Integrated Communication and Control Circuit for Active Catheter" Technical Digest of the 14th Sensor Symp.14. 71-74 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] G.Lim: "The Active Catheter which have SMA Actuators and Bias Spring" Technical Digest of the 14th Sensor Symp.14. 263-266 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Watanabe: "Deep X-ray Lithography and 02 RIE as High Ratio Microfabrication" Technical Digest of the 14th Sensor Symp.14. 179-182 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Haga: "Active Catheter Using Polymer Links" Tech.Digest of the 15th Sensor Symp.15. 177-180 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 古澤 俊夫: "厚い高分子膜のスピンコートにおける厚み均一性の向上" 第15回「センサの基礎と応用」シンポジウム講演概要集(和文速報). 15. 67 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 近藤 悟: "電気粘性流体による触覚刺激デバイス" 第15回「センサの基礎と応用」シンポジウム講演概要集(和文速報). 15. 68 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 森下 泰光: "螺旋型静電マイクロアクチュエータの試作" 第15回「センサの基礎と応用」シンポジウム講演概要集(和文速報). 15. 69 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 清水 聖治: "蛇管ワイヤ用マイクロ力覚センサの試作" 日本機械学会ロボティクス・メカトロニクス講演会‘97. 137-138 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.T.Park: "A Study of smart Active Catheter" KIEE‘97Annual Summer Conference. 21-23 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 芳賀 洋一: "形状記憶合金による能動屈曲機構を備えた細径超音波内視鏡" J.Mad.Ultrasonics. 24・9. 413 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 芳賀 洋一: "多機能能動カテーテル" 第13回日本ME学会東北支部大会. 22 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 篠原 英司: "やわらかい蠕動運動システム(人工ミミズ)" 日本機械学会第10回バイオエンジニアリング講演会. 10. 589-590 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 森下 泰光: "ベロース型静電マイクロアクチュエータ" 電気学会マイクロマシン研究会. MM-98-8. 39-43 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 峯田 貴: "ウェハプロセスで作成した能動カテーテル用のシリコン多関節構造" 平成10年電気学会全国大会. 200-201 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Esashi(H.C.Hoch ed.): "Nanofabrication and Biosystems Microsensors and Microactuators for Biomedical Applications(担当章)" Cambridge Univ.Press, p.423(pp.61-79) (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] G.Lim: "Multi-link Active Catheter Snake-Like Motion" Robotica. 14,5. 499-506 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] G.Lim: "Future of Active Catheters" Sensors and Actuators. A56. 113-121 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Park: "An Integrated Communication and Control System for a Multi-link Active Catheter" J.of Micromech.and Microeng.6,2. 345-351 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Sugihara: "Micro Assembly by High Rate CVD Using CW UV Laser (in Japanese)" Trans.IEE of Japan. 117-E,1. 3-9 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Esashi: "Micro Active Catheter" J.of Musculoskeletal System. 10,4. 417-423 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Watanabe: "Fabrication Methods for High Aspect Ratio Microstructures" Systems and Structures. 8,2. 173-176 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] G.Lim: "Active Catheter for Medical Intracoronary Intervention" Intern.Symp.on Microsystems, Intelligent Materials and Robots. 1. 91-94 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Haga: "Active Catheter Using Polymer Links" 9th Annual Intern. Meeting, Minimally Invasive Therapy & Allied Technologies. 56. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Katsumata: "Fiber-Optic Minature Pressure Sensor" Intn.Conf.on Optical MEMS and Their Applications. 141-146 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Tomiyoshi: "Distributed Optical Bending Sensors with Bragg Gratings in Optical Waveguide" Intn.Conf.on Optical MEMS and Their Applications. 200-205 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.N.Wang: "Novel Processing of High Aspect Ratio 1-3 Structures of High Density PZT" Proc.of the Micro Electro Mechanical Systems' 98. 223-228 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Haga: "Small Diameter Active Catheter Using Shape Memory Alloy" Proc.of the Micro Electro Mechanical Systems. 419-424 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.T.Park: "Integrated Communication and Control Circuit for Multi-Link Active Catheter" The 6th Conf.on Sensor Technology '95. 6,1. 510-516 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.T.Park: "Integrated Communication and Control Circuit for Active Catheter" Technical Digest of the 14th Sensor Symposium. 14. 71-74 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] G.Lim: "Active Catheter which have SMA Actuators and Bias Spring" Technical Digest of the 14th Sensor Symposium. 14. 263-266 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Watanabe: "Deep X-ray Lithography and 02 RIE as High Aspect Ratio Microfabrication" Technical Digest of the 14^<th> Sensor Symposium. 14. 179-182 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Haga: "Active Catheter Using Polymer Links" Technical Digest of the 15th Sensor Symposium. 15. 177-180 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Furusawa: "Improvement of thickness uniformity in spin coating of thick polymer film (in Japanese)" The 15th Sensor Symposium Late News. 15. 67 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Kodoh: "Tactile stimulating device using electro rheological fluid (in Japanese)" The 15th Sensor Symposium Late News. 15. 68 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Morishita: "Fabrication of spiral electrostatic actuator (in Japanese)" The 15th Sensor Symposium Late News. 15. 