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DEVELOPMENT OF FIBER-SENSORS FOR DENSITY USING A MICROMACHINING TECHNIQUE

Research Project

Project/Area Number 07555080
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Dynamics/Control
Research InstitutionGIFU NATIONAL COLLEGE OF TECHNOLOGY

Principal Investigator

INABA Seiki  GIFU NATIONAL COLLEGE OF TECHNOLOGY,PROFESSOR, 電気工学科, 教授 (30110183)

Co-Investigator(Kenkyū-buntansha) HANE Kazuhoro  TOHOKU UNIVERSITY,FACULTY OF ENGINEERING,PROFESSOR, 工学部, 教授 (50164893)
KUMAZAKI Hironori  GIFU NATIONAL COLLEGE OF TECHNOLOGY,ASSOCITE PROFESSOR, 電気工学科, 助教授 (70270262)
Project Period (FY) 1995 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1997: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1996: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 1995: ¥1,000,000 (Direct Cost: ¥1,000,000)
KeywordsPhotothermal Vibration / Pressure Sensor / Optical Fiber / Micromachine / Density Sensor / Viscosity Sensor / 光ファイバ
Research Abstract

In order to develop laser-driven fiber sensors for gaseous or liquid density using a micromachinig technique, following studies have been carried out.
1) A microccantilever rod comprised of the quartz core was fabricated by etching the clad layr from the optical fiber tip, and was vibrated photothermally using a laser diode. Optical systemd are simple compared with previous works, and may be useful for measurement of quatntities such as pressure, densiity, and viscosity. The complicated optical adjustment is unnecessary for accurate measurements in this system. The vibratiion of the quartz cantilever is stable and reproducible. The fluctuation of the resonance frequency is within 1 Hz.
2) Effect of cantilver size of laser-driven fiber core was discussed.
3) In order to develop fiber sensors for liquid density or liquid viscosity, resonance characteristics of photothermal vibration in liquid were measured.
4) Detection including optical systems and computer systems were developed.

Report

(4 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • Research Products

    (45 results)

All Other

All Publications (45 results)

  • [Publications] 熊崎 裕教: "光ファイバのコアの光熱振動を利用した圧力センサー" 真空. 38・3. 176-179 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Inaba: "Photothermal vibration of fiber core for vibration type sensor" Jpn.J.Appl.Phys.14・4A. 2018-2021 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Hane: "Photothermal and photoacoustic effects in optical sensor" Tech Digest.13th Sensor Symp.117-120 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Photomechanical sensor using a photothermal vibration of an optical fiber in liquid" Tech.Digest.13th Sensor Symp.41-44 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Temperature characteristics of vibration type sensor using micromachined optical fiber-tip" Opt.Rev.30・2. 135-138 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber" Vacunm. 47・6. 475-477 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Optical sensor for deposition thickness using microcantilever fabricated from optical fiber" Preceed.11th Int.Conf.Opt.Fiber Sensor. 220-223 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Deposition thickness sensor for ion sputtering apparatus" T.IEE.Jappan. 117E・2. 105-108 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 熊崎 裕教: "膜圧測定のためのレーザ駆動ファイバコア振動子のサイズ効果" 真空. 40・3. 303-305 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 熊崎 裕教: "FCコネクタ装着型薄板ガラス振動子を用いた光学式膜厚測定" 真空. 41・3(印刷中). (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Pressure Sensor usng the photothermal vibration of optical fiber core" J.Vac.Soc.Jpn.Vol.38, No.3. 176-178 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Inaba: "Photothermal vibration of fiber core for vibration-type sensor" Jpn.J.Appl.Phys. Vol.34, No.4. 2018-2021 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Photomechanical sensor using a photothermal vibration of an optical fiber in liquid" Technical Digest 13th Sensor Symp. 41-44 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Hane: "Photothermal and photoacoustic effects in optical sensors" Technical Digest 13th Sensor Symp. 117-120 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Temperature characteristics of vibratin type sensor using micromachined optical fiber-tip" Opt.Rev. Vol.30, No.2. 135-138 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber" Vacuum. Vol.47No.6-8. 475-477 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Optical sensor for deposition thickness using microcantilever fabricated from optical fiber" Proceed.11th Int.Conf.Opt.Fiber sensor. 220-223 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Deposition thickness sensor for ion sputtering apparatus" T.IEE Japan. Vol.117-E,No.2. 105-108 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Size effect of the laser-driven microcantilever fabricated from optical fiver core for measuring deposition thickness" J.Vac.Soc.Jpn. Vol.40, No.3. 303-305 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] H.Kumazaki: "Optical measurement for deposition thickness using a thin glass vibrator installed in FC connector" J.Vac.Soc.Jpn. Vol.41, No.3(in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 熊〓裕教: "光ファイバのコアの光熱振動を利用した圧力センサー" 真空. 38・3. 176-179 (1995)

