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Development of MOS Capacitor Dissolved Oxygen Sensor for Use in High-Temperature Solutions

Research Project

Project/Area Number 07555214
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section試験
Research Field Material processing/treatments
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

HARA Nobuyoshi  Faculty of Engineering, Tohoku University Associate professor, 工学部, 助教授 (40111257)

Co-Investigator(Kenkyū-buntansha) AKAO Noboru  Faculty of Engineering, Tohoku University Research assistant, 工学部, 助手 (80222503)
SUGIMOTO Katsuhisa  Faculty of Engineering, Tohoku University Professor, 工学部, 教授 (80005397)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥7,400,000 (Direct Cost: ¥7,400,000)
Fiscal Year 1996: ¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1995: ¥5,500,000 (Direct Cost: ¥5,500,000)
KeywordsDissolved oxygen sensor / High temperature aqueous solution / MOS capacitor / EOS capacitor / Corrosion potential / 溶存酵素センサ / 貴金属
Research Abstract

New dissolved oxygen sensors based on metal-oxide-semiconductor (MOS) and electrolyte-oxide-semiconductor (EOS) devices have been developed for the measurement of oxygen concentration in high-temperature and high-pressure aqueous solutions. The results are summarized as follows ;
1. The system that can be served for the measurement of response characteristics of MOS and EOS capacitor sensors at elevated temperatures was designed and constructed.
2. Pt-PtO_x electrodes displayd a rapid response to changes in O_2 concentration and had a high resistance against corrosion at elevated temperatures.
3. The porous Pt-MOS capacitor sensor fabricated using a single crystal silicon as a semiconductor showed a linear relationship between the response voltage and log [DO concentration] at temperatures of 303-363K.However, this sensor suffered from cracking at temperatures above 423K.
4. The Pt-EOS sensor combining a bulk Pt electrode with a semiconductor electrode of TiO_2 single crystal displayd the same DO response characteristics as the Pt-MOS sensor, and had a good stability even at temperatures above 423K.
5. Calibration curves, which provide the relationships between the DO concentration and the response voltage of the Pt-EOS sensor, were obtained.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (2 results)

All Other

All Publications (2 results)

  • [Publications] 原 信義: "半導体デバイス型DHおよびDOセンサ" まてりあ. 34. 1221-1226 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Nobuyoshi Hara: "Dissolved Hydrogen and Oxygen Sensors Using Semiconductor Devices" Materia Japan. 34. 1221-1226 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary

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Published: 1995-04-01   Modified: 2016-04-21  

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