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Development of high precision coordinate measurement machine with internal monitoring and thermal deformation compensation capability

Research Project

Project/Area Number 07555357
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field 機械工作・生産工学
Research InstitutionThe University of Tokyo

Principal Investigator

NAGAO Takaaki  The University of Tokyo, Faculty of Engineering, Professor, 大学院・工学系研究科, 教授 (80010685)

Co-Investigator(Kenkyū-buntansha) FUKUI Toyoharu  Tokyo Seimitsu, Production Division, Measurement Group, Group Leader, 生産本部・汎用計測機器グループ, グループリーダ
NAKAO Masayuki  The University of Tokyo, Faculty of Engineering, Associate professor, 大学院・工学系研究科, 助教授 (90242007)
HATAMURA Yotaro  The University of Tokyo, Faculty of Engineering, Professor, 大学院・工学系研究科, 教授 (40010863)
MITSUISHI Mamoru  The University of Tokyo, Faculty of Engineering, Associate Professor, 大学院・工学系研究科, 助教授 (90183110)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1996: ¥1,900,000 (Direct Cost: ¥1,900,000)
KeywordsCoordinate Measurement Machine / Thermal Deformation / Deformation Sensor / Variable Temperature Environment / Neural Network / Genetic Algorithm / On-One Site / Internal Monitoring / 広範囲高精度測定 / 原子間力顕微鏡 / 粗動機構 / 微動機構 / ピエゾアクチュエータ / ナノブロック / ニューラル・ネットワーク
Research Abstract

