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Quantitative analysis of gettering mechanism of Si device by using imagig plate and convergentbeam electron diffraction

Research Project

Project/Area Number 07455010
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionKYUSHU UNIVERSITY

Principal Investigator

TOMOKIYO Yoshitsugu  KYUSHU UNI., FAC.ENGINEERING,ASSOCIATE PROFESSOR, 工学部, 助教授 (40037891)

Co-Investigator(Kenkyū-buntansha) MATSUMURA Shyo  KYUSHU UNIV., FAC.ENGINEERING,ASSOCIATE PROFESSOR, 工学部, 助教授 (60150520)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥5,700,000 (Direct Cost: ¥5,700,000)
Fiscal Year 1996: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1995: ¥5,200,000 (Direct Cost: ¥5,200,000)
KeywordsImpurity gettering / Si wafer / Lattice strain / Oxygen precipitate / Convergent-beam electron diffraction / Higher order Laue zone pattern / シリコンウェハ- / ポリシリコン
Research Abstract

Inmurity gettering is one of the important processes in Si device process. The extrinsic or intrinsic gettering technique has been used in the commercial process. The intrinsic gettering uses oxygen precipitates formed in Si wafers by heat-treatments. Lattice strains or lattice defects are considered to be gettering sinks for impurity elements. The quantitative analysis of the gettering sinks is very important to understand the gettering mechnaism and to improve gettering efficiency. In Particular it is of interest to analyze local lattice strains near the gettering sinks. Electron diffraction enables us to measure local lattice strains in high spatial resolution compared with X-ray diffraction or Ramann spectroscopy.
Electron microscope images and convergent-beam electron diffraction (CBED) patterns are observed in Si wafer which is heattreated at 1000 ゚C in oxygen atmosphere to produce oxygen precipitates. An oxygen precipitate is thin plate of several nm in thickness and several hundred nm in edge length. The plate is paralle to (100) plane of Si matrix, and the edge is parallel to (110). From the CBED patterns ovserved along [012] direction parallel to the plate of the precipitate, local lattice strains of Si matrix are measured as a function of the distance from a surface of the precipitate. Si lattices are distorted about 4% near the plate plane of the precipitate by the compressive stress, while they are distorted about 3% near the edge of the precipitate by the tensile stress. The lattice strains decrease with increase of a distance from the interface and disappear at about 1 mum.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (25 results)

All Other

All Publications (25 results)

  • [Publications] 友清芳二,進藤大輔: "エネルギーフィルタリング電子回折〜非弾性散乱バックグラウンドの除去〜" 電子顕微鏡. 31. 153-156 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Matsumura et al.: "Time-Evolution of <1/21/21/2>^* Special Point in fcc-Based Binary Alloys" Materials Trans.JIM. 37. 1748-1757 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Matsumura et al.: "Formation of precipitates in an ordering alloy and their dissolution under irradiation" J.Nucl.Materials. 239. 42-49 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Matsumura et al.: "Kinetics of irradiation-induced phase transformations in tricritical systems" Phys.Rev.B. 54. 6184-6193 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Tomokiyo et al.: "Structural Refinement of α-Al_2O_3 by Energy Filtering Convergent Beam Electron Diffraction" Proc.Sixth Asia-Pacific Conference on Electron Microscopy. 115-116 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Okuyama et al.: "Microstructures of Poly-Si Formed on Si Wafet by CVD Technique Followed by Heat Treatment" Proc.Sixth Asia-Pacific Conference on Electron Microscopy. 185-186 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Tomokiyo, D.Shido: "Energy filtering convergent-beam electron diffraction" Denshi Kenbikyou. 31,2/3. 153-156 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Matsumura, T.Hino, S.Hata and K.Oki: "Time-Evolution of <1/2 1/2 1/2> Special point Ordering in fcc-Based Binary Alloys." Materials Trans JIM. 37,12. 1748-1757 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Tomokiyo, S.Kimura, J.Zuo and J.Spence: "Structural Refinement of alpha-A1203 by energy Filtering Convergent Beam electron Diffraction, Proc.Sixth Asia-Pacific Conference on" Proc.Sixth Asia-Pacific Conference on Electron Microscopy, Hong Kong. 115-116 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Tomokiyo, N.Yasutake and T.Fujimoto: "Emission of Characteristic X-ray Near the Critical Voltage of Ti and Cr" Electron Microscopy, Proc.Sixth Asia-Pacific Conference on Electron Microscopy, Hong Kong. 117-118 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Okuyama, M.Nakayama and Y.Tomokiyo: "Microstructures of Poly-Si Formed on Si Wafer by CVD Technique Followed by Heat Treatment" Proc.Sixth Asia-Pacific Conference on Electron Microscopy, Hong Kong. 185-186 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Ishimaru, S.Matsumura, N.Kuwano and K.Oki: "Microstructure of CuAu-I type ordered phase in III-V semi-conductor alloys grown on a (001) substrate" Phys.Rev.B. Vol.54. 10814-10819 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Matsumura, Y.Tanaka, S.Muller and C.Abromit: "Formation of precipitates in an ordering alloy and their dissolution under irradiation" J.Nucl.Mater.Vol.239 1-3. 42-49 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Tomokiyo, T.Kuroiwa and Y.Hayashi: "Determination of Structure Factors of alpha-A1203 by means of Large Angle Convergent Beam Electron Diffraction" Materials Trans.JIM. 36,11. 1344-1348 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] X.G.Zheng and Y.Tomokiyo: "Introduction of Dislocations into High-Tc Superconductors" Defect and Diffusion Forum. Vol.121-122. 7-14 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Z.Horita, S.Matsumura and T.Baba: "General formulation for ALCHEMI" ultramicroscopy. Vol.58. 327-335 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Ishimaru, S.Matsumura, N.Kuwano and K.Oki: "Monte Carlo simulation of CuPt-type ordering in off-stoichiometric III-V semiconductor alloys" J.Appl.Phys.Vol.77. 2370-2374 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Tanaka, T.Fujimoto, Y.Tomokiyo, and Y.Suyama: "TEM Zone-axis critical voltage in YBa2Cu307-y and local microanalysis of oxygen concentration, Advances in Superconductivity" Advaneces in Superconductivity VI '95. 531-534 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 友清芳二,新藤大輔: "エネルギーフィルタリング電子回折〜非弾性散乱バックグラウンドの除去〜" 電子顕微鏡. 31,2/3. 153-156 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Matsumura et al.: "Time-Evolution of <1/21/21/2>^* Special Point Ordering in fcc-Based Binary Alloys" Materials Trans.JIM. 37,12. 1748-1757 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Matsumura et al.: "Formation of precipitates in an ordering alloy and their dissolution under irradiation" J.Nucl.Materials. 239,1/3. 42-49 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Matsumura et al.: "Kinetics of irradiation-induced phase transformations in tricritical systems" Phys.Rev.B. 54・9. 6184-6193 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Tomokiyo et al.: "Structural Refinement of α-Al_2O_3 by Energy Filtering convergent Beam Electron Diffraction" Proc.Sixth Asia-Pacific Conference on Electron Microscopy. 115-116 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Okuyama et al.: "Microstructures of Poly-Si Formed on Si Water by CVD Technique Followed by Heat Treatment" Proc.Sixth Asia-Pacific Conference on Electron Microscopy. 185-186 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Yoshitsugu TOMOKIYO: "Determination of structure Factors of Al_2O_3 by means of Large Angle Convergent Beam Electron Diffraction" Materials Transactions, JIM. 36. 1344-1348 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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