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Dynamic Processes in Atomic Level on Silicon Surfaces

Research Project

Project/Area Number 07455022
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionNagoya University

Principal Investigator

ICHIMIYA Ayahiko  Nagoya University Department of Quantum Engineering Professor, 工学部, 教授 (00023292)

Co-Investigator(Kenkyū-buntansha) HORIO Yoshimi  Nagoya University Department of Quantum Engineering Assistant Professor, 工学部, 助手 (00238792)
AKIMOTO Koichi  Nagoya University Department of Quantum Engineering Associate Professor, 工学部, 助教授 (40262852)
高橋 功  名古屋大学, 工学部, 助手 (10212010)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥6,400,000 (Direct Cost: ¥6,400,000)
Fiscal Year 1996: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 1995: ¥5,000,000 (Direct Cost: ¥5,000,000)
KeywordsSilicon surfaces / Adsorption / Epitaxial growth / Metal adsorption / Scanning tunneling microscopy / reflection high-energy electron diffraction / X-ray diffarction / Metal-silicon interface / 反射高速電子回折 / X線回折 / 反射高速原子回折 / ステップダイナミクス
Research Abstract

Thermal relaxation of isolated silicon islands and craters on the Si(111)7*7 and the Si (001)2*1 surfaces have been observed by temperature variable scanning tunneling microscopy (STM). Thermal decomposition rates of silicon islands and filling-up rates of craters were measured at various substrate temperatures of 300 to 600゚C.Effects of the probe tip on the rates were measured and the reduced rates were determined without the tip effects. Sizes of islands and craters depend on time t with a functional form of (t<@D20@>D2-T)<@D1a@>D1, and alpha*1 without tip effects and alpha*2/3 under the tip effects. For the Si (111) surface activation energies for island decomposition and crater filling-up were determined as 1.5(]SY.+-。[)0.1 eV and 1.3(]SY.+-。[)0.2 eV,respectively. Pre-exponential factors are 2*10<@D111(]SY.+-。[)1@>D1/s for islands and 3*10<@D19(]SY.+-。[)2@>D1/s for craters. We have found that characteristic 5*5 islands with long life time are formed during relaxation, but the 7*7 i … More slands have mostly short life time. Rotation of small islands was also observed during relaxation. For Si (001) islands an activation energy was determined as the value of 2.1(]SY.+-。[)0.5 eV.The pre-exponential factor is 10<@D118(]SY.+-。[)4@>D1/s. The rates of the relaxation of Si (001) islands are about 100 times larger than those of Si (111) islands. The characteristic islands on the Si (001) surface have rectangular shapes with aspect ratios near 3 : 1.
Gold and silver growth on Si (111)ROO<3>*ROO<3> -Au and -Ag surfaces were investigated by reflection high-energy electron diffraction (RHEED), STM and X-ray diffraction. At temperatures lower than 100゚C,gold is grown epitaxially on the ROO<3>*ROO<3> -Au and ROO<3>*ROO<3> -Ag surfaces with layr-by-layr mode. In this case, gold silicide layr segregates on the grown layr. At temperatures higher than 200゚C,growth of the gold becomes island mode. We specurate that the change of the growth mode is due to eutectic temperature of the two dimensional gold silicide layr segregated on the grown surfaces. For silver growth on the both surfaces, segregation of silicide layrs does not take plance. Silver layr is grown epitaxially on the ROO<3>*ROO<3> -Au with nearly layr-by layr mode at the low temperatures. On the ROO<3>*ROO<3> -Ag surface, however, island growth mode takes place. In this case, growth structure of the silver layrs depends strongly upon temperature. We have found that interface structures between silicon substrate and silver layrs also depend upon the temperature, and are related to the structures of the growth layrs. Less

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (47 results)

All Other

All Publications (47 results)

