| Project/Area Number |
07555235
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 試験 |
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| Research Field |
化学工学一般
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| Research Institution | Kanazawa University |
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Principal Investigator |
EMI Hitoshi Kanazawa University, Faculty of Engineering, Professor, 工学部, 教授 (90025966)
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| Co-Investigator(Kenkyū-buntansha) |
ADACHI Motoaki Osaka Prefectural University, Institute of Advanced Sciences, Assistant Professo, 先端研究所, 講師 (40100177)
OKUYAMA Kikuo Hiroshima University, Faculty of Engineering, Professor, 工学部, 教授 (00101197)
OTANI Yoshio Kanazawa University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (10152175)
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| Project Period (FY) |
1995 – 1996
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| Project Status |
Completed (Fiscal Year 1996)
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| Budget Amount *help |
¥8,700,000 (Direct Cost: ¥8,700,000)
Fiscal Year 1996: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1995: ¥6,700,000 (Direct Cost: ¥6,700,000)
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| Keywords | Volatile organic compound (VOC) / Carbon Tetrachloride / Ionization / Nucleation / Electrostatic separation / Corona discharge / Condensation growth / イオン核生成 / 揮発性有機物質(VOC) / α線源イオナイザー |
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| Research Abstract |
In semiconductor manufacturing process, various kinds of volatile organic solvents are used for cleaning wafer surfaces and the recovery for these solvents from the atmosphere is of great concern. In the present work, we aimed at developing recovery system of CCl_4 vapor with the concentration of ppm level. CCl_4 vapor is ionized by corona discharge and grown to particles by ion-induced nucleation and then removed by electrostatic precipitation. We designed i) sonic jet ionizer, ii) ion-induced nucleation chamber, and iii) electrostatic precipitator, and studied the individual performances as well as the recovery system assembled with these appratuses. As a result, it was shown that i) the sonic jet ionizer is capable of generating high density ions, ii) CCl_4 ions grew to submicron particles by the condensation of water vapor, and iii) the grown particles can be completely removed by the electrostatic precipitator. Further, the recovery system assembled with these apparatuses was found to be effective for the removal of CCl_4 when it exists in air as a single component. Further work is required to elucidate the influence of other coexisting vapors on the removal efficiency of CCl_4.
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