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Research on Prototype of Sputtering Apparatus for Spinic Data Storage Media

Research Project

Project/Area Number 07505004
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field 電子デバイス・機器工学
Research InstitutionTohoku University

Principal Investigator

NAKAMURA Yoshihisa  Res.Inst.Elec.Comm., Tohoku University Professor, 電気通信研究所, 教授 (50006235)

Co-Investigator(Kenkyū-buntansha) HIRATA Toyoaki  Osaka Vacuum, Ltd., Senior Engineer, 堺工場開発課, 主任技師(研究職)
TAN Kenji  Res.Inst.Elec.Comm., Tohoku University Research associate, 電気通信研究所, 助手 (80282010)
SHIMIZU Yukiya  Res.Inst.Elec.Comm., Tohoku University Research associate, 電気通信研究所, 助手 (90282011)
MURAOKA Hiroaki  Res.Inst.Elec.Comm., Tohoku University Associate Prof., 電気通信研究所, 助教授 (20239479)
高野 研一  東北大学, 電気通信研究所, 助手 (70250842)
田河 育也  東北大学, 電気通信研究所, 助手 (80212017)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥35,700,000 (Direct Cost: ¥35,700,000)
Fiscal Year 1996: ¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 1995: ¥32,100,000 (Direct Cost: ¥32,100,000)
Keywordsspinic data storage / perpendicular magnetic recording / high vacuum sputtering / hard disk / perpendicular double layr media
Research Abstract

The research team is now investigating a new paradigm of magnetic recording, or "Spinic Storage, " for establishment of a new field of engineering, in which each recorded bit is stored in several single-domain crystallites in order to attain ultra-high density magnetic recording. The aim of this project is to initiate research on fabrication technology of recording media for this new strage scheme. It has been focused to provide a design guideline for the media. In particular, to optimize as a medium for high density recording, its micro magnetic structure of the recording layr is aimed to be clarified from physics of sputtering deposition.
In early 1996, high vacuum sputtering apparatus having an aluminum chamber specialized for such high vacuum was built up, and background pressure of 10^<-8> Torr was confirmed. The apparatus was used for preparing high density magnetic recording disks for read/write experiments. The apparatus has been eventually attained much higher vacuum of 10^<-9> … More Torr in late 1996. Evaluation of read/write performance as a high density medium has been performed after optimization of sputtering conditions. The results described below have been obtained : (a) fine grain structure, which is indispensable for low noise magnetic recording media, appeared in recording layr of Co-Cr perpendicular anisotropy film, (b) higher vacuum brought better perpendicular anisotropy, and (c) compositional separation of the Co-Cr film was observed, therefore, (d) magnetic separation among the grains which acts to reduce medium noise was enhanced, however, (e) grain size became rather large, which affects the effect of increase the noise, and (f) in noise measurement its medium noise was smaller than samples by normal vacuum sputtering as a result.
As described, the original requirements for the sputtering apparatus at the start of this project has been almost satisfied, and several knowledge for the high performance perpendicular media was obtained. The media prepared by the sputtering apparatus showed superior read/write characteristics, in particular its high SN ratio, after finishing its optimization of sputtering conditions. These results will be a first step of the ideal Spinic Storage Media, and it will be a basement for realization of ultra-high density recording. Less

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (69 results)

All Other

All Publications (69 results)