  • [Publications] Y. Itoh: "Structure of CaF_2/Si (111) long interface" JOURNAL OF CRYSTAL GROWTH. 166.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A. Ichimiya: "Structural study of epitaxial growth on silicon surfaces" THIN SOLID FILMS. 281.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A. Ichimiya: "Epitaxial growth of silver on an Si (111) √3×√3 Au surface at room temperature" THIN SOLID FILMS. 281.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Q. Xue: "Surface geometry of MBE-grown GaAs (001) surface phases" THIN SOLID FILMS. 281.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Horio: "A new type of RHEED apparatus equipped with an energy filter" APPLIED SURFACE SCIENCE. 100/101.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T. Emoto: "Soft X-ray emissions by highly charged ions on solid surfaces : Mo and Ta surfaces" APPLIED SURFACE SCIENCE. (100/101)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Taga: "Adsorption reactions of Ti/Si (001) by variable-temperature STM" SURFACE SCIENCE. 357/358.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Lijadi: "Silver growth on Si (111) √3×√3-Ag surfaces at low temperature" M. SURFACE SCIENCE. 357/358.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A. E. Smith: "Surface polytypic determination of niobium diselenide by RHEED" SURFACE SCIENCE. 357/358.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y. Tanaka: "Thermal decay of silicon islands and craters on silicon surfaces by scanning tunneling microscopy" SURFACE SCIENCE. 357/358.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Fuchigami: "Gold deposition on a Si (111) √3×√3-Au surface" SURFACE SCIENCE. 357/358.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A. Ichimiya: "Quantitative measurements of thermal relaxation of isolated silicon hillocks and craters on the Si (111) 7×7 surface by scanning tunneling microscopy" PHYSICAL REVIEW LETTERS. (76)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A. Ichimiya: "Atomic structures of Si (111) surface during silicon epitaxial growth" JOURNAL OF CRYSTAL GROWTH. 163.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Ishiyama: "Site conversion path and the kinetics of Ti on Si (001) -2×1 observed by scanning tunneling microscopy" SURFACE SCIENCE. (349)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Itoh: "Structure of CaF_2/Si(111)long interface" SURFACE SCIENCE JOURNAL OF CRYSTAL GROWTH. 166. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.Ichimiya: "Structural study of epitaxial growth on silicon surfaces" THIN SOLID FILMS. 281. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.Ichimiya: "Epitaxial growth of silver on an Si(111)ROO<3>*ROO<3> Au surface at room" THIN SOLID FILMS. 281. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Q.Xue: "Surface geometry of MBE-grown GaAs(001)surface phases" THIN SOLID FILMS. 281. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Horio: "A new type of RHEED apparatus equipped with an energy filter" APPLIED SURFACE SCIENCE. 100/101. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Emoto: "Soft X-ray emissions by highly charged ions on solid surfaces : Mo and Ta surfaces" APPLIED SURFACE SCIENCE. 100/101. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Taga: "Adsorption reactions of Ti/Si(001)by variable-temperature STM" SURFACE SCIENCE. 357/358. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Lijadi: "Silver growth on Si(111)ROO<3>*ROO<3>-Ag surfaces at low temperature" M.SURFACE SCIENCE. 357/358. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.E.Smith: "Surface polytypic determination of niobium diselenide by RHEED" SURFACE SCIENCE. 357/358. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Tanaka: "Thermal decay of silicon islands and craters on silicon surfaces by scanning tunneling microscopy" SURFACE SCIENCE. 357/358. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Fuchigami: "Gold deposition on a Si(111)ROO<3>*ROO<3> -Au surface" SURFACE SCIENCE. 357/358. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.Ichimiya: "Quantitative measurements of thermal relaxation of isolated silicon hillocks and craters on the Si(111)7*7 surface by scanning tunneling microscopy" PHYSICAL REVIEW LETTERS. 76. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.Ichimiya: "Atomic structures of Si(111)surface during silicon epitaxial growth" JOURNAL OF CRYSTAL GROWTH. 163. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Ishiyama: "Site conversion path and the kinetics of Ti on Si(001)-2*1 observed by scanning tunneling microscopy" SURFACE SCIENCE. 349.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Itoh: "Structure of CaF_2/Si(111)long interface" JOURNAL OF CRYSTAL GROWTH. 166.

    • Related Report
      1996 Annual Research Report
  • [Publications] A.Ichimiya: "Structural study of epitaxial growth on silicon surfaces" THIN SOLID FILMS. 281.

    • Related Report
      1996 Annual Research Report
  • [Publications] A.Ichimiya: "Epitaxial growth of silver on an Si(111) √3×√3Au surface at room" THIN SOLID FILMS. 281.

    • Related Report
      1996 Annual Research Report
  • [Publications] Q.Xue: "Surface geometry of MBE-grown GaAs(001)surface Phases" THIN SOLID FILMS. 281.

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Horio: "A new type of RHEED apparatus equipped with an energy filter" APPLIED SURFACE SCIENCE. 100/101.

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Emoto: "Soft X-ray emissions by highly charged ions on solid surfaces : Mo and Ta surfaces" APPLIED SURFACE SCIENCE. 100/101.

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Taga: "Adsorption reactions of Ti/Si(001)by variable-temperature STM" SURFACE SCIENCE. 357/358. 28-31 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Lijadi: "Silver growth on Si(111) √3×√3-Ag surfaces at low temperature" M.SURFACE SCIENCE. 357/358. 51-54 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] A.E.Smith: "Surface polytypic determination of niobium diselenide by RHEED" SURFACE SCIENCE. 357/358. 213-216 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Tanaka: "Thermal decay of silicon islands and craters on silicon surfaces by scanning tunneling microscopy" SURFACE SCIENCE. 357/358. 840-843 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Fuchigami: "Gold deposition on a Si(111) √3×√3-Au surface" SURFACE SCIENCE. 357/358. 937-940 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] A.Ichimiya: "Quantitative measurements of thermal relaxation of isolated silicon hillocks and craters on the Si(111)7×7 surface by scanning tunneling microscopy" PHYSICAL REVIEW LETTERS. 76. 4721-4724 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] A.Ichimiya: "Atomic structures of Si(111)surface during silicon epitaxial growth" JOURNAL OF CRYSTAL GROWTH. 163. 39-47 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Ishiyama: "Site conversion path and the kinetics of Ti on Si(001)-2×1 observed by scanning tunneling microscopy" SURFACE SCIENCE. 349. 267-274 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 一宮彪彦: "Structural Study of Epitaxial Growth on Silicon Sarfaccs" Thin Solid Films. (発表予定).

    • Related Report
      1995 Annual Research Report
  • [Publications] 一宮彪彦: "Epitaxial Growth of Silver on a Si(111)√<3>×√<3>Au Surtoa at Room terperctine" Thin Solid Films. (発表予定).

    • Related Report
      1995 Annual Research Report
  • [Publications] 渕上健児: "Gold Deposition on a Si(111)√<3>×√<3>Au" Surface Science. (発表予定).

    • Related Report
      1995 Annual Research Report
  • [Publications] 田中頼子: "Thermal Decay of Silicon Islands and Craters on Silicon Sarfaces by STM" Surface Science. (発表予定).

    • Related Report
      1995 Annual Research Report
  • [Publications] Melania Lijadi: "Silver Growthon Si(111)√<3>×√<3>-Ag Surtaces at Low tempmration" Surface Science. (発表予定).

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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