| Project/Area Number |
07555225
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 試験 |
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| Research Field |
Metal making engineering
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| Research Institution | Tohoku University |
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Principal Investigator |
SATO Nobuaki Institute for Advanced Materials Processing, Tohoku University Associate Professor, 素材工学研究所, 助教授 (70154078)
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| Co-Investigator(Kenkyū-buntansha) |
YAMADA Kohta Institute for Advanced Materials Processing, Tohoku University Research Associat, 素材工学研究所, 助手 (30261473)
FUJINO Takeo Institute for Advanced Materials Processing, Tohoku University Professor, 素材工学研究所, 教授 (20229024)
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| Project Period (FY) |
1995 – 1996
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| Project Status |
Completed (Fiscal Year 1996)
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| Budget Amount *help |
¥18,400,000 (Direct Cost: ¥18,400,000)
Fiscal Year 1996: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 1995: ¥14,200,000 (Direct Cost: ¥14,200,000)
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| Keywords | Pulse laser / Advanced materials / Thin film / Oxide / Sulfide / Multi-layred film |
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| Research Abstract |
Trial manufacture of Synthetic apparatus for nano scale layred advanced materials by pulse laser was made. In this Physical year, a deposition monitor was set in a high vacuum reaction chamber which was manufactured in last year. This system enables in situ measurement of the thickness of film deposited on a substrate by laser ablation reaction. Synthesis of multi-layred film materials was examined by repeating the ablation reactions using targets of different compounds, such as metal, oxide and sulfide. Pellets of Ta and Ta_2O_5 were used as target. The Nd : YAG pulse laser with wavelength 10.64 nm was used as a laser light source. First, deposition of metallic Ta or Ta_2O_5 film on substrate was examined by pulse laser ablation using Ta or Ta_2O_5, respectively. SEM observation and EPMA analysis of the obtained films were made. The thickness of film varied from the order of nm to mum by changing pulse frequency from 1Hz to 100 Hz. The layred thin film which has a layr structure of metal-oxide-metal-oxide was obtained when the laser ablation was applied on the different targets alternately. Furthermore, It was also found that film thickness of different materials of layred film was controlled by changing repetition cycles of laser irradiation on each target. Structures and compositions of oxide films odtained by laser ablation of oxide target and by oxidation of metal film were compared
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