Study of AFM/nano-indenter system
| Project/Area Number |
07555050
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
設計工学・機械要素・トライボロジー
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| Research Institution | The University of Tokyo |
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Principal Investigator |
KATO Takahisa The University of Tokyo, Assoc.Professor, 大学院・工学系研究科, 助教授 (60152716)
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| Co-Investigator(Kenkyū-buntansha) |
SUZUKI Kenji The University of Tokyo, Lecturer, 大学院・工学系研究科, 講師 (50251351)
FUKUDA Katusmi The University of Tokyo, Assistant, 大学院・工学系研究科, 助手 (20134471)
HASUIKE Akira The University of Tokyo, Assistant, 大学院・工学系研究科, 助手 (20010861)
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| Project Period (FY) |
1995 – 1997
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| Project Status |
Completed (Fiscal Year 1997)
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| Budget Amount *help |
¥13,200,000 (Direct Cost: ¥13,200,000)
Fiscal Year 1997: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 1996: ¥2,400,000 (Direct Cost: ¥2,400,000)
Fiscal Year 1995: ¥10,200,000 (Direct Cost: ¥10,200,000)
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| Keywords | nano-indentation / Hard coating / Atomic force microscope / AFM / ナノインデンター / 表面評価 |
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| Research Abstract |
We developed a system in which Atomic force microscope and nano-indentationtester are connected effectively so that the hardness measurement is carried out quickly and systematically. Then the nanoindentation hardness of TiN coating substrate has been measured at room temperature using the indentation type tester for the surface property. The hardness of the coating was measured by atomic force microscope. From this experiment the following conclusions are drawn :
1) As the load increased, the depth is also increased. For 5gf load, the depth is about 1 mum.
2) The dynamic hardness tends to increase with the decrease of indentation load.
3) When the indentation load is very high (in case of 100gf), cracks are observed into the indentation.
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Report
(4 results)
Research Products
(6 results)
