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DEVELOPMENT OF ULTRA-PRECISION MACHINING SYSTEM FOR ASPHERIC MIRROR BASED ON ARC ENVELOPE GRINDING METHOD

Research Project

Project/Area Number 07555355
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field 機械工作・生産工学
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

KURIYAGAWA Tsunemoto  TOHOKU UNIV., DEPT.OF TECHNOLOGY,ASSOCIATE PROFESSOR, 工学部, 助教授 (90170092)

Co-Investigator(Kenkyū-buntansha) SUZUKI Hirofumi  TOHOKU UNIV., DEPT.OF TECHNOLOGY,RESEARCH ASSISTANT, 工学部, 助手 (20282098)
TACHIBANA Touru  MICRON MACHINERY CO., LTD., ENGINEERING SECTION,HEAD OF RESEARCHERS, 技術部, 主任研究員
王 序進  東北大学, 工学部, 助手 (40250683)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 1996: ¥1,400,000 (Direct Cost: ¥1,400,000)
KeywordsCERAMICS / MIRROR GRINDING / ASPHERIC MIRROR / ARC ENVELOPE GRINDING METHOD / TRUING / DRESSING / 円弧包絡法
Research Abstract

This project deals with the development of an ultra-precise grinding system based on a new grinding technique called the "Arc Envelope Grinding Method (AEGM)". AEGM,which is used for grinding aspheric ceramic mirrors, increases both wheel life and grinding performance, and significantly decreases total production costs. The necessary instrumentation and control system of our new instrument that utilizes AEGM have been designed and built. The tool path was calculated on a supercomputer, and the CNC program generation and tool path compensation were performed on a PC linked to the same supercomputer. Next, arc truing accuracy, wheel design, surface roughness and form accuracy of the ground workpiece were investigated.We developed a precision truing and dressing device, called an "Arc Truer". The truer is for an on-machine truing of a round cross-sectional profile. An examination of truing accuracy of the Arc Truer revealed that profile and radius errors were within (]SY.+-。[)0.5 mum and (]SY.+-。[)0.08mm, respectively. To obtain better form accuracy, furthermore, we investigated an on-machine form-measuring instrument with resolution of less than 10 nm. Next, we tried the AEGM grinding tests with the trued wheel. Using this grinding system, aspheric mirrors of glass and silicon carbide, 100 mm in diameter, were successfully ground. The form error after the first grinding (without any compensation) was less than 1.8 mum, and the roughness was R<@D2max@>D2=82nm (R<@D2a@>D2=10nm). The AEGM-based system which we developed demonstrated excellent grinding performance of aspheric ceramic mirrors. This system is applicable for manufacturing not only large-scale optics for outer-space applications, but also micro-size optics for micro devices, which will be widely used in the near future.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] T.Kuriyagawa: "A new grinding method for aspheric ceramic mirrars" J.of Materials Processing Technology. 62. 387-392 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 鈴木浩文: "SR用軸外し回転楕円体ミラーの超精密加工" 砥粒加工学会誌. 41・2. 56-60 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 厨川常元: "極微粒ダイヤモンドホイールのツル-イング・ドレッシングに関する研究" 精密工学会秋季大会学術講演会 講演論文集. (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kuriyagawa: "A New Grinding Method for Aspheric Ceramic Mirrors" Proc.of International Conference on Precision Engy.146-149 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kuriyagawa: "In-process dressing of resincid boncled ultra-fine grit diamond wheel using AJM technology." Proc.of International Manufacturing Engg.Conference. 53-55 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.S.Sepasy Zahpraty: "Ultra-precision form truing and its on-machine measurement" 精密工学会秋季大会学術講演会講演論文集. (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kuriyagawa: "A new grinding method for aspheric ceramic mirrors" Journal of Materials Processing Technology. 62. 387 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Suzuki: "Precision Machining of SR Off-Axis Ellipsoidal Mirror" Journal of the Society of Grinding Engineers. 41,2. 56 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kuriyagawa: "Studies on Truing and Dressing of Ultra-Fine Grit Diamond Wheels" Proceeding of Japan Society of Precision Engineering. (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kuriyagawa: "A New Grinding Method for Aspheric Ceramic Mirrors" Proceedings of International Conference on Precision Engineering'95 (2^<nd>ICMT). 146 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kuriyagawa: "In-process dressing of resinoid bonded ultra-fine grit diamond wheel using AJM technology" Proc.of International Manufacturing Engieneering Conference. 53-55 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.S.Sepasy Zahmatny: "Ultra-precision form truing and its on-machine measurement (Studying of axisymmetric aspheric mirror grinding)" Proceeding of Japan Society of Precision Engineering. (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kuriyagawa: "In-process dressing of resineid bobded Ultra-fine grot diamond wheel using AJM technology" Proc.of International Manifacturing Engineering Conference. 8. 53-55 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Kuriyagawa: "A new griading method for aspheric ceramic mirrors" J.of Materials Processing Tech.62. 387-392 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] MSSepasy Zahmaty: "Ultra-precision form fruing and its on-machine measurement" 精密工学会秋季大会学術講演会講演論文集. (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 鈴木浩文: "SR用軸外し回転楕円体ミラーの起精密加工" 砥粒加工学会誌. 41・2. 56-60 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] T. Kuriyagawa.: "A New Griuding Method for Aspheric Ceramic Mirrors." Proc. of International Canfereuce on Precision Engineering. 146-149 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 厨川 常元: "極微粒ダイヤモンドホイールのツル-イング,ドレッシングに関する研究" 1995年度精密工学会講演論文集(秋季). 467-468 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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