  • [Publications] 中塩 栄治: "液体窒素シュラウドが軟磁性膜に与える効果" 日本応用磁気学会誌. 19,supple.S2. 83-86 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Nakamura: "Extremely High-Density Magnetic Information Storage -Outlook Based on Analyses of Magnetic Recording Mechanisms-" IEICE Transactoins on Electronics. E78-C. 1477-1492 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 渡辺 功: "垂直磁気記録媒体作成用アルミニウムチャンバーの検討" 電子情報通信学会技術研究報告. MR95-12. 1-6 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 村岡 裕明: "液体窒素シュラウドとアルミニウムチャンバを用いたスパッタ装置より成膜した二層膜記録媒体" 電子情報通信学会技術研究報告. MR95-50. 43-48 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 中塩 栄治: "軟磁性膜の成膜における液体窒素シュラウドの効果" 平成7年度電気関係学会東北支部連大会講演論文集. 2B15. 77- (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 坂口 武: "垂直二層膜媒体におけるCr下地層の影響" 平成7年度電気関係学会東北支部連合大会講演論文集. 2B13. 75- (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 清水 幸也: "サブミクロントラック記録におけるスペーシング損失" 日本応用磁気学会誌. 20. 89-92 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 高野 研一: "垂直磁気記録用MRヘッドの再生特性" 日本応用磁気学会誌. 20. 145-148 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 江 年華: "サブミクロントラック幅単磁極ヘッドの多トラック化" 日本応用磁気学会誌. 20. 149-152 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Takano: "Contact magneloresistive head for perpendicular magnetic recording" J.App.Phy. 79. 5002-5004 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 中村 慶久: "磁気記録の超高密度化-3次元シミュレーションによる予測-" 電子情報通信学会論文誌C-1. J79-C-1. 152-164 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Muraoka: "MR Head Reading Characteristics in Perpendicular Magnetic Recording" IEEE Trans.Magn.32. 3482-3484 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Jiang: "Submicronwidth Multitrack Single Pole Head for Ultra High Density Perpendicular Magnetic Recording" IEEE Trans.Magn.32. 3554-3556 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Sano: "Effects of nitrogen addition to the CoCr recordinglayer of a double layered perpendicular rigid disk" J.Magn.Magn.Mat.155. 212-215 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] I.Tagawa: "Numerical analysis of noise and interparticle interaction in perpendicular magnetic recording media" J.Magn.Magn.Mat.155. 341-344 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 清水 幸也: "三次元シミュレータによる垂直記録媒体のノズル解析" 日本応用磁気学会誌. 21(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 山田 洋: "垂直磁気記録におけるMRヘッド再生の高分解能化" 日本応用磁気学会誌. 21(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 姜 文紅: "垂直磁気記録メディアにおける熱磁気緩和の記録密度依存性" 日本応用磁気学会誌. 21(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 中塩 栄治: "Co-Cr垂直磁気異方性膜成膜における背圧改善効果" 日本応用磁気学会誌. 21(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 渡辺 功: "垂直磁気記録媒体作成用アルミニウムチャンバーの検討" 電子情報通信学会技術研究報告. MR95-12. 1-6 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 清水 幸也: "3次元シミュレータによる垂直記録媒体のノイズ解析" 第20回日本応用磁気学会学術講演概要集. 20pA-12. 22- (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 山田 洋: "垂直磁気記録におけるMRヘッドの高分解能再生" 第20回日本応用磁気学会学術講演概要集. 22pA-1. 221- (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 姜 文紅: "垂直磁気メディアにおける熱磁気緩和の記録密度依存性" 第20回日本応用磁気学会学術講演概要集. 22pA-4. 224- (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 中塩 栄治: "Co-Cr垂直膜成膜時の背圧改善効果" 第20回日本応用磁気学会学術講演概要集. 22pA-5. 225- (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Shimizu, I.Tagawa and Y.Nakamura: ""Spacing loss in submicron trackwidth recording" (in Japanese)" J.Magn.Soc.Jpn.20. 89-92 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Takano, H.Muraoka and Y.Nakamura: ""Reading characteristics of an MR head for perpendicular magnetic recording" (in Japanese)" J.Magn.Soc.Jpn.20. 