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"Development of Scanning Laser Micro-polariscope and its Applications for Stress Evaluation"

Research Project

Project/Area Number 07555034
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section試験
Research Field Materials/Mechanics of materials
Research InstitutionTokyo Denki University

Principal Investigator

NIITSU Yasushi  Tokyo Denki Univ., Mechanical Engineering, Associate Prof., 工学部, 助教授 (70143659)

Co-Investigator(Kenkyū-buntansha) IKEDA Teruki  Japan Spectroscopy Co.Ltd., Applied Optics Section., Project Leader, 応用研究課, 課長
ICHINOSE Kensuke  Tokyo Denki Univ., Mechanical Engineering, Professor., 工学部, 教授 (10057226)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥4,700,000 (Direct Cost: ¥4,700,000)
Fiscal Year 1996: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 1995: ¥3,500,000 (Direct Cost: ¥3,500,000)
KeywordsStress Measurement / Laser Photoelasticity / Nondestructive Evaluation / Experimental Strss Analysis / シリコン単結晶
Research Abstract

We have developed an optical equipment that possesses high detection sensitivity for measuring the small optical retardation induced by small stress by means of laser photoelasticity. A He-Ne laser is used as a light source to measure small stress in transparent materials. We worked on the theory and process of the measurement of optical retardation in the materials. The magnitudes of principal stress difference and the directions of the principal stress are obtained simultaneously and quantitatively using our equipment. To evaluate the validity of the measurement results of the equiment, the stress distribution of a pulled rectangular glass plate with notches at both sides is measured using the equipment. The experimental results of stress distribution agree well with the analytical results of FEM.The stress distribution can be determined quickly by using the equipment and scanning stress distribution measurement has been realized. The features of the developed optical equipment and future applications are as follows,
(1)This optical equipment has high resolution power of measurement less than 1 nm retardation and this technology can be applicable to the static and dynamic force evaluations in bio-membrane, bio-cell and several kinds of thin layrs,
(2)This method can achieve the spatial-resolution of about 12 micrometer and has possibility of higher spatial-resolution up to 1 micrometer with the lens system like a microscope.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (25 results)

All Other

All Publications (25 results)

  • [Publications] Yasushi NIITSU,Kenji GOMI and Kensuke ICHINOSE: "Development of Scanning Stress Measurement Method Using Laser Photoelasticity" JSME International Jounal. (印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Kenji GOMI and Yasushi Niitsu: "Photoelastic Property of Gallium Arsenide Crystal" Proc. of ASME Int., Intersociety Electronic & Photonic Packaging Conference. (印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 五味・新津: "GaAs単結晶の結晶方位が光弾性特性におよぼす影響" 日本機械学会論文集. (印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 新津・五味・一瀬: "走査型レーザ光弾性法の開発" 日本機械学会論文集. 62-600,A. 123-128 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Yasushi NIITSU and Kenji GOMI: "Stress Measurement by Infrared Laser Photoelasticity" Proc.of ASME Int.,Intersociety Electronic & Photonic Packaging Conference. 421-422 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Yasushi NIITSU and Kenji GOMI: "Photoelastic Properly of Silicon Single Crystal" Proc of SEM VIII Int. Congress on Experimental Mechanics and Manufacture's Exhibit. 368-369 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Gomi, T.Ono, and Y.Niitsu: "Effect of Crystal Orientation on Photoelastic Constant of Silicon Single Crystal" Proc.of the 72nd JSME Spring Annual Meeting (VI). No.95-1. 141-142 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Niitsu, K.Gomi, T.Ono: "Investigation of Photoelastic Property of Semiconductor Wafers" Proc.of Appl.Exp.Mech.Elec.Pack.ASME. AMD-Vol.214. 103-108 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Ichinose, Y.Niitsu and K.Gomi: "Experimental Stress Analysis by Laser Photoelasticity and Shear Difference Method" Proc.of Int.Symp.on Adv.Tech.in Exp.Mech., JSME. 61-66 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Niitsu, K.Gomi and K.Ichinose: "Develop-ment of Scanning Stress Measurement Method Using Laser Photoelasticity (in Japanese)" Trans.of JSME,Series-A. Vol.62, No.600. 1883-1888 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Gomi, Y.Niitsu: "Effect of crystalline orientation on photoelastic constant of Si single crystal" Proc of Int.Symp.on SPIE. 238-241 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Gomi, Y.Niitsu: "Effect of Crystalline Orientation on Photoelastic Property of Si Single Crystal (in Japanese)" Trans.of JSME,Series-A. Vol.62, No.604. 2651-2656 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Yasushi NIITSU,Kenji GOMI and Kensuke ICHINOSE: "Development of Scanning Stress Measurement Method Using Laser Photoelasticity" JSME Int.J.40-2 (be published). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Gomi and Y.Niitsu: "Effect of Crystalline Orientation on Photoelastic Property of GaAs Single Crystal" Trans.of JSME,Series-A. Vol.63, No.***(be published). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Kenji GOMI and Yasushi Niitsu: "Photoelastic Property of Gallium Arsenide Crystal" Proc.of ASME Int., Intersociety Electronic & Photonic Packaing Conf.(be published). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Yasushi NIITSU,Kenji,GOMI and Kensuke ICHINOSE: "Development of Scanning Stress Measurement Method Using Laser Photoelasticity" JSME International Journal. (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Kenji GOMI and Yasushi Niitsu: "Photoelastic Property of Gallium Arsenide Crystal" Proc.of ASME Int.,Intersociety Electronic & Photonic Packaging Conference. (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 五味・新津: "GaAs単結晶の結晶方位が光弾性特性におよぼす影響" 日本機械学会論文集. (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 新津・五味・一瀬: "走査型レーザ光弾性法の開発" 日本機械学会論文集. 62-600,A. 123-128 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Yasushi NIITSU and Kenji GOMI: "Stress Measurement by Infrared Laser Photoelasticity" Proc.of SEM VIII Int. Congress on Experimental Mechanics and Manufacture's Exhibit. 421-422 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Yasushi NIITSU and Kenji GOMI: "Photoelastic Property of Silicon Single Crystal" Proc.of SEM VIII Int. Congress on Experimental Mechanics and Manufacture's Exhibit. 368-369 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y. NIITSU: "“Influence of Crystal Orientation on Photoelastic property of Silicon Single Crystal"" Proc. of Advanced in Electronic Packaging(ASME-EEP). 10-2. 1239-1245 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y. NIITSU: "“Scanning Stress Measurement Method by Laser Photoelasticity"" JSME Int. Journal Series-A. 38-4. 500-505 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y. NIITSU: "“Stress Measurement by Infrared Laser Photoelasticity"" Proc. of 8th Int. Congress on Experimental Mechanics. (発表予定). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y. NIITSU: "“Photoelastic Property of Silicon Single Crystal"" Proc. of 8th Int. Congress on Experimental Mechanics. (発表予定). (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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