• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of the glancing-incidence and glancing-takeoff X-ray fluorescence apparatus for surface an analysis

Research Project

Project/Area Number 07555260
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field 工業分析化学
Research InstitutionTohoku University

Principal Investigator

TSUJI Kouichi  Tohoku Univ., Institute for Material Research, Res.Associate, 金属材料研究所, 助手 (30241566)

Co-Investigator(Kenkyū-buntansha) UTAKA Tadashi  Rigaku Denki Co., R&D Dept., General Manager, 研究開発部, 部長
広川 吉之助  東北大学, 金属材料研究所, 教授 (00005852)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥11,600,000 (Direct Cost: ¥11,600,000)
Fiscal Year 1996: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 1995: ¥10,800,000 (Direct Cost: ¥10,800,000)
Keywordsx-ray total reflection / x-ray fluorescence / surface aralysis / thin-film aralysis / surface density / depth profiling / glancing-incidence / glancing-takeoff / 斜入射・斜出射 / 表面回折
Research Abstract

A glancing-incidence and glancing-takeoff x-ray analytical apparatus was developed in cooperation with researchers of companies. This apparatus have a monocrometer of W/C multilayr. Both the incident angle (phi) of the primary x-rays and the takeoff angle (chi) of the fluorescent x-rays are controlled around the critical angles of total reflection (several mrad) with precise goniometers. Moreover, the azimuth angle between the incident x-ray beam and the detected fluorescent x-ray beam can be changed with a 2rheta circle stage, and rotation of the sample stage is also possible with a rheta circle stage. The 4 stages (phi, chi, rheta, 2rheta) are stePPing-motor-controlled by a computer, which also measures the x-ray spectra. Therefore, the angle scan of the fluorescent x-ray intensity is automatically measured.
We performed a surface analysis of various materials by using this apparatus. The obtained results were reported in about 20 papers of international Journals, and were orally presented at scientific societies including twice international meeting. Especially, the determination of the solid surface density and the evaluation of the x-ray probing depth under total reflection conditions are good results. The head investigator (K.Tsuji) is given two prizes for encouragement from The Surface Science Society of Japan and The Japan Society of Applied Physics. I attempt to apply the glancing-incidence and glancing-takeoff x-ray fluorescence method to monitoring the plasma processing.
In addition to these results, we also studied the x-ray excited STM tip current and the x-ray emission from a Grimm glow discharge lamp for the first time.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (48 results)

All Other

All Publications (48 results)

