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Research on Blue Semiconductor Lasers Based on MOCVD

Research Project

Project/Area Number 07555094
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionHOKKAIDO UNIVERSITY

Principal Investigator

SUEMUNE Ikuo  Hokkaido Univ., Research Institute for Electronic Science, Professor, 電子科学研究所, 教授 (00112178)

Co-Investigator(Kenkyū-buntansha) KURIHARA Kei  Trichemical Laboratory, Researcher, 研究員
UESUGI Katsuhiro  Hokkaido Univ., Research Institute for Electronic Science, Research Associate, 電子科学研究所, 助手 (70261352)
NUMAI Takahiro  Hokkaido Univ., Research Institute for Electronic Science, Associate Professor, 電子科学研究所, 助教授 (60261351)
Project Period (FY) 1995 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥11,100,000 (Direct Cost: ¥11,100,000)
Fiscal Year 1997: ¥2,400,000 (Direct Cost: ¥2,400,000)
Fiscal Year 1996: ¥3,800,000 (Direct Cost: ¥3,800,000)
Fiscal Year 1995: ¥4,900,000 (Direct Cost: ¥4,900,000)
Keywordsblue semiconductor lasers / MOCVD / p-type conductivity / MOMBE / Nitrogen plasma / band offset / ハンド不連続
Research Abstract

Realization of blue semiconductor lasers is highly requested for high-density data storage and for full-color displays. II-VI semiconductors and GaN-based widegap semiconductors are actively studied for this purpose. This project was performed to establish the basis for realizing such blue lasers based on the II-VI semiconductors. MOCVD is the key technology for mass production of optical devices, but the p-type doping in ZnSe based heterostructures is the remaining serious problem. We have analyzed the doping problem with an amphoteric native defect model and could give reasonable interpretation to the reported measurements. From this result, we found the growth temperature can be one of the key factor for realizing higher p-type doping, which is also consistent with the existing reports with different growth methods. We also demonstrated a new doping method based on the periodic submonolayr insertion of ZnTe : Li, and the net acceptor concentration above 1x10^<18>cm^<-3> could be realized in ZnSe. Although ZnTe is highly mismatched to ZnSe and misfit dislocations may be induced, the similar scheme of doping GaAs : Zn in ZnSe is also effective for this problem. From these results, the doping issue for the MOCVD growth of II-VI blue semiconductor lasers will be cleared.
Increase of the band offset in II-VI heterostructures is another key issue to prevent leakage currents in laser diodes. For this purpose, we proposed the use of short period MgS/ZnSe superlattices and demonstrated the high barrier height with photoluminescence and XPS measurements. Self-organized dot formation was also demonstrated, which will reduce the threshold current for the laser operations. By the combination of these fruitful results in this project, realization of high-performance blue semiconductor lasers can be expected.

Report

(4 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • Research Products

    (34 results)

All Other

All Publications (34 results)

