Trial Study of Ultra-Precision Magnetic Bearing
| Project/Area Number |
07555051
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 試験 |
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| Research Field |
設計工学・機械要素・トライボロジー
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
SHIMOKOHBE Akira Precision and Intelligence Laboratory, Tokyo Institute of Technology, Professor, 精密工学研究所, 教授 (40016796)
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| Co-Investigator(Kenkyū-buntansha) |
唐 東雷 (株)東京精密, 中国室, (研究職)
MORIYAMA Shigeo Central Research laboratory, Hitachi Ltd., Senior Researcher, 中央研究所, 主任研究員
SHINSHI Tadahiko Precision and Intelligence Laboratory, Tokyo Institute of Technology, Research A, 精密工学研究所, 助手 (60272720)
SATO Kaiji Precision and Intelligence Laboratory, Tokyo Institute of Technology, Associate, 精密工学研究所, 助教授 (00215766)
TANG Donglei Tokyo Seimitsu Co.Ltd., Researcher
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| Project Period (FY) |
1995 – 1996
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| Project Status |
Completed (Fiscal Year 1996)
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| Budget Amount *help |
¥15,800,000 (Direct Cost: ¥15,800,000)
Fiscal Year 1996: ¥6,300,000 (Direct Cost: ¥6,300,000)
Fiscal Year 1995: ¥9,500,000 (Direct Cost: ¥9,500,000)
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| Keywords | Magnetic Bearing / Optimal Control / Repetitive Control / Profile Error / Rotational Accuracy / Positioning Accuracy / 静電容量型変位計 / モデルの同定 |
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| Research Abstract |
Magnetic bearings are not accurate enough for precision equipment. In this study, first, a two-degree-of-freedom magnetic bearing with an optimal state feedback controller is introduced Eddy current displacement sensors and capacitance micrometer are used as feedback sensors. The positioning accuracy is 15nm when the axis does not rotate. Then, to improve the rotational accuracy, a repetitive controller is added to the bearing. The rotational error with the optimal and repetitive controllers is 250nm at 120rpm which is caused by the profile error of the axis and by the arrangement of the sensors and electromagnets.
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Report
(3 results)
Research Products
(7 results)