145-148 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Jiang, H.Muraoka and Y.Nakamura: ""Multi-track head for submicron trackwidth single pole head" (in Japanese)" J.Magn.Soc.Jpn.20. 149-152 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Takano, H.Muraoka and Y.Nakamura: ""Contact magnetoresistive head for perpendicular magnetic recording"" J.App.Phy.79. 5002-5004 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Nakamura, I.Tagawa and Y.Shimizu: ""ultra-high density magnetic recording-Prediction by three-dimentional simulation-" (in Japanese)" IEICE Tans.C-I.J79-C-I. 152-164 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Muraoka, H.Yamada and Y.Nakamura: ""MR Head Reading Characteristics in Perpendicular Magnetic Recording"" IEEE Trans.Magn.32. 3482-3484 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Jiang, H.Muraoka and Y.Nakamura: ""Submicron-width Multitrack Single Pole Head for Ultra High Density Perpendicular Magnetic Recoeding"" IEEE Trans.Magn.32. 3554-3556 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Sano, H.Muraoka, I.Watanabe and Y.Nakamura: ""Effects of nitrogen addition to the CoCr recording layr of a double layred perpendicular rigid disk"" J.Magn.Magn.Mat.155. 212-215 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] I.Tagawa, A.Takeo and Y.Nakamura: ""Numerical analysis of noise and interparticle interaction in perpendicular recording media"" J.Magn.Magn.Mat.155. 341-344 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Shimizu and Y.Nakamura: ""Analysis on noise of perpendicular magnetic recording medium by 3-dimentional simulation" (in Japanese, in printing)" J.Magn.Soc.Jpn.21. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Yamada, H.Muraoka, Y.Nakamura, I.Abe and K.Yazawa: ""High resolution read out with an MR head in perpendicular magnetic recording" (in Japanese, in printing)" J.Magn.Soc.Jpn.21. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] W.H.Jiang, H.Muraoka, I.Tagawa and Y.Nakamura: ""Bit density dependence of magnetic relaxation in perpendicular magnetic media" (in Japanese, in printing)" J.Magn.Soc.Jpn.21. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] E.Nakasio, T.Sakaguchi, I.Watanabe, H.Muraoka and Y.Nakamura: ""Effect of background pressure for sputtering of Co-Cr film" (in Japanese, in printing)" J.Magn.Soc.Jpn.21. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] I.Watanabe, E.Nakasio, H.Muraoka and Y.Nakamura: ""Evaluation of aluminum chamber for perpendicular magnetic media fabrication" (in Japanese)" IEICE Tech.Rep.MR95-12. 1-6 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Shimizu and Y.Nakamura: ""Analysis on noise perpendicular magnetic recording medium by 3-dimentional simulation" (in Japanese)" Digests 20th Ann.Conf.Magn.Jpn. 20pA-12. 22 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Yamada, H.Muraoka, Y.Nakamura, I.Abe and K.Yazawa: ""High resolution read out with an MR head in perpendicular magnetic rcording" (in Japanese)" Digests 20th Ann.Conf.Magn.Jpn. 20pA-1. 221 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] W.H.Jiang, H.Muraoka, I.Tagawa and Y.Nakamura: ""But density dependence of magnetic relaxation in perpendicular magnetic media" (in Japanese)" Digests 20th Ann.Conf.Magn.Jpn. 22pA-4. 224 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] E.Nakasio, T.Sakaguchi, I.Watanabe, H.Muraoka and Y.Nakamura: ""Effect of background pressure for sputtering of Co-Cr film" (in Japanese)" Digests 20th Ann.Conf.Magn.Jpn. 22pA-5. 225 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 清水幸也: "サブミクロントラック記録におけるスペーシング損失" 日本応用磁気学会誌. 20. 