  • [Publications] K.Hirano, I.Sueimune, etal: "On p-Type Doping Limits in ZnMgSSe and ZnSSe Compound Semiconductors." Jpn. J. Appl. phys.Vol.36 No1A/B. L37-L40 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M. Arita, I.Suemune, etal: "Solf-Organized CdSe Quantum Dats on(100)ZnSel Gats Surfaces Grown by Metalorganic Molecular Beam Epitaxy" Jpn.J.Appl.phys.Vol.36 No.6B. 4097-4101 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] I.Suemune, K.Vesugi, et.al: "Low-dimensional II-VI Semiconductor Structures:ZnSe/MgS Saperlattices and CdSe Self-organized Dots." Phys.Stat.Sol.(b). Vol.202. 845-856 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Arita, I.Suemune, et.al: "CdSe Quantum Dots Formation on(100)ZnSe/GaAs Surfaces." Nonlinear Optics. Vol.18 No.2-4. 99-102 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Tawara, I.Suemune, et.al: "ZnSe/ZnS Distributed Bragg Reflectors in Blue Region Grown on (311)B GaAs Substrates" Jpn.J.Appl.Phys. Vol.36 No.11. 6672-6676 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] I.Suemune, T.Tawara, et.al: "Stability of CdSe and ZnSe Dots Self-organized on Semiconductor Surfaces" Appl.Phys.Lett.Vol.71 No.26. 3886-3888 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] I.Suemune(分担執筆): "Properties of Widegap II-VI Semiconductors." Ramesh Bhargava, IEE EMIS, 250 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Hirano, G.Sato, and I.Suemune: "On p-Type Doping Limits in ZnMgSSe and ZnSSe Compound Semiconductors" Jpn.J.Appl.Phys.Vol.36, No.1A/B. L37-L40 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Arita, A.Avramescu, K.Uesugi, I.Suemune, T.Numai, H.Machida, and N.Shimoyama: "Self-Organized CdSe Quantum Dots on (100) ZnSe/GaAs Surfaces Grown by Metalorganic Molecular Beam Epitaxy" Jpn.J.Appl.Phys.Vol.36, No.6B. 4097-4101 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] I.Suemune, K.Uesugi, H.Suzuki, H.Nashiki, and M.Arita: "Low-dimensional II-VI Semiconductor Structures : ZnSe/MgS Superlattices and CdSe Self-organized Dots" Phys.Stat.Sol.(b). Vol.202. 845-856 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Arita, I.Suemune, A.Avramescu, and K.Uesugi: "CdSe Quantum Dots Formation on (100) ZnSe/GaAs Surfaces" Nonlinear Optics. Vol.18, No.2-4. 99-102 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Tawara, M.Arita, K.Uesugi, and I.Suemune: "ZnSe/ZnS Distributed Bragg Reflectors in Blue Region Grown on (311) B GaAs Substrates" Jpn.J.Appl.Phys.Vol.36, No.11. 6672-6676 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] I.Suemune, T.Tawara, T.Saitoh, and K.Uesugi: "Stability of CdSe and ZnSe Dots Self-organized on Semiconductor Surfaces" Appl.Phys.Lett.Vol.71, No.26. 3886-3888 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] I.Suemune: Properties of widegap II-VI semiconductors. edited by Ramesh Bhagava, IEE EMIS, (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Hirono, I.Suemune, et.al: "On p-Type Doping Limits in ZnMgSSe and ZnSSe Conpound Semiconductors" Jpan.J.Appl.Phys.Vol.36,No.1A/B. L37-L40 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Arita, I.Suemune, et.al: "Self-Crganized CdSe Quantum Dats on (100) ZnSe/GaAs Surfaces Grown by Metalorganic Molecular Beam Epitaxy" Jpn.J.Appl.Phys.Vol.36,No.6B. 4097-4101 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] I.Suemune, K.Uesugi, et.al.: "Low-dimensional II-VI Semiconductor Structures:ZnSe/MgS Superlattices and CdSe Self-crganized Dcts." Phys.Stat.Sol.(b). Vol.202. 845-856 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Arita, I.Suemune, et.al.: "CdSe Quantum Dots Formation on (100) ZnSe/GaAs Surfaces." Nonlinear Optics. Vol.18、No.2-4. 99-102 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] T.Tawara, I.Suemune, et.al.: "ZnSe/ZnS Distributed Bragg Reflectors in Blue Region Grown on (311) B GaAs Substrates" Jpn.J.Appl.Phys.Vol.36,No.11. 6672-6676 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] I.Suemune, T.Tawara, et.al.: "Stability of CdSe and ZnSe Dots Self-organized on Semiconducter Surfaces" Appl.Phys.Lett.Vol.71,No.26. 3886-3888 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] I.Suemune(分担執筆): "Properties of Widegap II-VI Semiconductors." Ramesh Bhargava,IEE EMIS, 250 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] G. Sato: "″Metalorganic MBE Growth of Nitrogen-doped ZnSe : TAN Doping and Nitrogen Plasma Doping″" Jpn. J. Appl. Phys.Vol.35 No. 2B. 1436-1439 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Uesugi: "″Initial Growth Processes of ZnSe on Cleaned GaAs (001) Sufaces by Metal Organic Vapor Phase Epitaxy″" Japan. J. Appl. Phys.Vol. 35. No. 8A. L1006-L1008 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] I. Suemune: "″Growth of Zincblende MgS/ZnSe Superlattices and Their Hetero Interface Properties″" J. Cryst. Growth. Vol. 170. 480-484 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Hirano: "″On p-Type Doping Limits in ZnMgSSe and ZnSSe Compound Semiconductors″" Jpn. J. Appl. Phys. Vol. 36 No. 1A/B. L37-L40 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 星山満雄: "MOMBE成長窒素ドープp型ZnSeのC-V測定による評価" 電気学会誌. 117巻1号. 78-83 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] H. Nashiki: "Luminescence of Excitons Localized by Monolayer Interface Fluctuations in ZnSe/MgS Superlattices Grown by Metalorganic Vapor Phase Epitaxy" Jpn. J. Appl. Phys. 印刷中. (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] I. Suemune(分担執筆): "″Properties of III-V Quantum Wells and Superlatticas″" Edited by P. Battacharya, IEEEMIS, 400 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S. Shogen: "XPS and AFM Analysis of GaAs(100) Cleaning Procedures" J. Vac. Sci. Technol.B. 13. 77-82 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] G. Sato: "MOMBE Growth of ZnSe with New Zn and Se Precursors Without Precracking" J. Cryst. Growth. 150. 734-737 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T. Obinata: "Temperature Dependence of ZnS Growth with Atmospheric Pressure Metalorganic Vapor Phase Epitaxy Using Diteriarybutyl Sulfide" Jpn. J. Appl. Phys.34. 4143-4147 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M. Dabbico: "Exciton-phonon Coupling in ZnSe/ZnSSe Multiple Quantum-well Structures" Advances in Science and Technology.11. 331-338 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K. Uesugi: "Epitaxial Growth of Znicblende ZnSe/MgS Superlattices on (001)GaAs" Appl. Phys. Lett.(印刷中).

    • Related Report
      1995 Annual Research Report
  • [Publications] G. Sato: "Metalorganic MBE Growth of Nitrogen-doped ZnSe-TAN Doping and Nitrogen Plasma Doping" Jpn. J. Appl. Phys.(印刷中).

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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