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RESEARCH ON ATOMIC LAYER CONTROLLED GROWTH AND CHARACTERIZATION OF SEMICONDUCTOR QUANTUM STRUCTURES WITH DIFFERENT GROUP-V ATOMS

Research Project

Project/Area Number 07455007
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionNAGOYA UNIVERSITY

Principal Investigator

TAKEDA Yoshikazu  NAGOYA UNIVERSITY,DEPARTMENT OF MATERIALS SCIENCE AND ENGINEERING,PROFESSOR, 工学部, 教授 (20111932)

Co-Investigator(Kenkyū-buntansha) TABUCHI Masao  NAGOYA UNIVERSITY,DEPARTMENT OF MATERIALS SCIENCE AND ENGINEERING,LECTURER, 工学部, 講師 (90222124)
FUJIWARA Yasufumi  NAGOYA UNIVERSITY,DEPARTMENT OF MATERIALS SCIENCE AND ENGINEERING,ASSOCIATE PROF, 工学部, 助教授 (10181421)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥8,400,000 (Direct Cost: ¥8,400,000)
Fiscal Year 1996: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1995: ¥6,300,000 (Direct Cost: ¥6,300,000)
KeywordsSEMICONDUCTORS / ATOMIC LAYER / QUANTUM STRUCTURES / HETEROSTRUCTURE / EXAFS / X-RAY CTR / PHOTOREFLECTANCE / GROWTH CONDITIONS
Research Abstract

The turgets of this research are divided into two major objectives ; one is to grow ultrathin heterolayrs with different group-V atoms (specifically, InAs/InP and InGaAs/InP) under a variety of growth conditions, and the other is to characterize these heterolayrs and interfaces by fluorescence EXAFS and X-ray CTR scattering. The two objectives are finally combined to control the heterostructure growth to one atomic layr. In the mean time we succeeded to grow InAs quantum dots on InP (001) surface which was desired but had been unsuccessful.
Growth
(a) InGaAs/InP Heterostructures : The optimum growth conditions which give the sharpest heterointerface was revealed.
(b) ErP/InP Heterostructures : Semiconductor/semimetal heterostructures which are expected to exhibit new effects were successfully grown.
(c) InAs Quantum Dots : By droplet heteroepitaxy InAs quantum dots were successfully grown on InP (001) surface.
1 atomic layr characterization of heterointerfaces
(a) Fluorescence EXAFS : Local structures around very dilute atoms in 1 atomic layr or of 10^<18>cm^<-3> were clearly revealed.
(b) X-Ray CTR Scattering : Film thickness, composition and crystal structure were determined in the atomic scale.
Optical Characterization of Heterostructures
(a) Photoreflectance : The energy structures and electric fields in the ErP/InP heterostructures were clearly revealed by FFT Phtoreflectance.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (29 results)

All Other

All Publications (29 results)