    • Related Report
      1997 Annual Research Report
  • [Publications] S.Inaba: "Photothermal Vibrdtion of fiber core for vibration type sensor" Jpn.J.Appl.Phys.14・4A. 2018-2021 (1995)

    • Related Report
      1997 Annual Research Report
  • [Publications] K.Hane: "Photothermal and Photoacoustic effects in optical sensor" Tech.Digest.13th Sensor Symp.117-120 (1995)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Kumazaki: "Photomechanical sensor using a photothermal vibration of an optical fiber in liquid" Ted.Digese.13th Sensor Symp.41-44 (1995)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Kumazaki: "Temperature characteristics of vibration type sensor using micromachined optical fiber-tip" Opt.Rev.30・2. 135-138 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Kumazaki: "Pressure dependence of resonance characteristics of the microcantilever fabricated from optical-fiber" Vacuum. 47・6. 475-477 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Kumazaki: "Optical sensor for deposition thickness using microcantilever fabricated from optical fiber" Proceed.11th Int.Conf.Opt.Fiber Sensor. 220-223 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] H.Kumazaki: "Deposition thickness sensor for ion sputtering apparatus" T.IEE.Japan. 117E・2. 105-108 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 熊〓裕教: "膜厚測定のためのレーザ駆動ファイバコア振動子のサイズ効果" 真空. 40・3. 303-305 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 熊〓裕教: "FCコネクタ装着型薄板ガラス振動子を用いた光学式膜厚測定" 真空. 41・3(印刷中). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 熊崎裕教: "光ファイバのコアの光熱振動を利用した圧力センサー" 真空. 38・3. 176-179 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Inaba: "Photothermal vidration of fiber core for vibrntion type sensor" JPN.J.Appl.Phys.J4.4P. 2018-2021 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] K,Hane: "Photothermal and Photoacoustic effcts in optical sensor" Tech.Digest,13th Sensor Symp.117-120 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Kumazaki: "Photomechanical sensor using a photothermal vibration of an optical fiber in liquid" Ted.Digest.13th Sensor Symp.41-44 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Kumazaki: "Temperature characteristics of vibration type sensor using micromachined optical fiber-tip" OPT.Rev.30・2. 135-138 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Kumazaki: "Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber" Vacuum. 47・6. 475-477 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Kumazaki: "Optical sensor for deposition thickness using microcantilever fabricated from optical fiber" Proceed.11th Int.Conf.Opt.Fiber Sensor. 220-223 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Kumazaki: "Deposition thickness sensor for ion spnttering apparatng" T.IEE.Japan. 117E・2. 105-108 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 熊崎裕教: "膜厚測定のためのレーザ駆動ファイバコア振動子のサイズ効果" 真空. 40・3(印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 熊崎裕教: "光ファイバのコアの光熱振動を利用した圧力センサー" 真空. 38. 176-178 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] S. Inaba: "Photothermal vibration of fiber core for vibration-type sensor" Jpn. J. Appl. Phys.34. 2018-2021 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K. Hane: "Photothermal and Photoacoustic effects in optical sensors" Tech. Digest 13th Sens. Symp.117-120 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H. Kumazaki: "Photomechanical sensor using a photothermal vibration of an optical fiber in liquid" Tech. Digest 13th Sens. Symp.41-44 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H. Kumazaki: "Temperature characteristics of vibrating type sensor using micromachined optical fiber-tip" Opt. Rev.((印刷中))

    • Related Report
      1995 Annual Research Report
  • [Publications] H. Kumazaki: "Pressure dependence of resonance characteristics of the microcantilever fabricated from optical fiber" Vacuum. ((印刷中))

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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