| Project/Area Number |
07555338
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 試験 |
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| Research Field |
表面界面物性
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| Research Institution | TOYOTA TECHNOLOGICAL INSTITUTE |
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Principal Investigator |
UEDA Kazuyuki TOYOTA TECHNOLOGICAL INSTITUTE, 大学院・工学研究科, 教授 (60029212)
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| Co-Investigator(Kenkyū-buntansha) |
TAGUCHI Masami アルバックファイ(株), 技術開発室長
本多 文洋 豊田工業大学, 工学部, 教授 (20005953)
HONDA Hirohumi
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| Project Period (FY) |
1995 – 1996
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| Project Status |
Completed (Fiscal Year 1996)
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| Budget Amount *help |
¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 1996: ¥3,700,000 (Direct Cost: ¥3,700,000)
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| Keywords | TOF-ESD / FTIR / ESD / ELECTRON STIMULATED DESORPTION / HYDROGEN ADSORPTION / HYDROGEN DETECTION / RHODIUM / SILICON |
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| Research Abstract |
The system of time-of-flight type electron-stimulated desorption (TOF-ESD) spectroscopy is very useful to detect hydrogen on solid surfaces in spite of its simple construction. However, a quantitative analysis is still controversial due to high renutralization of desorbedions depending on species and surface conditions. Therefore, in order to establish a quantitative analysis, it is necessary to calibrate for the ESD signal intensity to amounts of adsorbate.
Though a post ionization method by for desorbed particles using a laser beam had been planned originally, it was abandoned to set up in this project due to a squeezed budget. Conquering this, we have tried to compare the ESD yield from adsorbates to absorbance of infrared light by vibration intensity of molecules by using a Fuorie-Transform Infrared Spectroscopy (FTIR). An in-situ measurement of ESD and FTIR have been firstly constructed here. An experiment for CO on metals revealed good relationship. However, in the case of H on Si, a signal intensity of a FTIR was too small to calibrate adsorption amounts. We have compromised to calibrate for adsorbed hydrogen on silicon surface by the result of E1astic Recoil Detection Analysis (ERDA) comparing with a TDS result. As applications of TOF-ESD,hydrogen mediated heteroepitaxy and a two dimensional hydrogen analysis have been accomplished.
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