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A Micromachined and Integrated Tunneling Control Unit and Its Application

Research Project

Project/Area Number 07455042
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionThe University of Tokyo

Principal Investigator

FUJITA Hiroyuki  The Univercity of Tokyo, Institute of Industrial Science, Professor, 生産技術研究所, 教授 (90134642)

Co-Investigator(Kenkyū-buntansha) AONO Masakazu  The Institute of Physical and Chemical Research, Head of Surface and Interface E, 表面界面工学研究室, 主任研究員 (10184053)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥7,600,000 (Direct Cost: ¥7,600,000)
Fiscal Year 1996: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1995: ¥5,600,000 (Direct Cost: ¥5,600,000)
Keywordsvacuum tunneling / micromachining / electrostatic actuator / silicon / displacement sensor / accelerometer / AFM / STM / マイクロマシニング / トンネル電流 / 集積化 / エッチング / 探針 / 超高感度変位センサ / 微小変位制御
Research Abstract

We developed a micro fabricated tunneling unit, a device which can control the magnitude of a tunneling current that passes through a vacuum gap by adjusting the gap diostance with a microactuator. Since the unit has a tunneling tip in the direction lateral to the substrate, we call it a lateral tunneling unit(LTU). The LTU was fabricated by IC-compatible surface micromaching process ; it occupies only 0.5mm*0.5mm in area. Because of its layout and fabrication process, the LUT is suitable for intergrating with each other or with other microstructures on a single substrate. This paper describes the design, the fabrication, and an experimental result which shows LTU's ability to control tunneling current.
The LTU was successfully applied to mimute displacement detection. An LTU has a tunneling tip protruding from the chip edge and can be moved back and forth by a microactuator. The tip end was positionea crose to a pranar electrode attached to a PZT actuator. When the PZT actuator moved, the gap between the tip and the opposing electrode was kept constant by moving the tip so that the tunneling current flows through the gap should be constant. The displacement of the planar electrode was determined from the change in the microactuator's driving voltage. Possible applications of displacement detection based on LUT include detection of displacement of the prof-mass of an accelerometer or an AFM cantilever. Arrays of LUT could be used in date-storage devices based on SPM(scanning probe microscopes).

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report

Research Products

(17 results)

All Other

All Publications (17 results)

  • [Publications] Dai Kobayashi,Chang-Jin Kim and Hiroyuki Fujita: "Photoresist-Assisted Release of Movable Microstructures" Japanese Journal of Applied Physics. Vol.32,No.11A. L1642-L1644 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Toshiki Hirano,Dai Kobayashi,Tomotake Furuhata and Hiroyuki Fujita: "Electroplated and Dry-Released Metallic Microstructures for a Lateral Tunneling Unit Application" Japanese Journal of Applied Physics. Vol.33,No.2. 1202-1208 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Dai Kobayashi,Hiroyuki Fujita: "Design,Fabrication and Operation of a Micromachined Tunneling Control Unit" Trans.IEE of Japan. Vol.116-E,No.8. 339-344 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Dai Kobayashi,Hiroyuki Fujita: "Displacement Measurement by a Microfabricated Tunneling Unit" Trans.IEE of Japan. Vol.116-E,No.7. 297-302 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Hirosh Toshiyoshi,Dai Kobayashi,Hiroyuki Fujita,Toshitsugu Ueda: "A Piezoelectric Quartz Microactuator for a Large Pseudo Static Displacement" Jpn.J.Appl.Phys.Vol.33. L1806-1808 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Dai Kobayashi, Chang-Jin Kim and Hiroyuki Fujita: "Photoresist-Assisted Release of Movable Microstructures" Japanese Journal of Applied Physics. vol.32, No.11A. L1642-L1644 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Toshki Hirano, Dai Kobayashi, Tomotake Furuhata and Hiroyuki Fujita: "Electroplated and Dry-Relesed Metallic Microstructures for a Lateral Tunneling Unit Application" Japanese Jourbnal of Applied Physics. vol.33, No.2. 1202-1208 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Dai Kobayashi, Hiroyuki Fujita: "Desing, Fabrication and Operation of a Micromachined Tunneling Control Unit" Trans.IEE of Japan. vol.116-E,No.8, Oct.339-344 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Dai Kobayashi, Hiroyuki Fujita: "Displacement Measurement by a Microfabricated Tunneling Unit" Trans.IEE of Japan. vol.116-E,No.7, Sep.297-302 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Hirosh Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda: "A Piezoelectric Quartz Microactuator for a Large Pseudo Static Displacement" Jpn.J.Appl.Phys.vol.33. L1806-1808 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Dai Kobayashi,Chang-Jin Kim and Hiroyuki Fujita: "Photoresist-Assisted Release of Movable Microstructures" Japanese Journal of Applied Physics. Vol.32 No.11A. L1642-L1644 (1993)

    • Related Report
      1996 Annual Research Report
  • [Publications] Toshiki Hirano,Dai Kobayashi,Tomotake Furuhata and Hiroyuki Fujita: "Electroplated and Dry-Released Metallic Microstructures for a Lateral Tunneling Unit Application" Japanese Journal of Applied Physics. Vol.33 No.2. 1202-1208 (1994)

    • Related Report
      1996 Annual Research Report
  • [Publications] Dai Kobayashi,Hiroyuki Fujita: "Design,Fabrication and Opereation of a Micromachined Tunneling Control Unit" Trans.IEE of Janpan. Vol.166-E No.8. 339-344 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Dai Kobayashi,Hiroyuki Fujita: "Displacement Measurement by a Microfabricated Tunneling Unit" Trans.IEE of Janpan. Vol.116-E No.7. 297-302 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Hirosh Toshiyoshi,Dai Kobeyashi,Hiroyuki Fujita,Toshitsugu Ueda: "A Piezoelectric Quartz Microactuator for a Large Pseudo Static Displacement" Jpn.J.Appl.Phys.Vol,33. L1806-1808 (1994)

    • Related Report
      1996 Annual Research Report
  • [Publications] D.Kobayashi,H.Fujita: "Control of a Micro Tunneling Unit Under Atomic Force" Proceedings of the 1995 IEEE/RSJ Internmational Conference on Intelligent Robots and Systems,Pitsburge,U.S.A.,. 2巻. 218-223 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] D.Kobayashi,H.Fujita: "A Micromashined Unit for Tunnel Current Control" Proceeding ETFA'95. 3巻. 277-285 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-03-31   Modified: 2016-04-21  

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