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Dynamics of Semiconductor Vapor Growth with Photocatalytic Surface Reactions

Research Project

Project/Area Number 07405017
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

FUJITA Shigeo  Kyoto Univ., Fac.Engineering, Professor, 工学研究科, 教授 (30026231)

Co-Investigator(Kenkyū-buntansha) KAWAKAMI Yoichi  Kyoto Univ., Fac.Engineering, Associate Professor, 工学研究科, 助教授 (30214604)
FUNATO Mitsuru  Kyoto Univ., Fac.Engineering, Instructor, 工学研究科, 助手 (70240827)
FUJITA Shizuo  Kyoto Univ., Fac.Engineering, Associate Professor, 工学研究科, 助教授 (20135536)
Project Period (FY) 1995 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥27,200,000 (Direct Cost: ¥27,200,000)
Fiscal Year 1997: ¥2,400,000 (Direct Cost: ¥2,400,000)
Fiscal Year 1996: ¥3,800,000 (Direct Cost: ¥3,800,000)
Fiscal Year 1995: ¥21,000,000 (Direct Cost: ¥21,000,000)
Keywordsphotocatalysis / growth processes / ZnCdSSe / impurity doping / p-type control / quantum structure / current-injection lasing / 反応素過程 / 欠陥制御 / 励起子発光寿命
Research Abstract

This research was carried out aimed at developing the photocatalytic surface reactions, which had been explored by our group, as a new technology for future device applications with the investigations on growth dynamics, growth control, impurity doping, and material control. The results are summarized as follows ;
1.With in-situ monitoring during the grwoth of ZnSe, the fundamental growth processes were found to ve decomposition of alkylzinc associated with photogenerated carries, and then this brought in decomposition of alkylselenium.
2.Important knowledges were ; (i) the most initial stage the growth was dominated by thermal decomposition and the photocatalysis followed, (ii) the layr-by-layr growth was confirmed, and (iii) the growth processes were closely related to the surface stoichiometry.
3.This technique was applied for p-type doping of ZnSe, which had been a difficult subject in vapor growth, and successfully resulted in the net acceptor concentration of the order of 10^<17>cm^<-3>. The optical and electrical characterizations revealed non-radiative defects, and they could be reduced by choosing the optimum growth conditions.
ZnCdSe/ZnSe/ZnSSe quantum well lasers grown by this technique achieved CW lasing at 77K,which was for the first time in vapor-grown devices.

Report

(4 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • Research Products

    (30 results)

All Other

All Publications (30 results)

  • [Publications] 藤田 茂夫: "Electrical and optical properties of p-type ZnSe : N grown by MOVPE" Proc.Int.Symp.Blue Laser and Light Emitting Diodes. 176-179 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 藤田 茂夫: "Effects of annealing atmosphere and temperature on acceptor activation in ZnSe : N grown by photo-assisted MOVPE" Journal of Crystal Growth. 159. 312-316 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 藤田 静雄: "MO (GS) MBE and photo-MO (GS) MBE of II-VI semiconductors" Journal of Crystal Growth. 164. 196-201 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 藤田 静雄: "Fabrication of p-type Zn (S) Se layers and pn junctin laser structures by MOVPE" Physica Status Solidi (b). 202. 707-715 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 藤田 静雄: "Growth of p-type Zn (S) Se layers by MOVPE" Journal of Crystal Growth. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 船戸 充: "A comparative study on deep levels in p-ZnSe grown by MBE,MPMBE and MOVPE" Journal of Crystal Growth. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 藤田 茂夫: "Semiconductor and Semimetals 44" Academic Press(分担執筆), 338 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 藤田 茂夫: "Properties of Wide Bandgap Semiconductors" INSPEC Publication(分担執筆), 247 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] FUJITA Shigeo, et al.: "Electrical and optical properties of p-type ZnSe : N grown by MOVPE" Proc.Int.Symp.Blue Laser and Light Emitting Diodes. 176-179 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] FUJITA Shigeo, et al.: "Effects of annealing atmosphere and temperature on acceptor activation in ZnSe : N grown by photo-assisted MOVPE" Journal of Crystal Growth. Vol.159. 312-316 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] FUJITA Shizuo, et al.: "MO (GS) MBE and photo-MO (GS) MBE of II-VI semiconductors" Journal of Crystal Growth. Vol.164. 196-201 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] FUJITA Shizuo, et al.: "Fabrication of p-type Zn (S) Se layrs and pn juction laser structures by MOVPE" Physica Status Solidi (b). Vol.202. 707-715 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] FUJITA Shizuo, et al.: "Growth of p-type Zn (S) Se layrs by MOVPE" Journak of Crystal Growth. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] FUNATO Mitsuru, et al.: "A comparative study on deep levels in p-ZnSe grown by MBE,MOMBE and MOVPE" Journal of Crystal Growth. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] FUJITA Shigeo, et al.: Semiconductor and Semimetals 44. Academic Press, 338 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] FUJITA Shigeo, et al.: Properties of Wide Bandgap Semiconductors. INSPEC Publication, 247 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 藤田静雄: "Fabrication of p-type Zn (S) Se layers and pn junction laser structures by MOVPE" Physica Status Solidi (b). 202. 707-715 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 藤田茂夫: "Stimulated Emission from ZnSe-Based Laser Diode Structure Grown by Photoassisted MOVPE with Annealing Technique" Extended Abstracts of 1997 International Conference on Solid State Devices and Materials. 214-215 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 藤田茂夫: "Fabrication of ZnSe-Based Laser Diode Structures by Photoassisted MOVPE" Journal of Crystal Growth. (印刷中).

    • Related Report
      1997 Annual Research Report
  • [Publications] 藤田静雄: "Growth of p-type Zn (S) Se layers by MOVPE" Journal of Crystal Growth. (印刷中).

    • Related Report
      1997 Annual Research Report
  • [Publications] 船戸充: "A comparative stuby on deep levels in p-ZnSe grown by MBE,MOMBE and MOVPE" Journal of Crystal Growth. (印刷中).

    • Related Report
      1997 Annual Research Report
  • [Publications] 藤田茂夫: "Semiconductor and Semimetals 44 (分担執筆)" Academic Press, 338 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 藤田茂夫: "Properties of Wide Bandgap Semiconductors (分担執筆)" INSPEC Publication, 247 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 藤田茂夫: "Effects of annealing atmosphere and temperature on acceptor activation in ZnSe : N grown by photo-assisted MOVPE" Journal of Crystal Growth. 159. 312-316 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 藤田静雄: "MO (GS) MBE and photo-MO (GS) MBE of II-VI semiconductors" Journal of Crystal Growth. 164. 196-201 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 藤田静雄: "Defect states in p-ZnSe grown by MOVPE" Mat.Res.Soc.Proceedings. (発表予定).

    • Related Report
      1996 Annual Research Report
  • [Publications] 藤田茂夫: "Semiconductor and Semimetals 44(分担執筆)" Academic Press, 338 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 藤田茂夫: "Electrical and optical properties of p-type ZnSe : N grown by MOVPE" Proc. Int. Symp. Blue Lase and Light Emitting Diodes. 176-179 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 藤田茂夫: "Effects of annealing atmosphere and temperature on acceptor activation in ZnSe : N grown by photo-assisted MOVPE" Journal of Crystal Growth. (発表予定).

    • Related Report
      1995 Annual Research Report
  • [Publications] 藤田茂夫: "MO (GS) MBE and photo-MO (GS) MBE of II-VI semiconductors" Journal of Crystal Growth. (発表予定).

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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