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Study of AFM/nano-indenter system

Research Project

Project/Area Number 07555050
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 設計工学・機械要素・トライボロジー
Research InstitutionThe University of Tokyo

Principal Investigator

KATO Takahisa  The University of Tokyo, Assoc.Professor, 大学院・工学系研究科, 助教授 (60152716)

Co-Investigator(Kenkyū-buntansha) SUZUKI Kenji  The University of Tokyo, Lecturer, 大学院・工学系研究科, 講師 (50251351)
FUKUDA Katusmi  The University of Tokyo, Assistant, 大学院・工学系研究科, 助手 (20134471)
HASUIKE Akira  The University of Tokyo, Assistant, 大学院・工学系研究科, 助手 (20010861)
Project Period (FY) 1995 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥13,200,000 (Direct Cost: ¥13,200,000)
Fiscal Year 1997: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 1996: ¥2,400,000 (Direct Cost: ¥2,400,000)
Fiscal Year 1995: ¥10,200,000 (Direct Cost: ¥10,200,000)
Keywordsnano-indentation / Hard coating / Atomic force microscope / AFM / ナノインデンター / 表面評価
Research Abstract

We developed a system in which Atomic force microscope and nano-indentationtester are connected effectively so that the hardness measurement is carried out quickly and systematically. Then the nanoindentation hardness of TiN coating substrate has been measured at room temperature using the indentation type tester for the surface property. The hardness of the coating was measured by atomic force microscope. From this experiment the following conclusions are drawn :
1) As the load increased, the depth is also increased. For 5gf load, the depth is about 1 mum.
2) The dynamic hardness tends to increase with the decrease of indentation load.
3) When the indentation load is very high (in case of 100gf), cracks are observed into the indentation.

Report

(4 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • Research Products

    (6 results)

All Other

All Publications (6 results)

  • [Publications] 福田 勝己, 加藤 孝久: "TiN膜の超微小硬さ" 日本機械学会機素潤滑設計部門100周年記念講演会講演論文集. 656-661 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 福田 勝己, 加藤 孝久: "TiN膜/鋼基材の超微小硬さに及ぼす膜厚さ影響" 日本機械学会創立100周年・九州支部創立50周年記念講演会講演論文集. 356-358 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Fukuda and T.Kato: "Nanoindentation Hardness of TiN Coating" Prepr.JSME.IMPT-100. 655-661 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Fukuda and T.Kato: "Effect of Film Thickness on Nanoindentation Hardness of TiN Coating on Steel Surface" Prepr.JSME. 978-2. 356-358 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 福田勝己, 加藤孝久: "TiN膜の超微小硬さ" 日本機械学会機素潤滑設計部門100周年記念講演会講演論文集. 656-661 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 福田勝己, 加藤孝久: "TiN膜/鋼基材の超微小硬さに及ぼす膜厚さの影響" 日本機械学会創立100周年・九州支部創立50周年記念講演会講演論文集. 356-358 (1997)

    • Related Report
      1997 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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