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Development of Stacked Thin-film Micro-actuator with Two Laser Beam

Research Project

Project/Area Number 07405009
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionHOKKAIDO UNIVERSITY

Principal Investigator

IKEDA Masayuki  Hokkaido Univ., Fac.of Eng., Pro., 大学院・工学研究科, 教授 (50212783)

Co-Investigator(Kenkyū-buntansha) SHIBATA Takayuki  Hokkaido Univ., Fac.of Eng., Assist., 大学院・工学研究科, 助手 (10235575)
MAKINO Eiji  Hokkaido Univ., Fac.of Eng., Assist.pro., 大学院・工学研究科, 助教授 (70109495)
Project Period (FY) 1995 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥33,800,000 (Direct Cost: ¥33,800,000)
Fiscal Year 1997: ¥5,600,000 (Direct Cost: ¥5,600,000)
Fiscal Year 1996: ¥16,600,000 (Direct Cost: ¥16,600,000)
Fiscal Year 1995: ¥11,600,000 (Direct Cost: ¥11,600,000)
KeywordsTHIN FILM / SHAPE MEMRY ALLOY / BIMETAL / CERAMICS FILM / FERROELECTRICS FILM / FILM ACTUATER / LASER ABRATION / INSULATING THIN FILM / 多層超薄膜形成 / 金属多層薄膜形成 / 機能性多層薄膜 / 複合多層薄膜 / セラミックス膜形成 / 薄膜マイクロアクチュエータ / 金属多層膜形成 / 複合多層膜評価 / 機能性多層膜特性
Research Abstract

A new ultra-thin multi-layr film forming apparatus combined molecular beam epitaxy and ArF excimer laser abrasion was designed and developed. As an evaporating source, high temperature Knudsen cell was employed to control of depositing rate and constituents precisely. The maximun rising temperature was 1700゚C.In order to correct the oxygen content of a metal oxide ceramics film and to treat the surface of a substrate clean an Ion-beam gun was installed. And for heating and activating, CO_2 laser beam was irradiated onto the substrate surface.
The metal oxide ceramics such as A1_20_3, PbO,TiO_2, BaTiO_3 films of 4-6 nm thickness were fomed on Si (100) substrates by ArF excimer laser abrasion. It is possible to deposit the extremely thin and fine Al_2O_3 film at room temperature successfully. According to X-ray diffraction analysis, the crystallographic structure of the film formed at room temperature was amorphous, but it changed to gamma structure above 750゚C.Surface roughness was less … More 0.72 nm R_y and any hole or micro-defect wasn't found by the AFM observation. This ultra-thin film would be applicable for the film insulator of multi-layr GMR devices, Josephson junction etc. The investigation into applications should be continued. It was found that crystallographic structure of the PbO,TiO_2, BaTiO_3 films were controlled by temperature of the substrate during laser abrasion. The PbO film changed from alpha to beta structure beyond 400゚C gradually. The BaTiO_3 film shows the perovskite structure at the temperature between 450 and 550゚C,however, Ba decomposes then the film changes rutile type structure TiO_2 at the temperature above 600゚C.It was found that the ferroelectrics thin film of BaTiO_3 and TiO_2-PbO multi-layr can be formed by ArF excimer laser abrasion.
We formed various thin film of Fe, Ni, Ti, TiNi (shape memory alloy ; SMA). Fe_<65>Ni_<35> (invar alloy : IVA). The minimum depositing rate obtained was less than 0.01 nm/min. Constituents of alloys were controlled better than 1%. We designed a new SMA film actuator which was stacked SMA and bimetal consisting two thin layrs of Fe and IVA.The actuator is possible to recover initial shape by bimetal defoming force. We are investigating the dynamic characteristics and optimum shape or size. Less

Report

(4 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • Research Products

    (35 results)

All Other

All Publications (35 results)

