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New growth technology of oxide films "Eclipse PLD method"

Research Project

Project/Area Number 07555101
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field Electronic materials/Electric materials
Research InstitutionOsaka University

Principal Investigator

KOBAYASHI Takeshi  Osaka University, Faculty of Engineering Science Professor, 基礎工学部, 教授 (80153617)

Co-Investigator(Kenkyū-buntansha) YAMAMOTO Yoshihiro  Solar energy conversion lab.Sharp co.Leader, 課長
TOMITA Takashi  Solar energy conversion lab.Sharp co.Director, 部長
MAKI Tetsuro  Osaka University, Faculty of Engineering Science Assistant, 基礎工学部, 助手 (80273605)
FUJII Tatsuhiko  Osaka University, Faculty of Engineering Science Assistant, 基礎工学部, 助手 (40238530)
SAKUTA Ken  Osaka University, Faculty of Engineering Science Lecturer, 基礎工学部, 講師 (70221273)
野元 克彦  シャープエネルギー変換研究所, 係長(研究員)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥11,700,000 (Direct Cost: ¥11,700,000)
Fiscal Year 1996: ¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 1995: ¥9,000,000 (Direct Cost: ¥9,000,000)
KeywordsPLD / laser ablation / oxide film / ferroelectric / electrooptic / 光エレクトロニクス / 結晶成長 / エキシマ・レーザー / 光回路 / エピタキシャル成長 / ヘテロ構造
Research Abstract

In this project work, an Eclipse Laser Ablation Method which was proposed by us has been studied and improved earnestly. This method is characterized by the dominant particle diffusion during transport. As a result, a problem of "droplet" is completely overcome. This new method is now widely used by several domestic and foreign organizations.
Magnetic film, ferroelectric film, electro-optic film, superconducting film were well prepared using this method, and we have further developed more-advanced PLD technique named Eclipse-Angel. After this research period, we will concentrate our study on this advanced technology

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (20 results)

All Other

All Publications (20 results)

  • [Publications] M. Tachiki: "Thin film growth of SrBiTiO system by PLD method and optical characterization" Int. Workshop on Oxide Electron.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S. Tomohisa: "Morphological diagnosis of epitaxial YBCO film grown by eclipse laser ablation method" ISEC'95. 246-248

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M. Tachiki: "Heteroepitaxial growth of SrBiTiO/BiSrCuO structure by ArF excimer laser ablation" Jpn. J. Appl. Phys.34, 9. L1145-L1147

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 小林 猛: "粒子拡散を利用する新しいレーザーアブレーション薄膜形成" レーザー研究. 23. 380-388

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M. Tachiki: "Optical characterization of PLD grown SrBiTiO thin films" Jpn. J. Appl. Phys.35, 6. L719-L721

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S. Tomohisa: "Morphological Study of YBaCuO Thin Films Grown by Excimer Laser Ablation Method" IEICE Trans. C. E79-C. 1264-1268

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Tachiki, T.Kobayashi: "Thin film growth of SrBiTiO" Int.Workshop on Oxide.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Tomohisa, T.Kobayashi: "Morphological diagnosis of epitaxial YBCO film grown by eclipse laser ablation" Int.Supercon.Electron.Conf.246-248 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Tachiki, T.Kobayashi: "Heteroepitaxial growth of SrBiTiO/BiSrCuO structure by ArF excimer laser abla" Jpn.J.Appl.Phys.34. L1145-L1147 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kobayashi: "New laser ablation method based on dominant particle diffusion" Laser-kenkyu. 23. 380-388 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Tachiki, T.Kobayashi: "Optical characterization of PLD grown SrBiTiO thin films" Jpn.J.Appl.Phys.35. L719-L721 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Tomohisa, T.Kobayashi: "Morphological study of YB CO thin films grown by excimer laser ablation method" IEICE Trans.C. E79-C. 1264-1268 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kobayashi: "Improved Laser Atlation Method(Eclipse Mettod)for Use to High Quality Thin Film Growth" European MRS(ドイツ・ストラ-スブルグ). (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Tachiki: "Optical Characterigation of PLD Grown SrBiTiO Thin Films" Jpn.J.Appl.Phys.35(6A). L719-L721 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] S.Tomohisa: "Morphological Study of YBaCuO Thin Films Grown by Excimer Laser Ablation Method" 電子情報通信学会英文誌. E97-C. 1264-1268 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 小林猛: "粒子拡散を利用する新しいレーザーアブレーション薄膜形成(エクリプス法)" レーザー研究. 23. 380-388 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 立木実: "新しいレーザーアブレーション法(エクリプスPLD法)" O Plus E. 189. 61-66 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Minoru Tachiki: "Heteroepitaxial Growth of SrBiTiO/BiSrCuO Structure by ArF Excimer Laser Ablation" Jpn.J.Appl.Phys.34. L1145-L1147 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Shingo Tomohisa: "Morphological Study of Epitaxial YBCO Films Grown by Eclipse Deposition" Int.Super.Elec.Conf. 453-455 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Minoru Tachiki: "A Novel Heterojunction of SrBiTiO/BiSrCsCuO for MIS Application" Int.Super.Elec.Conf. 246-248 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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