  • [Publications] K.Tsuji: "Nondestructive depth profiling of oxidized Fe-Cr alloy by the glancing-incidence and-takeoff x-ray fluorescence" Appl.Surf.Sci.103. 451-458 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji: "Solid Surface density determination using the glancing takeoff x-ray fluorescence method" Jpn.J.Appl.phys.35. L1535-L1537 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 辻 幸一: "全反射現像を利用した蛍光X線表面分析法" まてりあ. 35. 1333-1338 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji: "Takeoff angle-deperdent x-ray fluorescence analysis of thin films on acrylic substrate" J.Trace Micro.Tech.15(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji: "Derelopent of glancing-incidence and glarcing-takeoff x-ray fluorescence oppratus for surface and thin-film ardysi" Spectrochim.Acta B. (印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 辻 幸一: "全反射X線侵入深さの評価" 表面科学. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji: "Depth profiling using the glancing-incidence and glancing takeoff x-ray fluorescence method" Rev.Sci Instrum.66. 4847-4852 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Sato: "Evaluation of Ni/Mn multilayer samples with glancing-incidence and-takeoff x-ray fluorescence analysis" Appl.Phys.A. 62. 87-93 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji: "Nordestructive depth profiling by glancing-incidence and -takeoff x-ray fluorescence" Mater.Trans-JIM. 37. 295-298 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji: "Surface analysis of Fe-Cr alloy by glancing-incidence and -takeoff x-ray fluorescence merhod" Mater.Trans.JIM. 37. 1033-1036 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 辻 幸一: "斜入射・斜出射-蛍光X線分析法による表面反応の評価" 表面科学. 17. 346-351 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji: "Glancing-incidence and glarcing-takeoff x-ray fluorescence aralysis of a Mn ultrothin film on Au layer" Thin Sold Films. 274. 18-22 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji: "Characteristics of an x-ray-excited current detected with a scanning tunneling microscope tip" Rev.Sci.Instrum.67. 3573-3577 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji: "Optimun goseous presure for mecsurement of the x-ray excited scanning tunneling microscope tip current" Jpn.J.Appl.Phys.36. (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 辻 幸一: "X線照射下でのSTM観察と探針電流の測定" X線分析の進歩. 28. 289-300 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji: "Characteristics of total reflection x-ray excited current detected with the tip of scarning tunneling microscope" Spectroohim.Acta B. (印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji: "Fast electrons from Grimm glow dischorge helium plasmas" Jpn.J.Appl.Phys. (印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji: "Characteristics of fast electros from Grimm glow dischorge He plasma as an electron source" Spectrochim.Acta B.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji, S.Sato, and K.Hirokawa: "Depth profiling using the glancing-incidence and glancing-takeoff x-ray fluorescence method" Rev. Sci. Instrum. 66. 4847-4852 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Sato, K.Tsuji, and K.Hirokawa: "Evaluation of NI/Mn multilayr samples with glancing-incidence and-takeoff x-ray fluorescence analysis" Appl. Phys.A. 62. 87-93 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji, S.Sato, and K.Hirokawa: "Nondestructive depth profiling by glancing-incidence and-takeoff x-ray fluorescence" Mater. Trans. JIM. 37. 295-298 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji and K.Hirokawa: "Surface analysis of Fe-Cr alloy by glancing-incidence and-takeoff x-ray fluorescence method" Mater. Trans. JIM. 37. 1033-1036 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji, S.Sato, and K.Hirokawa: "Glancing-incidence and glancing-takeoff x-ray fluorescence analysis of a Mn ultrathin film on an Au layr" Thin Solid Films. 274. 18-22 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji and K.Hirokawa: "Nondestructive depth profiling of oxidized Fe-Cr alloy by the glancing-incidence and-takeoff x-ray fluorescence method" Appl. Surf. Sci.103. 451-458 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji and K.Wagatsuma: "Solid surface density determination using the glancing-takeoff x-ray fluorescence method" Jpn. J.APPL.Phys. 35. L1535-L1537 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji, K.Wagatsuma and K.Hirokawa: "Takeoff angle-dependent x-ray fluorescence analysis of thin films on acrylic substrate" Journal of Trace and Microprobe Techniques. 15. 1-11 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji, K.Wagatsuma, K.Hirokawa, T.Yamada, and T.Utaka: "Development of glancing-incidence and glancing-takeoff x-ray fluorescence apparatus for surface and thin-film analyzes" Spectrochim. A cta B. (in press.). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji, K.Wagatsuma, and T.Oku: "Experimental Evaluation of the Mo Kalpha x-ray probing depth for a GaAs wafer in a total erflection x-ray fluorescence analysis" Anal. Sci.(in press.). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji and K.Hirokawa: "Characteristics of an x-ray-excited current detected with a scanning tunneling microscope tip" Rev. Sci. Instrum. 67. 3573-3577 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji and K.Wagatsuma: "Optimum gaseous pressure for measurement of the x-ray excited scanning tunneling microscope tip current" Jpn. J.Appl. Phys.36(in press.). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji, K.Wagatsuma and K.Hirokawa: "Characteristics of total reflection x-ray excited current detected with the tip of scanning tunneling microscope" Spectrochim. Acta B. (in press.). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Tsuji, H.Matsuta, and K.Wagatsuma: "Fast electrons from Grimm glow discharge helium plasmas" Jpn. J.Appl. Phys.(in press.). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Tsuji: "Depth profiling using the glancing-incidence and-takeoff x-ray fluorescence method" Rev. Sci. Inctrum.66. 4847-4852 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] S. Sato: "Evaluation of Ni/Mn multilayer samples with glancing-inciderce and - take off x-ray fluorescerce aralysis" Appl. Phys. A. 62. 87-93 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Tsuji: "Nondestructive depth profiling by glaning-inciderce and -takeoff x-ray fluorescence" Mater. Trans. JIM. 37. 295-298 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Tsuji: "Surface aralysis of Fe-Cr alloy by glancing-incidence and -takeoff x-ray fluorescence method" Mater. Trans. JIM. 37. 1033-1036 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 辻 幸一: "斜入射・斜出射-蛍光X線分析法による表面反応の評価" 表面科学. 17. 346-351 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Tsuji: "Glancing-inciderce and takeoff x-ray fluorescerce aralysis of Mu ultrathir film on Au layer" Thin Solid Films. 274. 18-22 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Tsuji: "Solid surface density determination using the glarcing - takeoff x-ray fluorescence method" Jpn. J. Appl. Phys.35. L1535-L1537 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Tsuji: "Choracteristics of total reflection x-ray excited current detected withthe tip of Xanning tunneling microscope" Rev. Sci. Instrum.67. 3573-3577 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Tsuji: "Nondestructive depth profiling of oxidizod Fe-Cr alloy by the glancing-incidence and -takeoff XRF method" Appl. Surf. Sci.103. 451-458 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Tsuji: "Takeoff angle-dependent x-ray fluorescence analysis of thin films on acrylic substrate" J. Trace. Micro. Tech.15(印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Tsuji: "The development of the glancing-incidence and -takeoff x-ray fluorescence analysis" Spectrochim. Acta B. (印刷中). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 辻 幸一: "全反射現象を利用した蛍光X線表面分析法" まてりあ. 35. 1333-1338 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K. Tsuji et al.: "The effects of surface roughness on the angle-dependent total-reflection x-roy fluorescence of ultruthin films" J. Appl. Phys. 78. 969-973 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K. Tsuji. S. Sato. K. Hirokawa: "Depth profiling using the glancing-incidence and glancing-take off x-ray fluoresoence-method" Rev. Sci. Instrum.66. 4847-4852 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] S. Sato. K. Tsuji, K. Hirokawa: "Evaluation of Ni/Mn multilayer samples with glancing-incidence and-takeoff x-ray fluorescence aralysis" Appl. Phys. A. 62. 87-93 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] K. Tsuji: "Glancing-incidence and glancing-takeoff x-ray fluorescence analysis of a Mn ultrathin film on an Au layer" Thin Solid Films. (印刷中). (1996)

    • Related Report
      1995 Annual Research Report

URL: 

Published: 1995-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi