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Control of surface states for III-V semiconductor quantum structures and its application to novel optical devices

Research Project

Project/Area Number 07455017
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionHOKKAIDO UNIVERSITY

Principal Investigator

HASEGAWA Hideki  Hokkaido Univ., Fac.of Eng., Pro., 工学部, 教授 (60001781)

Co-Investigator(Kenkyū-buntansha) AKAZAWA Masamichi  Hokkaido Univ., Fac.of Eng., Ass.Pro., 工学部, 助教授 (30212400)
MOTOHISA Junichi  Hokkaido Univ., Res.Cut.Interface Quantum Electron., Ass.Pro., 量子界面エレクトロニクス研究センター, 助教授 (60212263)
HASHIZUME Tamotsu  Hokkaido Univ., Fac.of Eng., Ass.Pro., 工学部, 助教授 (80149898)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥7,400,000 (Direct Cost: ¥7,400,000)
Fiscal Year 1996: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 1995: ¥5,600,000 (Direct Cost: ¥5,600,000)
Keywordsquantum well / quantum wire / compound semiconductors / interface control / surface and interface states / surface passivation / silicon interface control layr / photoluminescence
Research Abstract

The purpose of this study is to investigate the interaction mechanism between surface states and confined levels in III-V compound semiconductor quantum structures and to control the surface properties by use of ultrathin silicon interface control layr (SiICL) for fabrication of novel optical devices. The main results obtained are listed below :
(1) It was found that the photoluminescence (PL) intensity from the near-surface quantum well (OW) with the surface-to-well distance of 5nm, was reduced by a factor of 1000 as compared with that from the reference QW located deeply inside. We revealed that this phenomenon is caused by strong interaction between the quantized states in near-surface QW and surface states. Acomplete recovery of PL intensity was achieved by use of Si-ICL based passivation technique.
(2) X-ray photoelectron spectroscopy analysis revealed that there were no oxidized and nitrided phase of semiconductor surface at the passivation film/semiconductor interfaces.
(3) By applying the Si-ICL passivation method, a nearly complete recovery of PL intensity was achieved with an observed maximum recovery factor of 400 for the InGaAs quantum wires. The quantum wires passivated with SiICL showed strong PL intensity even at room temperature.
(4) The Si-ICL passivation technique was successfully applied to passivation of side walls of InGaAs quantum wires fabricated by wet etching process.
(5) Detailed computer simulation pointed out that a clear passivation effects can be explained by substantial reduction of surface states by Si-ICL based passivation technique

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (136 results)

All Other

All Publications (136 results)

  • [Publications] T.Saitoh: ""Determination of Built-in Electric Field Strength in InP/n^+- InP Structures Using Photoellipsometry"" Japanese Journal of Applied Physics. 35. 1696-1700 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] B.W.Yang: ""Properties of InAs_XP_<1-x>Layer Formed by P-As Exchange Reaction on (001) InP Surface Exposed to As_4 Beam"" Journal of Electronic Materials. 25. 379-384 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Fujikura: ""Fabrication of InP-Based InGaAs Ridge Quantum Wires Utilizing Selective Moleculat Beam Epitaxial Growth on (311) A Facets"" Journal of Electronic Materials. 25. 619-625 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Suzuki: ""A Novel Insulated Gate Technology for InGaAs High Electron Mobility Transistors Using Silicon Interlayer Based Passivation Technique"" Journal of Electronic Materials. 25. 649-656 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] B.X.Yang: ""Scanning Tunneling Microscope Study of (001) InP Surface Prepared by Gas Source Molecular Beam Epitaxy"" Japanese Journal of Applied Physics. 35. 1267-1272 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Fujikura: ""Photoluminescence and Cathodoluminescence Investigation of Optical Properties of InP-Based InGaAs Ridge Quantum Wires Formed by Selective Molecular Beam Epitaxy"" Japanese Journal of Applied Physics. 35. 1333-1339 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Kasai: ""Fabrication and Characterization of Novel Lateral Surface Superlattice Structure Utilizing Schottky Barrier Height Control by Doped Silicon Interface Control Layers"" Japanese Journal of Applied Physics.35. 1340-1347 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Kasai: ""Electron Beam Induced Current Characterization of Novel GaAs Quantum Nanostructures Based on Potential Modulation of Two-Dimensional Electron Gas by Schottky In-Plane Gates"" Japanese Journal of Applied Physics. 35. 6652-6658 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Uno: ""0.86eV Platinum Schottky Barrier on Indium Phosphide by In Situ Electrochemical Process and Its Application to MESFETs"" Japanese Journal of Applied Physics. 35. 1258-1263 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Koyanagi: ""Contactless and Nondestructive Characterization of Silicon Surfaces by Capacitance-Voltage and Photoluminescence Methods"" Japanese Journal of Applied Physics. 35. 946-953 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Jinushi: ""Novel GaAs-Based Single Electron Transistors with Schottky In-Plane Gates Operating up to 20K"" Japanese Journal of Applied Physics. 35. 1132-1139 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Fujikura: ""Surface Passivation of In_<0.53> Ga _<0.47> As Ridge Quantum Wires Using Silicon Interface Control Layers"" Journal of Vacuum Science and Technology. B-14. 2888-2894 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Hashizume: ""Contactless Capacitance-Voltage and Photoluminescence Characterization of Ultrathin Oxide-Silicon Interfaces Formed on Hydrogen Terminated (111) Surfaces"" J. Vac. Sci. Technol.B-14. 2872-2881 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Hashizume: ""Quantum Transport in A Schottky In-Plane-Gate Controlled,GaAs/AlGaAs Quantum Well Wires"" Phisica B. 227. 42-45 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Tomozawa: ""Design and Fabrication of GaAs/AlGaAs Single Electron Transistors Based on In-Plane Schottky Gate Control of 2DEG"" Phisica B. 227. 112-15 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Shiobara: ""Deep Level and Conduction Mechanism in Low-Temperature GaAs Grown by Molecular Beam Epitaxy"" Japanese Journal of Applied Physics. 35. 1159-1164 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 長谷川英機: "化合物半導体量子細線および量子ドットの製作" 光学. 25(8). 448-455 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 長谷川英機: "化合物半導体量子構造表面のSi超薄膜界面制御層によるパッシベーション" 表面科学. 17(9). 567-574 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Ikeya: "Successful Surface Passivation of Air-Exposed AlGaAs by a Silicon Interface Control Layer-Based Technique" Jpn. J. Appl. Phys.36(3)(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Dohmae: "Capacitance-Voltage Behavior of Insulated Gate InGaAs HEMT Capacitor Having Silicon Interface Control Layer," Jpn. J. Appl. Phys.36(3)(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Yoshida: "Characterization of Interface Electronic Properties of Low-Temperature Ultrathin Oxides and Oxynitrides Formed on Si (111) Surfaces by Contactless Capacitance-Voltage and Photoluminescence Methods," Jpn. J. Appl. Phys.36(3)(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Hasegawa: "Evolution Mechanism of Nearly-Pinning Platinum/N-Type Indium Phosphide Interface with a High Schottky Barrier Height by In-Situ Electrochemical Process" J. Vac. Sci. Technol.B15(4)(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Okada: "Basic Control Characteristics of Novel Schottky In-Plane and Wrap Gate Structures Studied by Simulation and Transport Measurements in GaAs and InGaAs Quantum Wires," Jpn. J. Appl. Phys.36(6)(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kudoh: "Controlled Formation of Metal-semiconductor Interface to 2DEG Later by In-Situ Electrochemical Process and Its Application to In-Plane Electron Waveguide Devices" Appl. Sur. Sci.(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 長谷川英機: "InP系化合物半導体材料およびデバイスの新展開" 応用物理. 65(2). 