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Fabrication of High-Tc Superconducting Co-planar Josephson Junctions Using Focused Ion Beam

Research Project

Project/Area Number 07455147
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionThe University of Tokyo

Principal Investigator

OKABE Yoichi  The University of Tokyo, RCAST,Professor, 先端科学技術研究センター, 教授 (50011169)

Co-Investigator(Kenkyū-buntansha) KITAGAWA Manabu  The University of Tokyo, RCAST,Research Associate, 先端科学技術研究センター, 助手 (30110711)
柴田 克成  東京大学, 先端科学技術研究センター, 助手 (10260522)
Project Period (FY) 1995 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥6,300,000 (Direct Cost: ¥6,300,000)
Fiscal Year 1997: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 1996: ¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1995: ¥3,300,000 (Direct Cost: ¥3,300,000)
KeywordsFocused Ion Beam / Co-planar / YBaCuO / 高温超伝導 / 収束イオンビーム / 酸化物高温超伝導体 / YBCO / ジョセフソン接合
Research Abstract

YBaCuOco-planar junctions were fabricated using Focused Ion Beam (FIB) . A YBaCuO has two-dimentional conductivity of super-current. The co-planar junction has the most effective current flow in the YBaCuO Junctions. We have been fabricated two types of the co-planar junctions using FIB (One is the colally damaged substrate type. The other is the locally ion irradiate type) .
YBaCuO co-planar Josephson junctions with the abnormally grown YBaCuO were produed using Focused Ion Beam. FIB was used to form a narrow region of ion damage on the MgO (100) substrate.
The junctions were fabricated by changing the thickness of a YBaCuO thin film. The junctions had the thickness dependence of the characterstics. From the observation of the junction surface, the junction length was decreased with increasing film thickness by the horizontal growth of the normally grown YBaCuO in the thinner film junctions. It is considered that the Jeosephson current for the thicker film junctions flows dominantly in the microshorts, and Josephson current for the thinner film junctions flows in the abnormally grown YBaCuO area.
Josephson junctions were fabricated by irradiating Be ions on a YBaCuO thin film with FIB.The junctions had the I-V curve of RSJ,the IcRn product from 0.6mV to 2.0mV,and a good magnetic response at 4.2K.The critical current density of the junctions decreased exponentially with increasing the ion fluence. From the estimation of the damage distrubution, the junction length increased with the ion fluence. The damaged YBaCuO thin film showed the characteristic of the normal metal. Therefore, it is considered that the junctions had the SNS type junction with a proximity effect. When the junctions which were fabricated six mounth ago were measured, the current distribution of the junction did not changed. The junction stability was good.

Report

(4 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • Research Products

    (14 results)

All Other

All Publications (14 results)

  • [Publications] Yoshihisa Soutome: "Magnetic Field Modnlation of Critical Current in YBaCuO co-planar Josephson Janction Using Focused Ion Beam" IEEE Transactions on Applied Superconductivity. 7. 2311-2314 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 五月女 悦久: "イオン照射ダメ-ジを用いたジョセフソン素子" 日本応用磁気学会超伝導マグネティクス専門研究会資料. No.7. 26-30 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Yoshihisa Soutome: "Magnetic Field Properties of YBaCuO/non-superconductive YBaCuO/YBaCuO cu-planar Josephson Junctiuns using focused ion beam." Advances in Supercunductivity VIII. 2. 1113-1116 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Soutome and Y.Okabe: ""Magnetic field modulation of critical currents in YBaCuO co-planar Josephson junctions using fucused ion beam"" IEEE Transactions on Applied Superconductivity. Vol.7 No.2. 2311-2314 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Soutome and Y.Okabe: ""Josephson Junctions with locally irradiate damages using focused ion beam"" Superconducting Magnetics Seminar in Magnetics Society of Japan. No.7. 26-30 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Y.Soutome and Y.Okabe: ""Magnetic field properties of YBaCuO / nonsuperconductive-YBaCuO / YBaCuO co-planar Josephson junction using fucused ion beam"" Advances in Superconductivity VIII. Vol.2 Springer-Verlag. 1113-1116 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 五月女 悦久: "YBCO薄膜の膜厚変化によるFIB接合の特性の変化" 第44回応用物理学関係連合講演会講演予稿集. No.1. 104- (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 五月女 悦久: "FIBを用いた局所的照射ダメ-ジによるYBCO共プレーナ接合の作製" 第58回応用物理学会学術講演会講演予稿集. No.1. 212- (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 五月女 悦久: "イオン照射ダメ-ジを用いたジョセフソン素子" 日本応用磁気学会超伝導マグネティクス専門研究会資料. No.7. 26-30 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 五月女 悦久: "磁場特性によるFIB接合の接合部分の評価" 第57回応用物理学会学術講演会講演予稿集. No.1. 127 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Yoshihisa Sautome: "Magnetic Field Modulation of Critical Currents in YBaCuO Cu-planar Josephsun Junction Using Focused Ion Beam" IEEE Transactions in Applied Superconductivity. Vol.7. (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 五日女 悦久: "FIBを用いたYBCO共プレーナ型ジョセフソン接合の磁場特性" 1995年秋季第56回応用物理学会学術講演会講演予稿集. No.1. 106- (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Yoshihisa Soutome: "Estimation of YBaCuO/nonsuperconductive-YBaCuO/YBaCuO co-planar Josephson jonction by foeused ion beam" Fifth International Superconductive Electronics Conference Extended Abstracts. 1. 78-80 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y.Soutome: "Magnetic Field Propaties of YBaCuO/nonsuperconductive-YBaCuO/YBaCuO co-planar Josephsonjunction by Focused Ion Beam" 8th International Symposium on Superconductivity Abstracts. 1. 153- (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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