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Development of Temperature Measurement Method in Micro-Scale Region by using Atomic Force Microscope.

Research Project

Project/Area Number 07555069
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field Thermal engineering
Research InstitutionTokyo Institute of Technology

Principal Investigator

HIJIKATA Kunio  Tokyo Institute of Technology, Department of Mechano-Aerospace Engineering, Professor, 工学部, 教授 (60016582)

Co-Investigator(Kenkyū-buntansha) HIRASAWA Shigeki  Hitachi Ltd.Mechanical Engineering Research Laboratory, Senior Researcher, 機械研究所, 主任研究員
NAKABEPPU Osamu  The University of Tokyo, Department of Engineering, Research Associate, 大学院工学系研究科, 助手 (50227873)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥13,300,000 (Direct Cost: ¥13,300,000)
Fiscal Year 1996: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1995: ¥11,000,000 (Direct Cost: ¥11,000,000)
KeywordsAtomic Force Microscope / Temperature Measurement / Thermal Properties / Point Contact / micro-thermocouple / Heat Transfer
Research Abstract

With a remarkable progress in science and technology, to make clear heat transfer characteristics in a microscopic scale is becoming great important issue. The purpose of this study is to develop a new technique for a micro-scale thermal measurement with AFM (Atomic Force Microscope) Which exceeds ordinary small scale temperature measurement techniques.
In the project, special thermocouple (T.C.) probes and electric conductive probes were made as a cantilever for AFM.The T.C.probe composed of 25 micrometer sharpen nickel wire and 30 nano-meter gold deposition film has a junction of about 5 micrometer at a tip of the probe. The electric probe has same structure as the T.C.probe and made of gold wire and gold film.
By making point contact between the probes and conductive sample or heated nonconductive sample, the contact condition has been clarified, such as contact radius, deformation mode and electron transport mode. Electric and thermal measurement of the point contact condition indicates the contact radius of about 10 nano-meter and a few nano-meter, respectively. These small contact scale has possibility of accomplishing thermal measurement with high spatial resolution.
By scanning the T.C.probe on tiny heated sample, temperature distribution with 30 micrometer and a few micrometer resolution were sttained in 760 Torr and 0.02 Torr atmosphere. Since heat transfer through the contacting point is much smaller than that throughair, low pressure condition leads small thermal signal. For measurement with higher resolution it is important to reduce the T.C.junction size.
The thermal measurement technique was applied to measure physical properties of a composite material sample of a Carbon Fiber Reinforced Plastic (CFRP) composed of epoxy resin and carbon fiber. By selecting suitable thickness of the sample, clear contrast of both electrical and thermal conductivity of the different materials was measured with sub-micron scale under vacuum condition.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (7 results)

All Other

All Publications (7 results)

  • [Publications] 中別府修: "原子間力走査型顕微鏡を用いた微小スケール温度場の計測" 日本機械学会論文集(B編). 62. 284-290 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 中別府修: "原子間力顕微鏡を用いた微小領域の熱計測" Thermophysical Propaties 17,The Seventeenth Japan Symposium. 51-54 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Osamu Nakabeppu, Kunio Hijikata, Madhavi Chandrachood, Jie Lai, Arun Majumdar: "Microscale Temperature Measurement using an Atomic Force Microscope" Transaction of the Japan Society of Mechanical Engineers B.62-593. 284-290 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Osamu Nakabeppu, Kunio Hijikata, Masanobu Igeta, Arun Majumdar: "Themal Measurement in Micro-Scale Region using the Atomic Force Microscope" Thermophysical Propaties 17. 51-54 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 中別府 修: "原子間力走査型顕微鏡を用いた微小スケール温度場の計測" 日本機械学会論文集(B編). 62. 284-290 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 中別府 修: "原子間力顕微鏡を用いた微小領域の熱計測" Thermophysical Propaties 17,The Seventeenth Japan Symposium. 51-54 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 中別府 修: "原子間力走査型顕微鏡を用いた微小スケール温度場の計測" 日本機械学会論文集(B編). 62. 284-290 (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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