108-118 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Araki: ""Formation of InGaAs/InAlAs Quantum Wires and Dots with Extremely Smooth Facets on Mesa-Patterned (001) InP Substrates by Selective Molecular Beam Enitaxv"" Jpn. J. Appl. Phys.36(3)(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Fujikura: ""Excitation Power Dependent Photoluminescence Behavior in Etched Quantum Wires Having Silicon Interlayer-Based Edge Passivation and Its Interpretation"" Jpn. J. Appl. Phys.36(3)(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Kasai: ""Fabrication and Characterization of GaAs Single Electron Devices Having Single and Multiple Dots Based on Schottky In-Plane-Gate and Wrap-Gate Control of Two-Dimensional Electron Gas"" Jpn. J. Appl. Phys.36(3)(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Okada: "Observation of Coulomb Blockade Type Conductance Oscvillations up to 50 K in Gated InGaAs Ridge Quantum Wires Grown by Molecular Beam Epitaxy On InP Substrates" Jpn. J. Appl. Phys.36(3)(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Sato: "Large Schottky Barrier Heights on Indium Phosphide-Based Materials Realized by In-Situ Electrochemical Process." Jpn. J. Appl. Phys.36(3)(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Iizuka: "Small-Signal Response of Interface States at Passivated InGaAs Surfaces from Low Frequencies up to Microwave Frequencies" Solid-State Electron. (印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Ishikawa: "Missing-dimer structures and their kink defects on molecular beam epitaxially grown (2x4) reconstrucled (001) InP and GaAs surfaces studied by ultrahigh-vacuum scanning tunneling microscopy" Jpn. J. Appl. Phys.36(3)(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Hasegawa: "Interface-controled Schottky barriers on InP and related materials" Solid-State Electronics. (印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Suzuki: "Fabrication and electrical characterization of InP-based insulated gate power HEMTs using ultrathin Si intefcae control laver" Sold-State Electronics. (印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Kihara: ""Effect of Mis-Orientaition of Mesa-Stripes on the Growth of InGaAs Quantum Wires by Selective Molecular Beam Epitaxy"" Appl. Sur. Sci. (印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Hasegawa: "Excitation power dependent Photoluminescence characterigation of insulator-semiconductor interfaces on near surfaces quantum wells" Appl. Sur. Sci. (印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Saitoh, K.Nakamura, H.Hasegawa and Y.-M.Xiong: "Determination of Built-in Electric Field Strenght in lnP/n^+-InP Structures Using Photoellipsometry" Japanese Journal of Applied Physics. 35. 1696-1700 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] B.X.Yang, L.He and H.Hasegawa: "Properties of InAs_xP_<1-x>Layr Formed by P-As Exchange Reaction on (001) InP Surface Exposed to As_4Beam" Journal of Electronic Materials. 25. 379-384 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Fujikura and H.Hasegawa: "Fabrication of InP-Based InGaAs Ridge Quantum Wires Utilizing Selective Molecular Beam Epitaxial Growth on (311) A Facets" Journal of Electronic Materials. 25. 619-625 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Suzuki, S.Kodama, H.Tomozawa and H.Hasegawa: "A Novel Insulated Gate Technology for InGaAs High Electron Mobility Transistors Using Silicon Interlayr Based Passivation Technique" Journal of Electronic Materials. 25. 649-656 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] B.X.Yang, Y.Ishikawa, T.Ozeki and H.Hasegawa: "Scanning Tunneling Microscope Study of (001) InP Surface Prepared by Gas Source Molecular Beam Epitaxy" Jpn.J.of Applied Physics. 35. 1267-1272 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Fujikura and H.Hasegawa: "Photoluminescence and Cathodoluminescence Investigation of Optical Properties of InP-Based InGaAs Ridge Quantum Wires Formed by Selective Molecular Beam Epitaxy" Japanese Journal of Applied Physics. 35. 1333-1339 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Kasai and H.Hasegawa: "Fabrication and Characterization of Novel Lateral Surface Superlattice Structure Utilizing Schottky Barrier Height Control by Doped Silicon Interface Control Layrs" Japanese Journal of Applied Physics. 35. 1340-1347 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Kasai, T.Hashizume and H.Hasegawa: "Electron Beam Induced Current Characterization of Novel GaAs Quantum Nanostructures Based on Potential Modulation of Two-Dimensional Electron Gas by Schottky In-Plane Gates" Japanese Journal of Applied Physics. 35. 6652-6658 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Uno, T.Hashizume, S.Kasai, N.Wu and H.Hasegawa: "0.86eV platinum Schottky Barrier on Indium Phosphide by In Situ Electrochemical Process and Its Application to MESFETs" Japanese Journal of Applied Physics. 35. 1258-1263 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Koyanagi, T.Hashizume and H.Hasegawa: "Contactless and Nondestructive Characterization of Silicon Surfaces by Capacitance-Voltage and Photoluminescence Methods" Japanese Journal of Applied Physics. 35. 946-953 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Jinushi, H.Okada, T.Hashizume and H.Hasegawa: "Novel GaAs-Based Single Electron Transistors with Schottky In-Plane Gates Operating up to 20K" Japanese Journal of Applied Physics. 35. 1132-1139 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Fujikura, S.Kodama, T.Hashizume and H.Hasegawa: "Surface Passivation of In_<0.53>Ga_<0.47>As Ridge Quantum Wires Using Silicon Interface Control Layrs" J.Vacuum Science and Technology. B-14. 2888-2894 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Hashizume, H.Okada and H.Hasegawa: "Quantum Transport in A Schottky In-Plane-Gate Controlled GaAs/AlGaAs Quantum Well Wires" Phisica B. vol.227. 42-45 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Hashizume, S.Koyanagi and H.Hasegawa: "Contactless capacitance-voltage and photoluminescence characterization of ultrathin oxide-silicon interfaces" J.Vac.Sci.Technol. B14. 2872-2881 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Tomozawa, K.Jinushi, H.Okada, T.Hashizume and H.Hasegawa: "Design and Fabrication of GaAs/AlGaAs Single Electron Transistors Based on In-Plane Schottky Gate Control of 2DEG" Phisica B. 227. 112-115 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Shiobara, T.Hashizume and H.Hasegawa: "Deep Level and Conduction Mechanism in Low-Temperature GaAs Grown by Molecular Beam Epitaxy" Japan.J.Applied Physics. 35. 1159-1164 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Hasegawa et al.: ""Fabrication of compound semiconductor quantum wires and dots" (in Japanese)" KOUGAKU. 25. 448-455 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Hasegawa S.Kodama and T.Hashizume: ""Surface passivation of compound semiconductor quantum structures by silicon interface control layr" (in Japanese)" HYOUMENKAGAKU. 17. 567-574 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Ikeya, T.Hashizume and H.Hasegawa: "Successful Surface Passivation of Air-Exposed AlGaAs by a Silicon Interface Control Layr-Based Technique" Jpn.J.Appl.Phys.vol.35(accepted for publication) part 1, No.3B. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Dohmae, S.Suzuki, T.Hashizume and H.Hasegawa: "Capacitance-Voltage Behavior of Insulated Gate InGaAs HEMT Capacitor Having Silicon Interface Control Layr" Jpn.J.Appl.Phys.vol.35(accepted for publication) part 1, No.3B. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Yoshida, T.Hashizume and H.Hasegawa: "Characterization of Interface electronic properties of low-temperature ultrathin oxides" Jpn.J.Appl.Phys.vol.35(accepted for publication) part 1, No.3B. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Hasegawa, T.Sato and T.Hashizume: "Evolution Mechanism of Nearly-Pinning Platinum/N-Type Indium Phosphide Interface with a High Schottky Barrier Height by In-Situ Electrochemical Process" Vac.Sci.Technol.B. vol.15(accepted for publication). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Okada, S.Kasai, H.Fujikura, T.Hashizume and H.Hasegawa: "Basic Control Characteristics of Novel Schottky In-Plane and Wrap Gate Structures Studied by Simulation and Transport Measurements in GaAs and InGaAs Quantum Wires" Jpn.J.Appl.Phys.vol.35(accepted for publication) part 1, No.6B. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kudoh, H.Okada, T.Hashizume and H.Hasegawa: "Controlled Formation of Metal-semiconductor Interface to 2DEG Layr by In-Situ Electrochemical Process and Its Application to In-Plane Electron Waveguide Devices" Appl.Sur.Sci..(accepted for publication). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Hasegawa and O.Wada: ""InP-related materials and devices" (in Japanese)" OYO BUTSURI. 65. 