  • [Publications] 竹田,田渕 他: "Group-V atoms exchange due to exposure of InP surface to AsH_3A (+PH_3) revealed by X-Ray CTR scattering" J. Electron. Mat.25. 671-675 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 藤原,竹田 他: "Erbium δ-doping to InP by OMVPE" Inst. Phys. Conf. Ser.145. 149-154 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 田渕,竹田 他: "Distribution of As atoms in InP/InPAs/InP and InP/InGaAs/InP hetero-structures measured by X-ray CTR scattering" Inst. Phys. Conf. Ser.145. 227-232 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 田渕,竹田 他: "実験室系のX線回析装置を使用したX線CTR測定による半導体ヘテロ構造界面評価" 電子情報通信学会技報. ED96-40. 69-74 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 藤原,竹田 他: "液滴ヘテロエピタキシ-によるInP(001)上へのInAs島形成" 電子情報通信学会技報. ED96-103. 33-38 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 藤原,竹田 他: "Observation of trap states in Er-doped InP by photoreflectance" Appl. Phys. Lett.70. 84-86 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Fujiwara, Y.Takeda et al.: "Erbium doping to P-based III-V semiconductors by OMVPE with TBP as a non-toxic P source" Materials Science Forum. Vols.196-201. 621-626 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Takeda et al.: "Local structure analysis around Er doped uniformly in InP by fluorescence EXAFS" Technical Report of IEICE. ED95-117. 7-12 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Takeda et al.: "Analysis of heterointerface at Er delta-doped InP by X-ray CTR scattering" Technical Report of IEICE. ED95-118. 13-18 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Takeda, M.Tabuchi et al.: "Group-V atoms exchange due to exposure of InP surface to AsH_3(+PH_3)revealed by X-ray CTR scattering" J.Electron.Mat.Vol.25. 671-675 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Fujiwara, Y.Takeda et al.: "Erbium delta-doping to InP by OMVPE" Inst.Phys.Conf.Ser.Vol.145. 149-154 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Tabuchi, Y.Takeda et al.: "Distribution of As atoms in InP/InPAs/InP and InP/InGaAs/InP heter-structures measured by X-ray CTR scattering" Inst.Phys.Conf.Ser.Vol.145. 227-232 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Takeda et al.: "EXAFS and X-ray CTR scattering characterization of Er doped in InP by OMVPE :" Rare Earth Doped Semiconductors II MRS. 155-160 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Tabuchi, Y.Takeda et al.: "Characterization of semiconductor heterointerfaces by X-ray CTR measurement using a laboratory X-ray diffrection system" Technical Report of IEICE. ED96-40. 69-74 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Tabuchi, Y.Takeda et al.: "Growth of InAs dots on InP(001)by droplet heteroepitaxy" Technical Report of IEICE. ED96-103. 33-38 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Takeda et al.: "Local structures around Er doped in InP by OMVPE-Analysis by fluorescence EXAFS-" Technical Report of IEICE. ED96-113. 89-96 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Fujiwara, Y.Takeda et al.: "Observation of trap states in Er-doped InP by" Appl.Phys.Lett.Vol.70. 84-86 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 竹田,田渕 他: "Group-V atoms exchange due to exposure of InP surface to AsH_3(+PH_3)revealed by X-Ray CTR scattering" J.Electron.Mat.25. 671-675 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 藤原,竹田 他: "Erbium δ-doping to InP by OMVPE" Inst.Phys.Conf.Ser.145. 149-154 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 田渕,竹田 他: "Distribution of As atoms in InP/InPAs/InP and InP/InGaAs/InP hetero-structures measured by X-ray CTR scattering" Inst.Phys.Conf.Ser.145. 227-232 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 田渕,竹田 他: "実験室系のX線回折装置を使用したX線CTR測定による半導体ヘテロ構造界面評価" 電子情報通信学会技報. ED96-40. 69-74 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 藤原,竹田 他: "液滴ヘテロエピタキシ-によるInP(001)上へのInAs島形成" 電子情報通信学会技報. ED96-103. 33-38 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 藤原,竹田 他: "Observation of trap states in Er-doped InP by photoreflectance" Appl.Phys.Lett.70. 84-86 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 竹田、田淵他: "蛍光EXAFS法によるInP中に均一ドープしたEr原子周囲の局所構造解析" 電子情報通信学会技報. ED95-117. 7-12 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 竹田、田淵他: "Erをδド-ピングしたInPのX線CTR散乱法による界面構造解析" 電子情報通信学会技報. ED95-118. 13-18 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 藤原、竹田他: "Erbium doping to P-based III-V Semiconductors by OMVPE with TBP as a ron-toxic P source" Materials Science Forum. 196-201. 621-626 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 田淵、竹田他: "Group-V atoms exchange due to exposure of InP surface to AsH_3(+PH_3)revealed by X-ray CTR scattering" J.Electron.Mat.(印刷中). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 藤原、竹田他: "Erbium δ-doping to InP by OMVPE" Institute of Physics Conference Series. (印刷中). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 田淵、竹田他: "Distribution of As atoms in InP/InPAs/InP and InP/InGaAs/InP hetero-Structures measured by X-ray CTR scattering" Institute of Physics Conference Series. (印刷中). (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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