69 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Shimizu: "Fabrication of a micro force sensor for conduit guided wires (in Japanese)" Convention on robotics and Mechatronics '97 (Japan Soc.Of Mechanical Eng.). 137-138 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.T.Park: "A Study of Smart Active Catheter" KIEE'97 Annual Summer Conference. 21-23 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Haga: "Actively bending ultrasound endoscope using shape memory alloy actuator (in Japanese)" J.Med.Ultrasonics. 24. 413 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Haga: "Multi-function active catheter (in Japanese)" 31th Tohoku convention of Jap.ME Soc.22. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] E.Shinohara: "Flexible peristaltic motion system (Artificial earthworm) (in Japanese)" 10th Bioengineering Conf. (Japan Soc.of Mechanical Eng.). 589-590 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Morishita: "Bellows-shape micro electrostatic actuator (in Japanese)" Technical Report IEE Japan. MM-98-8. 39-43 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Mineta: "Multi-link-joint structure fabricated in silicon wafer for active catheter (in Japanese)" Convention of IEE Japan. 200-201 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Esashi: Microsensors and Microactuators for Biomedical Applications (in H.C.Hoch ed., Nanofabrication and Biosystems). Cambridge Univ.Press, 61-79 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 江刺正善: "マイクロ能動カテーテル" 骨・関節・靭帯. 10・4. 417-423 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Watanbe: "Fabrication Methods for High Aspect Ratio Microstructures" J.of Intelligent Material Systems and Structures. 8・2. 173-176 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Y.Haga: "Active Catheter Using Polymer Links" 9th Annual Intern.Meeting,Minimally Invasive Therapy & Allied Technologies. 56 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Katsumata: "Fiber-Optic Minature Pressure Sensor" Intn.Conf.on Optical MEMS and Their. 141-146 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Tomiyoshi: "Distributed Optical Bending Sensors with Bragg Gratings in Optical Waveguide" Intn.Conf.on Optical MEMS and Their. 200-205 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.N.Wang: "Novel Orocessing of High Aspsct Ratio 1-3 Structures of High Density PZT" Proc. of the Micrc Electro Mechanical Systems‘98. 223-228 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Park: "An Integrated Communication and Control System for a Multi-link Active Catheter" J.of Mictomechanics and Microengineering. 6,2. 345-351 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] G.Lim,: "Future of Active Catheters" Sensors and Actuators. A56. 113-121 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] G.Lim: "Multi-link Active Catheter Snake-Like Motion" Robotica. 14,5. 499-506 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 杉原正久: "連続紫外レーザによる高速CVDを利用したマイクロアセンブリ" 電気学会論文誌E. 117-E,1. 3-9 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] G.Lim: "The Active Catheter which have SMA Actuators and Bias Spring" Technical Digest of the 14th Sensor Symp.14. 263-266 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Park: "Integrated Communication and Control Circuit for Active Catheter" Technical Digest of the 14th Sensor Symp.14. 71-74 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Watanabe: "Deep X-ray Lithography and O_2 RIE as High Aspect Ratio Microfabrication" Technical Digest of the 14th Sensor Symp.14. 179-182 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Ohtsu: "Fabrication of Packaged Thin Beam Structures by an Improbed Drying Method" Proc.of the Micro Electro Mechanical Systems. 9. 228-233 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Esashi(H.C.Hoch ed.): "Nanofabrication and Biosystems ″Microsensors and Microactuators for Biomedical Applications″(担当章)" Cambridge Univ.Press, 423(61-79) (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] G.Lim: "Active Catheter for Medical Intracoronary Intervention" Intern.Symp.on Microsystems,Intelligent Materials and Robots. 91-94 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.T.Park: "Integrated Communication and Control Circuit for Multi-Link Active Catheter" The 6th Conf.on Sensor Technology'95. 510-516 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 江刺正喜: "シリコンプロセスとその応用" 日本ME学会雑誌. 9. 3-10 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 朴起台: "能動カテーテルのための通信・制御用集積回路" 計測自動制御学会、第21回ロボット工学部会研究会. 15-20 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] G.Lim: "Multi-Link Active Catheter Moving Like a Snake" Robotica. (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] G.Lim: "The Active Catheter which have SMA Actuators and Bias Spring" Technical Digest of the 14th Sensor Symposium. (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Park: "Integrated Communication and Control Circuit for Active Catheter" Technical Digest of the 14th Sensor Symposium. (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Gon: "Fabrication of Reactive lon Etching Systems for Deep Silicon Machining" Technical Digest of the 14th Sensor Symposium. (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Watanabe: "Deep X-ray Lithography and O_2 RIE as High Aspect Ratio Microfabrication" Technical Digest of the 14th Sensor Syposium. (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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