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Study on True Atomic Resolution Imaging Using Noncontact Atomic Force Microscopy

Research Project

Project/Area Number 07454067
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 固体物性Ⅰ(光物性・半導体・誘電体)
Research InstitutionOsaka University (1996)
Hiroshima University (1995)

Principal Investigator

SUGAWARA Yasuhiro  Osaka University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (40206404)

Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥8,000,000 (Direct Cost: ¥8,000,000)
Fiscal Year 1996: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1995: ¥7,000,000 (Direct Cost: ¥7,000,000)
KeywordsAtomic Force Microscopy / True Atomic Resolution / Attractive Region / Atomic Scale / Atomic Resolution / Ultrahigh Vacuum / Clean Surface / Semiconductor Surface / 原子力間顕微鏡 / 化合物半導体
Research Abstract

1) With an atomic force microscope (AFM) operating in the noncontact mode in an ultrahigh vacuum (UHV), the InP (110) 1x1 and GaAs (110) surfaces were observed. Rectangle lattice including the atomic-scale point defects have been clearly and reproducibly resolved. These results clearly show that the noncontact UHV AFM has true atomic-scale lateral resolution and is quite effective for atomic surface structure analysis in real space.
2) The constant vibration mode and the constant excitation mode in noncontact atomic force microscopy were compared to investigate the force interaction between tip and surface. When the tip touch the surface, the repulsive force interaction is weakened in the constant excitation mode because of the decrease of the vibration amplitude of the cantilever, while it is maintained in the constant amplitude mode. This means that the constant excitation mode is much more gentle than the constant vibration mode.
3) With an atomic force microscope (AFM) operating in the noncontact mode in an ultrahigh vacuum (UHV), the reactive Si (111) 7*7 surface was observed. The individual adatoms and the corner holes in the 7*7 reconstruction, described by the dimer-adatom-stacking fault (DAS) model and also missing adatoms, can be observed.
4) We found the discontinuity of the force gradient curve on reactive Si (111) 7*7 reconstructed surface. A strong contrast has been obtained with discontinuity, while weak contrast has been obtained without discontinuity. Thus, the image contrast is drastically increased by the presence of the discontinuity of the force gradient curve. The discontinuity of the force gradient curve can be explained by the crossover between the physical and chemical bonding interaction.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (26 results)

All Other

All Publications (26 results)

  • [Publications] H. Ueyama: "Atomocally Resolved InP (110) Surface Observed with Noncontact Ultrahigh Vacuum Atomic Force Microscope" Jpn. J. Appl. Phys.34. L1086-L1088 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Sugawara: "Defect Motion on an OnP (110) Surface Observed with Noncontact Atomic Force Microscopy" Science. 270. 1949-1648 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M. Ohta: "Contrast of Atomic-Resolution Images from a Noncontact Ultrahigh-Vacuum Atomic Force Microscope" Jpn. J. Appl. Phys.34. L1692-L1694 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Sugawara: "Atomic resolution Imaging of InP (110) surface ocserved with ultrahigh vacuum atomic force microscope in noncontact mode" J. Vac. Sci. Technol. B. 14. 953-956 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S. Morita: "Contact and noncontact mode imaging by atomic force microscopy" Thin Solid Film. 273. 138-142 (199)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T. Ohta: "Feasibility Study on a Novel Type of Computerized Tomography Based on Scanning Probe Microscope" Jpn. J. Appl. Phys.35. L1222-L1224 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Sugawara: "True atomic resolution imaging with noncontact atomic force microscopy" Appl. Sur. Sci.(in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M. Abe: "Measurement of the Evanescent Field Using Noncontact Mode Atomic Force Microscope" Opt. Rev.(in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Sugawara: "True Atomic Resolution Imaging on Semiconductor Surfaces with Noncontact Atomic Force Microscopy" Materials Research Society 1996 Fall Meeting Symposium Proceedings. (in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Ueyama et al.: "Atomically Resolved InP (110) Surface Observed with Noncontact Ultrahigh Vacuum Atomic Force Microscope" Jpn.J.Appl.Phys.34. L1086-L1088 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Sugawara et al.: "Defect Motion on an InP (110) Surface Observed with Noncontact Atomic Force Microscopy" Science. 270. 1949-1648 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Ohta et al.: "Contrast of Atomic-Resolution Images from a Noncontact Ultrahigh-Vacuum Atomic Force Microscope" Jpn.J.Appl.Phys.34. L1692-L1694 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Sugawara et al.: "Atomic resolution Imaging of InP (110) surface observed with ultrahigh vacuum atomic force microscope in noncontact mode" J.Vac.Sci.Technol.B. 14. 953-956 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Morita et al.: "Contact and nonocontact mode imaging by atomic force microscopy" Thin Solid Film. 273. 138-142 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Ohta et al.: "Feasibility Study on a Novel Type of Computerized Tomography Based on Scanning Probe Microscope" Jpn.J.Appl.Phys.35. L1222-L1224 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Sugawara et al.: "True atomic resolution imaging with noncontact atomic force microscopy" Appl.Sur.Sci.(in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Abe et.al.: "Measurement of the Evanescent Field Using Noncontact Mode Atomic Force Microscope" Opt.Rev.(in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Sugawara et al.: "True Atomic Resolution Imaging on Semiconductor Surfaces with Noncontact Atomic Force Microscopy" Materials Research Society 1996 Fall Meeting Symposium Proceedings. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Sugawara: "Atomic-Resolution Imaging of InP(110) Surface with Ultrahigh Vacuum Atomic Force Microscope in Noncontact Mode" J.Vac.& Technol.B. Vol.14. 953-956 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S. Morita: "Contact and Non-contact Mode Imaging by Atomic Force Microscopy" Thin Solid Film. Vol.273. 138-142 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y. Sugawara: "True Atomic Resolution Imaging with Noncontact Atomic Force Microscopy" Appl.Sur.Sci.(発表予定).

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Sugawara: "Atomic-Resolution Imaging of ZnSSe(110)Surface with Ultrahigh-Vacuum Atomic Force Microscope(UHV-AFM)" Jpn. J. Appl. Phys.34. L462-L464 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M. Ohta: "Atomically Resolved Image of Cleaved Surfaces of Compound Semiconductors Observed with an Ultrahigh Vacuum Atomic Force Microscope" J. Vac. & Sci. Technol. B. 13. 1265-1267 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H. Ueyama: "Atomically Resolved InP(110)Surface Observed with Noncontact Ultrahigh Vacuum Atomic Force Microscope" Jpn. J. Appl. Phys.34. L1086-L1088 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y. Sugawara: "Defect Motion on an InP(110)Surface Observed with Noncontact Atomic Force Microscopy" Science. 270. 1646-1648 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M. Ohta: "Contrast of Atomic-Resolution Images from a Noncontact Ultrahigh-Vacuum Atomic Force Microscope" Jpn. J. Appl. Phys.34. L1692-L1694 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2020-05-15  

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