To measure a mechanical part in high accuracy, a coordinate measurement machine (CMM) is generally located in the constant temperature room. However, it is rather difficult to locate a manufacturing tool in the constant temperature room. Therefore, clamp and unclamp sequences are repeated for machining and measurement. It reduces the machining accuracy. To overcome the problem, a coordinate measurement machine with high accuracy even in the variable temperature condition was developed in this research.
Ten deformation sensors were attached on the structure of the CMM.As the deformation sensor is made of super-invar material with very low thermal expansion, only the thermal distortion of the machine itself is measured without influence of the thermal changes in the environment or in the machine structure.
In the experiment the standard gauge was made using super-invar material. To compensate for the thermal deformation, a measurement space compensation matrix was prepared. Each element of the compensation matrix was calculated by a neural network integrated with genetic algorithm. The input to the neural network is the output from deformation sensors and temperature information of air and optical scales.
Edge length and angle between two edges were maintained less than 15% and 30%, respectively.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] 光石 衛,他: "ニューラル・ネットワークと遺伝的アルゴリズムとを用いた高精密マシニングセンタの開発" 日本機械学会論文集. 61-591 C. 4517-4522 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Mitsuishi, M., et al.: "Thermal Deformation Compensation for a MC and a CMM Based on Internal Monitoring Using a Neural Network with a Genetic Algorithm" CIRP VII Workshop on Supervising and Diagnostics of Machining Systems. 66-78 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Mitsuishi, M., et al.: "System construction for intelligent manufacturing" Proceedings of the 3nd CIRP Workshop on Design and Implementation of Intelligent Manufacturing Systems. 51-65 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Okumura, T., et al.: "Thermal deformation compensation for a CMM using internal monitoring method" Proceedings of the 3rd CIRP Workshop on Design and Implementation of Intelligent Manufacturing Systems. 214-217 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Mitsuishi, M., et al.: "Intelligent Factory with Open-Architecture CNC" Proceedings of the 29th CIRP International Seminar on Manufacturing Systems. 63-68 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 光石 衛,他: "生産システムにおける測定の知能化" 1995年度精密工学会春季大会学術講演会論文集. 1105-1106 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 奥村 努,他: "変温環境における三次元測定機の高精度化" 1995年度精密工学会秋季大会学術講演会論文集. 559-560 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Mitsuishi, M., Okumura, T., Sugita, N., Nagao, T.and Hatamura, Y.: ""Development of a high precision machining center using neural network and genetic algorithm, "" J.JSME. vol.61, no.591, C. 4517-4522 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Mitsuishi, M., Okumura, T., Sugita, N., Nagao, T.and Hatamura, Y.: ""Thermal Defoemation Compensation for a MC and a CMM Based on Internal Monitoring Using a Neural Network with a Genetic Algorithm, "" CIRP VII Workshop on Supervising and Diagnostics of Machining Systems-Thermal Behavior Inteliigent Diagnostics and Suoervising of Machining Systems Karpacz, Poland-. 66-78 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Mitsuishi, M., Hatamura, Y., Nakao, M., Inoue, H.and Nagao, T.: ""System construction for intelligent manufacturing, "" Proceedings of the 3rd CIRP Workshop on Design and Implementation of Intelligent Manufacturing Systems Tokyo Japan. 51-65 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Okumura, T., Mitsuishi, M., Nagao, T.and Hatamura, Y.: ""Thermal deformation compensation for a CMM using internal monitoring method, "" Proceedings of the 3rd CIRP Workshop on Design and Implementation of Intelligent Manufacturing Systems Tokyo Japan. 214-217 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Mitsuishi, M., Hatamura, Y., Nakao, M.and Nagao, T.: ""Intelligent Factory with Open-Architecture CNC,"" Proceedings of the 29th CIRP International Seminar on Manufacturing Systems Osaka, Japan. 63-68 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Mitsuishi, M., Nakao, M., Hatamura, Y.and Nagao, T.: ""Intelligent measurement in production, "" Prepr.Jpn.Soc.Prec.Eng.(Spring Meeting). 1105-1106 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Okumura, T., Mitsuishi, M., Nagao, T., Nakao, M., Fukui, T.and Yoshioka, H.: ""High precision coordinate measurement machine in variable temperature environment, "" Prepr.Jpn.Soc.Prec.Eng.(Autumn Meeting). 559-560 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Mitsuishi,M.,et al.: "Thermal Deformation Compensation for a MC and a CMM Based on Internal Monitoring Using a Neural Network with a Genetic Algorithm" CIRP VII Workshop on Supervising and Diagnostics of Machining Systems. 7. 66-78 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Okumura,T.,et al.: "Thermal deformation compensation for a CMM using internal monitoring method" Proceedings of the 3rd CIRP Workshop on Design and Implementation of Intelligent Manufacturing Systems. 3. 214-217 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Mitsuishi,M.,et al.: "System construction for intelligent manufacturing" Proceedings of the 3rd CIRP Workshop on Design and Implementation of Intelligent Manufacturing Systems. 3. 51-65 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Mitsuishi, M., Nagao, T., Hatamura, Y., et al.: "Active Thermal Deformation Compensation Based on Internal Monitoring Using a Neural Network with the Genetic Algorithm Method" Proceedings of the 10th Annual Meeting of the American Society for Precision Engineering. 436-439 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 光石衛,奥村努,杉田直彦,長尾高明,畑村洋太郎: "ニューラル・ネットワークと遺伝的アルゴリズムとを用いた高精密マシニングセンタの開発" 日本機械学会論文集,. Vol.61 No.591-C. 4517-4522 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 光石衛,杉田直彦,奥村努,長尾高明,畑村洋太郎: "遺伝的アルゴリズムとニューラル・ネットワークとを用いたマシニング・センタの熱変形能動補償制御の試み" 日本機械学会第72期通常総会講演会予稿集. 421-422 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 光石衛,中尾政之,畑村洋太郎,長尾高明: "生産システムにおける測定の知能化" 1995年度精密工学会春季大会学術講演会論文集. 1105-1106 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 奥村努,光石衛,長尾高明,中尾政之,福井豊治,吉岡裕樹: "変温環境における三次元測定機の高精度化" 1995年度精密工学会秋季大会学術講演会論文集. 559-560 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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