  • [Publications] 田中、池田 ほか: "MBE装置を用いたFe65Ni35インバー合金の組成制御の研究" 精密工学会北海道支部学術講演会論文集. 20-21 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 森野、池田 ほか: "ArFエキシマレーザアブレーション法によるAl_2O_3超薄膜の形成" 精密工学会北海道支部学術講演会論文集. 16-17 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 三ツ谷、牧野 ほか: "TiNi形状記憶合金のパタ-ニングと固相接合" 精密工学会北海道支部学術講演会論文集. 14-15 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 田中、池田 ほか: "フィルム積層型アクチュエータの研究" 精密工学会春季学術講演会論文集. (印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 池田、森野 ほか: "エキシマレーザアブレーション法で形成したセラミックス超薄膜の特性" 第70回レーザエネルギ応用機器研究会資料. (印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 木村、池田 ほか: "大出力レーザ溶接に関する研究(第1報)溶接における基礎現象の測定" 精密工学会誌. 63・4. 575-579 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 池田 正幸: "レーザー工学" オーム社, 11-28、59-69 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 池田 正幸: "生産加工の原理" 日刊工業新聞社, 233-241 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Tanaka, M.Ikeda et al.: "Study on Composition Controll of Fe_<65>Ni_<35> Invar Alloy Film with MBE" Proced.of Hokkaido Area Meeting of JSPE. 20-21 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Morino, M.Ikeda etal.: "Formation of Al_2O_3 Ultra-thin Film by ArF Excimer Laser Abrasion" Proced.of Hokkaido Area Meeting of JSPE. 16-17 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Mitsuya E.Makino etal.: "Patterning and Solid Bonding of TiNi Shape Memory Alloy" Proced.of Hokkaido Area Meeting of JSPE. 16-17G (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Tanaka, M.Ikeda et al.: "Study on Films Stacking Actuator" Proced.of Spring Meeting of JSPE. (in print). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Ikeda, T.Morino: "Characteristics of Ultra-thin Ceramics Film Deposited by ArF Excimer Laser Abrasion" Preprint of the 70^<th> Symposium on Laser Energy Application Study. (in print). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Kimura, M.Ikeda et al.: "A Study on Laser Welding (the 1^<st>) Measurement of Basic Phenomena in Welding" J.of the Jap.Soc.for Percis.Engg.63-4. 575-579 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Ikeda, et al.: Laser Engineering (Japanease). Ohmsha, 11-28,59-69 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Ikada, et al.: Theory of Production Machining (Japanese). Nikkankogyosinbunsya, 232-242 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 木村、池田ほか: "大出力レーザ溶接に関する研究(第1報)溶接における基礎現象の測定" 精密工学会誌. 63・4. 575-579 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 木村、池田ほか: "大出力レーザ溶接に関する研究(第2報)溶接特性モデル化への一手法" 精密工学会誌. 63・5. 679-683 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 大峰、池田: "高エネルギビームによる溶接特性(第1報)" 精密工学会誌. 63・11. 575-683 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 田中、池田ほか: "MBEを用いたFe_<65>Ni_<35>インバータ薄膜の組成制御実験" 精密工学会北海道支部学術講演会論文集. 20-21 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 森野、池田ほか: "ArFエキシマレーザアブレーション法によるAl_2O_3超薄膜の形成" 精密工学会北海道支部学術講演会論文集. 16-17 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 三ツ谷、牧野ほか: "TiNi形状記憶合金のパタ-ニングと固相接合" 精密工学会北海道支部学術講演会論文集. 14-15 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 日本機会学会編: "生産加工の原理" 日刊工業新聞社, 233-242 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 池田正幸: "「旧くて新しいレーザーの技術課題」" レーザ協会誌. 21巻4号. 1-2 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 柴田隆行: "銅単結晶の超精密切削における微小変形挙動の原子論的解析" 精密工学会誌. 62(12). 1767-1772 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 柴田隆行: "変形破壊挙動に基づく脆性材料の延性モード切削機構" 精密工学会誌. 62(11). 1632-1637 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Shibata,: "Ductile-Regime Turning Mechanism of Single-crystal Silicon" Precision Engineering,. 18(2/3). 129-137 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 池田正幸: "「レーザー加工の最新動向」" 日刊工業新聞11月12日.

    • Related Report
      1996 Annual Research Report
  • [Publications] 池田正幸: "回レーザ安全スクールテキスト「設計基礎論」" (財)光産業技術振興協会, 124 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 池田,正幸: "レーザビーム伝送制御システムの開発" 精密工学会誌. 61. 107-111 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 池田正幸: "板ガラスのレーザブレーキングに関する研究" 精密工学会誌. 62. 335-340 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] M.IKEDA: "Recent Progress of Laser Materials Processing" Proceeding of Int.Conf.on Precision Engg.′95. 159-162 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 池田正幸: "CO2レーザを用いたアルミニウムの表面改質" 精密工学会論文集. 537-538 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 牧野英司: "真空蒸着法によるTiNi合金薄膜の形成と形状記憶特性の評価" 精密工学会論文集. 801-802 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 池田正幸: "レーザ工学" オーム社, 174 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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