108-118 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Araki, Y.Hanada, H.Fujikura and H.Hasegawa: "Formation on InGaAs/InAlAs Quantum Wires and Dots with Extremely Smooth Facets on Mesa-Patterned (001) InP Substrates by Selective Molecular Beam Epitaxy" Jpn.J.Appl.Phys.vol.35(accepted for publication) part 1, No.3B. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Fujikura, M.Kubo and H.Hasegawa: "Excitation Power Dependent Photoluminescence Behavior in Etched Quantum Wires Having Silicon Interlayr-Based Edge Passivation and Its Interpretation" Jpn.J.Appl.Phys.vol.35(accepted for publication) part 1, No.3B. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Kasai, K.Jinushi, H.Tomozawa and H.Hasegawa: "Fabrication and Characterization of GaAs Single Electron Devices Having Singl and Multiple Dots Based on Schottky In-Plane-Gate and Wrap-Gate Control of Two-Dimensional Electron Gas" Jpn.J.Appl.Phys.vol.35(accepted for publication) part 1, No.3B. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Okada, H.Fujikura, T.Hashizume and H.Hasegawa: "Observation of Coulomb Blockade Type Conductance Oscvillations up to 50K in Gated InGaAs Ridge Quantum Wires Grown by Molecular Beam Epitaxy on InP Substrates" Jpn.J.Appl.Phys.vol.35(accepted for publication) part 1, No.3B. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Sato, S.Uno, T.Hashizume and H.Hasegawa: "Large Schottky Barrier Heights on Indium Phosphide-Based Materials Realized by In-Situ Electrochemical Process" Jpn.J.Appl.Phys.vol.35(accepted for publicatioin) part 1, No.3B. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Iizuka, T.Hashizume and H.Hasegawa: "Small-Signal Response of Interface States at Passivated InGaAs Surfaces from Low Frequencies up to Microwave Frequencies" Solid-State Electron. (accepted for publication). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Ishikawa, T.Fukui and H.Hasegawa: "Kink defects and fermi level pinning on (2*4) reconstructed molecular beam epitaxially grown surfaces of GaAs and InP studied by ultrahigh-vacuum scanning tunneling microscopy and X-ray photoelectron spectroscopy" Vac.Sci.Technol.B. vol.15(accepted for publication). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Hasegawa: "Interface-controled Schottky barriers on InP and related materials" Solid-State Electron.(accepted for publication). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Suzuki, Y.Dohmae and H.Hasegawa: "Fabrication and electrical characterization of InP-based insulated gate power HEMTs using ultrathin Si intefcae control layr" Solid-State Electron.(accepted for publication). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Kihara, H.Fujikura and H.Hasegawa: "Effect of Mis-Orientaition of Mesa-Stripes on the Growth of InGaAs Quantum Wires by Selective Molecular Beam Epitaxy" Appl.Sur.Sci.(accepted for publication). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Hasegawa, S.Kodama, K.Ikeya and H.Fujikura: "Excitation Power Dependent Photoluminescence Characterization of Insulator-Semiconductor Interfaces on Near Surface Quantum structures Passivated by Silicon Interface Control Layr Technology" Appl.Sur.Sci.(accepted for publication). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T. Saitoh: ""Detemination of Built-in Electric Field Strength in InP/n^+- InP Structures Using Photoellipsometry"" Japanese Journal of Applied Physics. 35. 1696-1700 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] B. W. Yang: ""Properties of InAs_xP_<1-x>Layer Formed by P-As Exchange Reaction on (001) InP Surface Exposed to AS_4 Beam"" Journal of Electronic Materials. 25. 379-384 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H. Fujikura: ""Fabrication of InP-Based InGaAs Ride Quantum Wires Utilizing Selective Moleculat Beam Epitaxial Growth on (311) A Facets"" Journal of Electronic Materials. 25. 619-625 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S. Suzuki: ""A Novel Insulated Gate Technology for InGaAs High Electron Mobility Transistors Using Silicon Interlayer Based Passivation Technique"" Journal of Electronic Materials. 25. 649-656 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] B. X. Yang: ""Scanning Tunneling Microsocope Study of (001) InP Surface Prepared by Gas Source Molecular Beam Epitaxy"" Japanese Journal of Applied Physics. 35. 