| Project/Area Number |
07555037
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 試験 |
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| Research Field |
機械工作・生産工学
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
YOSHIKAWA Masanori Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and Engineering, Professor, 大学院総合理工学研究科, 教授 (30016422)
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| Co-Investigator(Kenkyū-buntansha) |
HIRATA Atsushi Tokyo Institute of Technology, Faculty of Engineering, Research Associate, 工学部, 助手 (50242277)
TOKURA Hitoshi Tokyo Institute of Technology, Faculty of Engineering, Associate Professor, 工学部, 教授 (10016628)
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| Project Period (FY) |
1995 – 1996
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| Project Status |
Completed (Fiscal Year 1996)
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| Budget Amount *help |
¥10,700,000 (Direct Cost: ¥10,700,000)
Fiscal Year 1996: ¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 1995: ¥8,500,000 (Direct Cost: ¥8,500,000)
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| Keywords | magnetic field / arc discharge / plasma jet / transparency / diamond / chemical vapor deposition |
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| Research Abstract |
Diamond films were synthesized by are discharge plasma jet CVD that is suitable for high rate synthesis. However, this method has drawbacks such as distributions of thickness and quality occurs in diamond plates. Thus, a newly type of an apparatus were designed and developed in order to control the plasma state by magnetic field. This apparatus were prepared an electromagnet movable along the axs of the plasma torch and a plasma jet. As a result of application of magnetic field to an arc and a plasma jet generated with methane, hydrogen and argon gases, the diameter of a plasma jet increases, and the distributions of the substrate temperature and the thickness and quality are improved in the range of 7-8 mm in diameter.
The deposition conditions were also discussed for synthesizing transparent diamond plates. Diamond films that have high transmittance are obtained at lower methane concentration of 1% independently of nucleation density. Transmittance of the diamond plates that were polished with diamond wheel was measured with FTIR and was approximately 68% at the wavelength of 10 mum. This transparent diamond film was found to have random orientation by X-ray diffraction analysis and less defects and impurities by the observation of the structure of its cross section. Since it takes long time to synthesize thick transparent diamond films under the determined deposition conditions, CVD apparatuses need to generate a stable and long-life time plasma jet.
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