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Fundamental Study on a High Brightness and High Resolution YAG Screen for Electron Microscopy

Research Project

Project/Area Number 07455036
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionNagoya University

Principal Investigator

HIBINO Michio  Center for Integrated Research in Science and Engineering, Nagoya University Professor, 理工科学総合研究センター, 教授 (40023139)

Co-Investigator(Kenkyū-buntansha) KIMURA Keiko  Center for Integrated Research in Science and Engineering, Nagoya University Res, 理工科学総合研究センター, 助手 (60262862)
TANAKA Sigeyasu  School of Engineering, Nagoya University Research Associate, 工学部, 助手 (70217032)
HANAI Takaaki  School of Engineering, Nagoya University Assistant Professor, 工学部, 講師 (00156366)
TANJI Takayoshi  Center for Integrated Research in Science and Engineering, Nagoya University Ass, 理工科学総合研究センター, 助教授 (90125609)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥6,600,000 (Direct Cost: ¥6,600,000)
Fiscal Year 1996: ¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1995: ¥4,700,000 (Direct Cost: ¥4,700,000)
Keywordshigh voltage electron microscope / TV-system / high efficient scintillator / YAG / glass hemisphere / lens coupling system / 電子顕微鏡 / 高効率シンチ-タ
Research Abstract

Coupled by a lens optical system with a photo-cathode, a single crystal of YAG (Yttrium Aluminum Garnet) has been used for a scintillator, which exchanges electron images to light images, in a new TV system for an electron microscopy. Lens coupled YAG scintillator system has advantages for damages due to the high energy electron irradiation and for lowering contrast by the x-ray. It was difficult, however, to achieve both high brightness and high resolution with this system, because the high refractive index of YAG reflects most of the light emitted in the crystal at the YAG-vacuum interface. In order to over come this problem of total reflection, we have developed a new scintillator combined a platelet YAG crystal with a glass hemisphere and have designed newly lens optical system.
[In the first year] ;
1. New type YAG scientillators have been developed, a hemisphere YAG crystal for a 100 kV electron microscope and a combination of platelet YAG and a glass hemisphere for a 1000 kV electron microscope.
2. A lens coupling optical system for the 1000 kV electron microscope has been designed.
[In the second year] ;
1 Combining the new YAG scintillator and the lens optical system with a SIT-type TV-tube, we have produced a new TV system for the high voltage electron microscope, and
2. We evaluated its characteristics with a light source and the 1000 kV electron microscope as,
(1) Resolution The resolution is 50-60 mum on YAG for 1000 kV electrons.
The curvature of a image plane due to the hemisphere can be reduced with a proper focusing condition
(2) Brightness The glass hemisphere improves the brightness by a factor of 3.
(3) Distortion The distortion due to the hemisphere is -4% at the edge of the TV screen.
(4) Diminishing in the surrounding area dose not affect more than 70% in the monitor, and it is improbable.
(5) DQE 0.04-0.12
Consequently, we demonstrated that the TV-system for HVEM which is resistant to an electron irradiation damage and the effect of x-ray is available.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (37 results)

All Other

All Publications (37 results)