1267-1272 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H. Fujikura: ""Photoluminescence and Cathodoluminescence Investigation of Optical Properties of InP-Based InGaAs Ridge Quantum Wires Formed by Selective Molecular Beam Epitaxy"" Japanese Journal of Applied physics. 35. 1333-1339 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S. Kasai: ""Fabrication and Characterization of Novel Lateral Surface Superlattice Structure Utilizing Schottky Barrier Height Control by Doped Silicon Interface Control Layers"" Japanese Journal of Applied Physics,. 35. 1340-1347 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S. Kasai: ""Electron Beam Induced Current Characterization of Novel GaAs Quantum Nanostructures Based on Potential Modulation of Two-Dimensional Electron Gas by Schottky In-Plane Gates"" Japanese Journal of Applied Physics. 35. 6652-6658 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S. Uno: ""0.86eV Platinm Schottky Barrier on Indium Phosphide by In Situ Electrochemical Process and Its Application to MESFETs"" Japancse Journal of Applied Physics. 35. 1258-1263 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S. Koyanagi: ""Contactless and Nondestructive Characterization of Silicon Surcaces by Capacitance-Voltage and Photoluminesence Methods"" Japanese Journal of Applied Physics. 35. 946-953 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Jinushi: ""Novel GaAs-Based Single Electron Transistors with Schottky In-Plane Gates Operating up to 20K"" Japanese Journal of Applied Physics. 35. 1132-1139 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H. Fujikura: ""Surface Passivation of In_<0.53> Ga_<0.47> As Ridge Quantum Wires Using Silicon Interface Control Layers"" Jounal of Vacuum Science and Technology. B-14. 2888-2894 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T. Hashizume: ""Contactless Capacitance-Voltage and Photoluminescence Characterization of Ultrnthin Oxide-Silicon Interfaces Formed on Hydrogen Terminated (111) Surfaces"" J. Vac. Sci. Technol.B-14. 2872-2881 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T. Hashizume: ""Quantum Transport in A Schottky In-Plane-Gate Controlled GaAs/AlGaAs Quantum Well Wires"" Phisica B. 227. 42-45 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H. Tomozawa: ""Design and Fabrication of GaAs/AlGaAs Single Electron Transistors Based on In-Plane Schottky Gate Control of 2DEG"" Phisica B. 227. 112-115 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S. Shiobara: ""Deep Level and Conduction Mechanism in Low-Temperature GaAs Grown by Molecular Beam Epitaxy"" Japanese Journal of Applied Physics. 35. 1159-1164 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 長谷川英機: "「化合物半導体量子細線および量子ドットの製作」" 『光学』. 25 (8). 448-455 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 長谷川英機: "「化合物半導体量子構造表面のSi超薄膜界面制御層によるパッシベーション」" 『表面科学』. 17 (9). 567-574 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 長谷川英機: "「InP系化合物半導体材料およびデバイスの新展開」" 『応用物理』. 65 (2). 108-118 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M. Araki: "Formation of InGaAs/InAlAs Quatum Wires and Dots with Extremely Smooth Facets on Mesa-Patterned (001) InP Substrates by Selective Molecular Beam Enitaxy"" Jpn. J. Appl. Phys. 36 (3) (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] H. Fujikura: ""Exciation Power Dependent Photoluminescence Behavior in Etched Quantum Wires Having Silicon Interlayer-Based Edge Passivation and Its Interpretation"" Jpn. J. Appl. Phys.36 (3) (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] S. Kasai: ""Fabrication and Charaterization of GaAs Single Electron Devices Having Single and Multiple Dots Based on Schottky In-Plane-Gate and Wrap-Gate Control of Two-Dimensional Electron Gas" Jpn. J. Appl. Phys.36 (3) (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] H. Okada: "Observation of Coulomb Blockade Type Conductance Oscvillations up to 50 K in Gated InGaAs Ridge Quantum Wires Grown by Molecular Beam Epitaxy on InP Substrates," Jpn. J. Appl. Phys.36 (3) (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] T. Sato: "Large Schottky Barrier Heights on Indium Phosphide-Based Materials Realized by In-Situ Electrochemical Process." Jpn. J. Appl. Phys.36 (3) (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Ikeya: "Successful Surface Passivation of Air-Exposed AlGaAs by a Silicon Interface Control Layer-Based Technique," Jpn. J. Appl. Phys.36 (3) (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y. Dohmae: "Capacitance-Voltage Behavior of Insulated Gate InGaAs HEMT Capacitor Having Silicon Inteface Control Layer," Jpn. J. Appl. Phys.36 (3) (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] T. Yoshida: "Charaterization of Interface Electronic Properties of Low-Temperature Ultrathin Oxides and Oxynitrides Formed on Si(111) Sufaces by Contactless Capacitance-Voltage and Photoluminescence Methods," Jpn. J. Appl. Phys.36 (3) (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] H. Hasegawa: "Evolution Mechanism of Nearly-Pinning Platinum/N-Type Indium Phosphide Interface with a High Schottky Barrier Height by In-Situ Electrochemical Process," J. Vac. Sci. Technol.B15 (4) (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] H. Okada: "Basic Control Characteristics of Novel Schottky In-Plane and Wrap Gate Structures Studied by Simulation and Transport Measurements in GaAs and InGaAs Quantum Wires," Jpn. J. Appl. Phys.36 (3) (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] T. Kudoh: "Controlled Formation of Metal-semicondctor Interface to 2DEG Layer by In-Situ Electrochemical Process and Its Application to In-Plane Electron Waveguide Devices" Appl. Sun. Sci.(印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Iizuka: "Small-Signal Response of Interface States at Passivated InGaAs Surfaces from Low Frequencies up to Microwave Frequencies," Solid-State Electron.(印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y. Ishikawa: "Missing-dimer structures and their kink defects on molecular beam epitaxially grown (2×4) reconstructed (001) InP and GaAs surfaces studied by ultrahigh-vacum scanning tunneling microsccopy" Jpn. J. Appl. Phys.36 (3) (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] H. Haseguwa: "Interface-controled Schottky barriers on InP and related materials" Solid-State Electronics. (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] S. Suzuki: "Fabrication and electrical characterization of InP-based insulated gate power HEMTs using ultrathin Si intefcae control layer" Solid-State Electronics. (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] M. Kihara: ""Effect of Mis-Orientaition of Mesa-Stripes on the Growth of InGaAs Quantum Wires by Selective Moteclar Beam Epitaxy"" Appl. Sur. Sci.(印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] J.Motohisa: "Fabrication of GaAs/AlGaAs Quantum Dots by Metalorganic Vapor Phase Epitaxy on Patterned GaAs Substrates.," Jpn.J.Appl.Phys.34. 1098-1101 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Kodama: "Novel Surface Passivation Scheme for Compound Semiconductor Using Silicon Interface Control Layer and Its Application to Near-Surface Quantum Wells." Jpn.J.Appl.Phys.,. 34. 1143-1148 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Hashizume: "Depletion Characteristics of Direct Schottky Contacts to Quantum Wells Formed by In Situ Selective Electrochemical Process.," Jpn.J.Appl.Phys.34. 1149-1152 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Okada: "Novel Wire Transistor Structure with In-Plane-Gate Using Direct Schottky Contacts to 2DEG.," Jpn.J.Appl.Phys.34. 1315-1319 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Hasegawa: "More than 10^3 Times Photoluminescence Intensity Recovery by Silicon Interface-Control-Layer-Based Surface Passivation of Near-Surface Quantum Wells." Jpn.J.Appl.Phys.34. L495-L498 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Hashizume: "Observation of Conductance Quantization in A Novel Schottky In-Plane Gate Wire Transistor Fabricated by Low-Damage In Situ Electrochemical Process." Jpn.J.Appl.Phys.34. L635-L38 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Saitoh: "In-Situ Photoluminescence and Capacitance-Voltage Characterization of InAlAs/InGaAs Regrown Heterointerfaces by Molecular Beam Epitaxy.," J.Cryst.Growth,. 150. 96-100 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Fujikura: "Fabrication of InGaAs Ridge Quantum Wires by Selective Molecular Beam Epitaxy and their Characterization.," J.Cryst.Growth. 150. 327-331 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Ozeki,: "A New Method of Flux Calibration for Gas Source Molecular Beam Epitaxy of InP and Its Application to Migration Enhanced Epitaxy.," J.Cryst.Growth,. 