89-92 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 高野研一: "垂直磁気記録用MRヘッドの再生特性" 日本応用磁気学会誌. 20. 145-148 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 江 年華: "サブミクロントラック幅単磁極ヘッドの多トラック化" 日本応用磁気学会誌. 20. 149-152 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Takano: "Contact magnetoresistive head for perpendicular magnetic recording" J. App. Phy.79. 5002-5004 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 中村慶久: "磁気記録の超高密度化-3次元シミュレーションによる予測-" 電子情報通信学会論文誌C-I. J79-C-I. 152-164 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H. Muraoka: "MR Head Reading Characteristics in Perpendicular Magnetic Recording" IEEE Trans. Magn.32. 3482-3484 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 中塩栄治: "Co-Cr垂直磁気異方性膜成膜における背圧改善効果" 日本応用磁気学会誌. (印刷中)21. (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 渡辺 功: "垂直磁気記録媒体作成用アルミニウムチャンバーの検討" 電子情報通信学会技術報告. MR95-12. 1-6 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 清水幸也: "3次元シミュレータによる垂直記録媒体のノイズ解析" 第20回日本応用磁気学会学術講演概要集. 20pA-12. 22- (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 山田 洋: "垂直磁気記録におけるMRヘッドの高分解能再生" 第20回日本応用磁気学会学術講演概要集. 22pA-1. 221- (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 姜 文紅: "垂直磁気メディアにおける熱磁気緩和の記録密度依存性" 第20回日本応用磁気学会学術講演概要集. 22pA-4. 224- (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 中塩栄治: "Co-Cr垂直膜成膜時の背圧記改善効果" 第20回日本応用磁気学会学術講演概要集. 22pA-5. 225- (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] N. Jiang: "Submicronwidth Multitrack Single Pole Head for Ultra High Density Perpendicular Magnetic Recording" IEEE Trans. Magn.32. 3554-3556 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y. Sano: "Effects of nitrogen addition to the CoCr recordinglayer of a double layered perpendicular rigid disk" J. Magn. Magn. Mat.155. 212-215 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] I. Tagawa: "Numerical analysis of noise and interparticle interaction in perpendicular magnetic recording media" J. Magn. Magn. Met.155. 341-344 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 清水幸也: "三次元シミュレータによる垂直記録媒体のノイズ解析" 日本応用磁気学会誌. (印刷中)21. (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 山田 洋: "垂直磁気記録におけるMRヘッド再生の高分解能化" 日本応用磁気学会誌. (印刷中)21. (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 姜 文紅: "垂直磁気記録メディアにおける熱磁気緩和の記録密度依存性" 日本応用磁気学会学誌. (印刷中)21. (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y. Nakamura: "Extremely high-density magnetic information storage-Outlook based on analyses of magnetic recording" IEICE Trans. Electron. E78-C. 1477-1492 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 中塩栄治,渡辺功,村岡裕明,中村慶久: "液体窒素シュラウドが軟磁性膜に与える影響" 日本応用磁気学会誌. 19-suppl.83-86 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 村岡裕明,中塩栄治,渡辺功,中村慶久: "液体窒素シュラウドとアルミニウムチャンバを用いたスパッタ装置により成膜した二層膜記録媒体" 電子情報通信学会技術報告. MR95. 43-48 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 渡辺功,中塩栄治,村岡裕明,中村慶久: "垂直磁気記録媒体作成用アルミニウムチャンバーの検討" 電子情報通信学会技術報告. MR95. 1-6 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 高野研一、村岡裕明、中村慶久: "コンタクトMRヘッドによる垂直二層膜メディアの評価" 第19回日本応用磁気学会学術講演概要集. 26pC. 454- (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 坂口武、渡辺功、村岡裕明、中村慶久: "垂直二層膜媒体におけるCr下地層の影響" 平成7年度電気関係学会東北支部連合大会. 2B. 75- (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 五十嵐克人、村岡裕明、中村慶久: "垂直磁気記録における媒体記録層膜厚依存性" 平成7年度電気関係学会東北支部連合大会. 2B. 76- (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 中塩栄治,渡辺功,村岡裕明,中村慶久: "軟磁性膜の成膜における液体窒素シュラウドの効果" 平成7年度電気関係学会東北支部連合大会. 2B. 77- (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 五十嵐克人、村岡裕明、中村慶久: "垂直磁気記録におけるメディアノイズと媒体パラメータの関係" 1996年電子情報通信学会総合大会. SC-6-3. (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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