  • [Publications] 日比野 倫夫: "Application of the foil Lens to Improvement of Scanning Transmission Electron Microscopy Imaging by Correcting the Spherical Aberration" Recent Development of Electron Microscopy 1995. (in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 花井 孝明: "Increase of Current Density of the Electron Probe by Correction of the Spherical Aberration with a Side-Entry Type Foil Lens." J. Electron Microsc.44・5. 301-306 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 平山 司: "Electron Holographic Interference Micrograph of a Single Magnetic-Domain Particle." Jpn. J. Appl. Phys.34・6A. 3294-3297 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 平山 司: "Direct Visualization of Electromagnetic Microfields by Interference of Three Electron Waves." Appl. Phys. Lett.67・9. 1185-1187 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] R. A. Herring: "Interferometry Using Convergent Electron Diffracted Beams Plus an Electron Biprism (CBED+EBI)." Ultramicroscopy. 60・1. 153-169 (19954)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 木村(小粥) 啓子: "Nanofabrication of Grating and Dot Patterns by Electron Holographic Lithography." Appl. Phys. Lett.66・12. 1560-1562 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 日比野 倫夫: "High Resolution and High Collection Efficiency YAG Screen for Lens Coupling TV and CCD Camera" Proc. Sixth Asia-Pacific Conference on Electron Microscopy (eds. D. Barber et al.). 1.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 45-46 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 丹司 敬義: "Differential Microscopy by Conventional Electron Off-Axis Holography" Applied Physics Letters. 69・18. 2623-2625 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 丹司 敬義: "Differential Microscopy in Off-Axis TEM Holography" Scanning Microscopy. (掲載予定).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 花井 孝明: "Maximum Entropy Restoration of Electron Microscope Images with a Random-Spatial-Distribution Constraint" Scanning Microscopy. (掲載予定).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 田中 成泰: "Transmission Electron Microscopy Study of InGaAsP/InGaP Thin Layer Structure Grown by Liquid Phase Epitaxy" Journal of Crystal Growth. 166・. 334-338 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 田中 成泰: "XTEM Sample Preparation Technique for n-Type Compound Semiconductors using Photochemical Etching" Microscopy Research and Technique. 35・4. 363-364 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Hibino: "Application of the foil Lens to Improvement of Scanning Transmission Electron Microscopy Imaging by Correcting the Spherical Aberration" Recent Development of Electron Microscopy. (in press). (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Hanai: "Increase of Current Density of the Electron Probe by Correction of the Spherical Aberration with a Side-Entry Type Foil Lens." J.Electron Microsc.Vol.44-5. 301-306 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Hirayama: "Electron Holographic Interference Micrograph of a Single Magnetic-Domain Particle." Jpn.J.Appl.Phys.Vol.34-6A. 3294-3297 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Hirayama: "Direct Visualization of Electromagnetic Microfields by Interference of Three Electron Waves." Appl.Phys.Lett.Vol.67-9. 1185-1187 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] R.A.Herring: "Interferometry Using Convergent Electron Diffracted Beams Plus an Electron Biprism(CBED+EBI)." Ultramicroscopy. Vol.60-1. 153-169 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Kimura: "Nanofabrication of Grating and Dot Patterns by Electron Holographic Lithography." Appl.Phys.Lett.Vol.66-12. 1560-1562 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Hibino: "High Resolution and High Collection Efficiency YAG Screen for Lens Coupling TV and CCD Camera" Proc.Sixth Asia-Pacific Conference on Electron Microscopy(eds.D.Barber et al.). Vol.1. 45-46 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Tanji: "Differential Microscopy by Conventional Electron Off-Axis Holography" Applied Physics Letters. Vol.69-18. 2623-2625 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Tanji: "Differential Microscopy in Off-Axis TEM Holography" Scanning Microscopy. (in print).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Hanai: "Maximum Entropy Restoration of Electron Microscope Images with a Random-Spatial-Distribution Constraint" Scannign Microscopy. (in print).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Tanaka: "Transmission Electron Microscopy Study of InGaAsP/InGaP Thin Layr Structure Grown by Liquid Phase Epitaxy" Journal of Crystal Growth. Vol.166. 334-338 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Tanaka: "XTEM Sample Preparation Technique for n-Type Compound Semiconductors using Photochemical Etching" Microscopy Research and Technique. Vol.35-4. 363-364 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 日比野倫夫: "High Resolution and High Collection Efficiency YAG Screen for Lens Coupling TV and CCD Camera" Proc.Sixth Asia-Pacific Conference on Electron Microscopy(eds.D.Barber et al.). 1. 45-46 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 丹司敬義: "Differential Microscopy by Conventional Electron Off-Axis Holography" Applied Physics Letters. 69・18. 2623-2625 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 丹司敬義: "Differential Microscopy in Off-Axis TEM Holography" Scannning Microscopy. (掲載予定).

    • Related Report
      1996 Annual Research Report
  • [Publications] 花井孝明: "Maximum Entropy Restoration of Electron Microscope Images with a Random-Spatial-Distribution Constraint" Scannning Microscopy. (掲載予定).

    • Related Report
      1996 Annual Research Report
  • [Publications] 田中成泰: "Transmission Electron Microscopy Study of InGaAsP/InGaP Thin Layer Structure Grown by Liquid Phase Epitaxy" Journal of Crystal Growth. 166・. 334-338 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 田中成泰: "XTEM Sample Preparation Technique for n-Type Compound Semiconductors using Photochemical Etching" Microscopy Research and Technique. 35・4. 363-364 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 花井 孝明: "Increase of Current Density of the Electron Probe by Correction of the Spherical Aberration with a Side-Entry Type Foil Lens." J.Electron Microsc.44. 301-306 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 木村(小粥)啓子: "Nanofabrication of Grating and Dot Patterns by Electron Holographic Lithography." Appl.Phys.Lett.66. 1560-1562 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 田中 成泰: "Transmission Electron Microscopy Study of InGaAsP/InGaP Thin Layer Structure Grown by Liquid Phase Epitaxy" J.Cryst.Growth. (印刷中).

    • Related Report
      1995 Annual Research Report
  • [Publications] 平山 司: "Electron Holographic Interference Micrograph of a Single Magnetic-Domain Particle." Jpn.J.Appl.Phys.34. 3294-3297 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 平山 司: "Direct Visualization of Electromagnetic Microfields by Interference of Three Electron Waves." Appl.Phys.Lett.67. 1185-1187 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] R.A.Herring: "Interferometry Using Convergent Electron Diffracted Beams Plus an Electron Biprism(CBED+EBI)." Ultramicroscopy. 60. 153-169 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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