150. 602-606 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Suzuki: "A Novel Passivation Technology of InGaAs Surfaces Using Si Interface Control Layer and Its Application to Field Effect Transistor.," Solid State Electron.38. 1679-1683 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Shiobara: "Surface Electrical Breakdown Characteristics of Molecular Beam Epitaxial Layers Grown at Low Temperatures.," Solid State Electron.38. 1685-1690 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Hasegawa: "Passivation and Control of Semiconductor Interfaces by Interface Control Layers.," Matericals Science Forum. 185-188. 23-36 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Kumakura: "Novel Formation Method of Quantum Dot Structures by Self-Limited Selective Area Metalorganic Vapor Phase Epitaxy.," Jpn.J.Appl.Phys.34. 4387-4389 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Hara: "Quantum Well Wire Fabrication Method Using Self-Organized Multiatomic Steps on Vicinal (001) GaAs Surfaces by Metalorganic Vapor Phase Epitaxy." Jpn.J.Appl.Phys.34. 4401-4404 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Kodama: "Photoluminescence and X-ray Photoelectron Study of AlGaAs/GaAs Near-Surface Quantum Wells by a Novel Interface Control Technique.," Jpn.J.Appl.Phys.34. 4540-4543 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Hasegawa: "Fabrication and characterization of quantum wire transistors with Schottky in-plane gates formed by an in situ electrochemical process.," J.Vac.Sci.& Technol.B,. 13. 1744-1750 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Kodama: "Silicon Interlayer Based Surface Passivation of Near-Surface Quantum Wells.," J.Vac.Sci.& Technol.B. 13. 1794-1800 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Fukui: "Multiatomic Step Formation Mechanism of Metalorganic Vapor Phase Epitaxy Grown GaAs Vicinal Surfaces and Its Application to Quantum Well Wires.," J.Cryst.Growth. 146. 183-187 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Saitoh: "Determination of Interface State Density Distribution and Surface Recombination Velocity on Passivated Semiconductor Surfaces by Photoluminescence Surface State Spectroscopy.," Materials Science Forum. 185-188. 53-58 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Fujikura: "Fabrication of InP-based InGaAs ridge quantum wires utilizing selective molecular beam epitaxial growth on(311)A facets.," J.Electron.Mater.25. (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Suzuki: "A Novel Insulated Gate Technology for InGaAs High Electron Mobility Transistors Using Silicon Interlayer Based Passivation Technique.," J.Electron.Mater.25. (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] B.X.Yang: "Properties of InAs_xP_<x-1> Layer Formed by P-As Exchange Reaction on (001)InP Surface Exposed to As_4 Beam.," J.Electron.Mater.25. (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Kasai: "Fabrication and Characterization of Novel Lateral Surface Superlattice Structure Utilizing Schottky Barrier Height Conyrol by Doped Siricon Interface Control Layers.," Jpn.J.Appl.Phys.,. 35. 617-624 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Koyanagi,: "Contactless Characterization of Thermally Oxidized,Air-Exposed and Hydrogen-Terminated Silicon Surfaces by Capacitance-Voltage and Photoluminesence Methods.," Jpn.J.Appl.Phys.,. 35. 630-637 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Jinushi,: "Novel GaAs-Based Single-Electron Transistors with Schottky In-Plane Gates Operating up to 20K" Jpn.J.Appl.Phys.,. 35. 397-404 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Uno,: "0.86eV Platinum Schottky Barrier on Indium Phosphide by In Situ Electrochemical Process and Its Application to MESFETs.," Jpn.J.Appl.Phys.,. 35. 751-756 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Fujikura,: "Surface Passivation of In_<0.53>Ga_<0.47>As Ridge Quantum Wires Using Silicon Interface Control Layers.," J.Vac.Sci.Technol.,. 14(発表予定). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 長谷川英機: "InP系化合物半導体材料およびデバイスの新展開" 応用物理. 65. 108-118 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Hasegawa: "Metal-Semiconductor Interfaces" Ohmsha, (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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