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DC current effects on step array on vicinal Si surfaces and structure of high index Si surfaces

Research Project

Project/Area Number 07455021
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionTokyo Institute of Technology

Principal Investigator

MINODA Hiroki (1996)  Tokyo Institute of Technology, Physics Department Research associeate, 理学部, 助手 (20240757)

八木 克道 (1995)  東京工業大学, 理学部, 教授 (90016072)

Co-Investigator(Kenkyū-buntansha) 箕田 弘喜  東京工業大学, 理学部, 助手 (20240757)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥7,600,000 (Direct Cost: ¥7,600,000)
Fiscal Year 1996: ¥2,800,000 (Direct Cost: ¥2,800,000)
Fiscal Year 1995: ¥4,800,000 (Direct Cost: ¥4,800,000)
KeywordsSi surface / high index surface / carrent effect / surface microscopy / 熱平衡形状 / 表面電子顕微鏡 / 近接場 / プローブ / プラズモン / ファイバ / 顕微鏡
Research Abstract

Studies of structures of high index Si surfaces (a Si (5 5 12) surface and a Si (hhm) m/h=1.4-1.5 surface) were performed by using STM.Atomic models of the surface structure of these two surfaces were proposed taking into account of the STM images. The STM observations showed us that the (5 5 12) surfaces has 2*1 structure and the proposed structure model includes adatoms at the bright point in the STM images. Our previous REM studies showed us that the (hhm) structure is modulated structure and unit length along [mm2h] direction varies on the sufaces. The (hhm) structure is constructed by three small (111) terraces. The STM images of the small (111) terraces on the (hhm) surface are similar to those of the part of the Si (111) DAS structure and sizes of these three terraces are smaller than that of submit of the 7*7 structure of the (111) surfaces. The modulated structures are formed by changing width of each terraces. Thus, the modulated structure of the (hhm) structure is considered to be related to step bunching on the (111) surfaces. It was well known that the step structure reversibly transforms between step bunching and regular array of the steps. For better understanding of DC heating effects step bunching speeds were measured at various temperature and at various heating current by using an indirect heating specimen holder. It was found that dispersions of the terrace widths that show the degree of the step bunching increase linearly with time. We measured the bunching speed from the time dependence of the dispersions of the terrace widths. Growth of the dispersions at high current is faster than those at low current. It was also found that the step bunching speed increases with temperature between 840゚C and 910゚C and it decreases with average terrace width.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] T.Suzuki,H.Minoda,Y.Tanishiro,K.Yagi: "TED study of Si(113)surfaces" Surf.Rev.Lett.(in spress).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Sench.H.Minoda Y.Tanishiro K.Yagi: "Quantitative Sturdies of Step Bunching Dynamics on Si(111)Induced by a current effect" Surf.Sci. 357-358. 518-521 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suzuki,H.Minoda,Y.Tanishiro,K.Yagi,H.Kita,N.Shimizu: "STM studies of Si(hhm)surtauo with m/h=1.4-1.5" Surf.Sci. 357-358. 73-77 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suzuki,H.Minoda,Y.Tanishiro,K.Yagi,T.Sueyoshi,T.Sato,M.Iwatsuki: "STM studies of Si(5512)2×1 surfaces" Surf.Sci. 357-358. 522-526 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suzuki,H.Minoda,Y.Tanishiro,K.Yagi: "REM study of High Index Si(5512)flat Surface" Surf.Sci.348. 335-343 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suzuki, H.Minoda, Y.Tanishiro, K.Yagi: "TED studies of Si (113) surfaces" Surf.Rev.Lett.(in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suzuki, H.Minoda, Y.Tanishiro, K.Yagi, T.Sueyoshi, T.Sato M.Iwatsuki: "STM studies of Si (5 5 12) 2*1 surfaces" Surf.Sci.357-358. 522-526 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Senoh, H.Minoda, Y.Tanishiro, K.Yagi: "Quantitative studies of step bunching dynamics on Si (111) induced by a current effect" Surf.Sci.357-358. 518-521 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suzuki, H.Minoda, Y.Tanishiro, K.Yagi, H.Kitada and N.Shimizu: "STm studies of Si (hhm) surfaces with m/h=1.4-1.5" Surf.Sci.357-358. 73-77 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suzuki, H.Minoda, Y.Tanishiro, K.Yagi: "REM Study of High Index Si (5 5 12) flat Surface" Surf.Sci.348. 335-343 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suzuki,H.Minoda,Y.Tanishiro,K.Yagi: "REM Study of High Index Si(5 5 12) flat Surface" Surf.Sci.357-358. 335-343 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Senoh,H.Minoda,Y.Tanishiro,K.Yagi: "Quantitative studies of step bunching dynamics on Si(111) induced by a current effect" Surf.Sci.357-358. 518-521 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Suzuki,H.Minoda,Y.Tanishiro,K.Yagi,H.Kitada,N.Shimizu: "STM studies of Si(hhm) surfaces with m/h=1.4-1.5" Surf.Sci.357-358. 73-77 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Minoda,Y.Tanishiro,K.Yagi: "REM and TEM Studies of Thin Film Grswth Dynamics on Si Sartaces" MRS.Symp.Prcc. 404. 131-141 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Minoda,Y.Tanishiro,N.Yamamoto,K.Yagi: "In-situ TEM Obserrstions of Sufactaut-Media ted Epitaxy:Growth of Ge on Si(111) Surface Mediated by In" Surf.Sci. 357-358. 418-421 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T. Suzuki, H. Minoda, Y. Tanishiro, K. Yagi: "REM Study of High Index(5 5 12)flat Surface" Surf. Sci.(in press).

    • Related Report
      1995 Annual Research Report
  • [Publications] H. Minoda, Y. Tanishiro, N. Yamamoto, K. Yagi: "In-situ TEM Observations of Surfactant-Mediated Epitaxy: Growth of Ge on Si(111) Surface Mediated by In" Surf. Sci.(in press).

    • Related Report
      1995 Annual Research Report
  • [Publications] T. Senoh, H. Minoda, Y. Tanishiro, K. Yagi: "Qualitative studies of step bunching dynamics on Si(111) induced by a current effect" Surf. Sci.(in press).

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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