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Development of High Persistente Microparts modified by Ion Beam Mixing Process

Research Project

Project/Area Number 07555362
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field 機械工作・生産工学
Research InstitutionNagoya University

Principal Investigator

MATSUMURO Akihito  Nagoya University, Engineering, Associate Professor, 工学部, 助教授 (80173889)

Co-Investigator(Kenkyū-buntansha) NAKAMOTO Takeshi  Nagoya University, Engineering, Associate Professor, 工学部, 助教授 (30198262)
MORI Toshihiko  Nagoya University, Engineering, Associate Professor, 工学部, 助教授 (90023340)
SATO Kazuo  Nagoya University, Engineering, Professor, 工学部, 教授 (30262851)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 1996: ¥1,400,000 (Direct Cost: ¥1,400,000)
KeywordsIon Beam Mixing Process / T_i-N Thin film / Carbon Nitride Film / Gradient Coating / Mechnaical Properties / Micro-parts / UV Laser Induced Polymer / High Pressure Technique / 硬質膜
Research Abstract

In order to dedelop high pesistente microparts, we investigated the subject under the following three heads : (1) surface modification of micropatrs consisted of silicon wafer by ion beam mixing technique ; (2) development of new precise fabricating techniques ; and (3) development of new functional material by a high pressure technique.
The following results were obtained :
1. We clarified that the formation condition of T_i-N thin film on a silicon substrate by ion beam mixing technique and their mechanical properities.
2. We clarified that the formation condition of C-N thin film on a silcon substrate by ion beam mixing technique and their mechanical properities.
3. We revealed the mechanism of grdient coating on a silicon substrate by means fo RF magnetron sputtering.
4. We could syntehsize new materials of polymerized fullerenes, M_g-A_l-Z_n qusicrystals and A_l-L_i alloys by a high pressure technique up to 5.4 GP_a. These materials was excellent in the tribological perties and the strength properties.
5. We could develop electrostatic s-shaped film and micro tensile-test system fabricated on a single crystal silicon chip.
6. We could manufacture three-dimensional micro-parts by UV laser induced polymerization.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (66 results)

All Other

All Publications (66 results)

  • [Publications] A. Matsumuro: "Mechanical Propeties of Quasicrystalline Materials of Mg-Al-Zn Alloys Consolidated Using a High-Pressure Technique" Proc. of IMMM′95. 219-226 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M. Shikida: "Fabrication of an electrostatic film actuator with an S-shaped film" Tech. Dig. of Transducers′95. 426-429 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Sato: "Recent Advances in MEMS Technologies" Proc. of the First International Micromachine Symposium. 73-83 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M. Shikida: "Micromachined S-shaped Actuator" Proc. of IEEE 6th Int. Symp. on Micromachine and Human Science. 167-172 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 佐藤一雄: "エッチングによる微細な3次元構造体の加工" 精密工学会誌. 61・10. 1373-1376 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T. Mori: "Mechanism of Gradient Coating by Means of RF Magnetron Sputtering" Proceedings of IMMM′95. 501-506 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 森 敏彦: "硬質膜の傾斜機能コーティング機構の解明" 機械学会論文集A編. 61・591. 2413-2420 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Yamaguchi: "Micromachining Using UV Laser Induced Polymerization" Proc. of IMMM′95. 535-542 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Sakai: "Improvements in Mechanical Properties of Al-Li Alloy Using High Pressure" High Pressure Research on Solids. 85-98 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 高橋 裕: "超高圧による面心立法C60の重合と常圧熱処理における回復過程" 日本金属学会誌. 60・8. 700-707 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Sakai: "Variations of Elastic Moduli during Ageing Process of Al-Li Solid Solutions Treated at High Pressure" J. Mater. Sci.31・11. 3009-3013 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Sakai: "Elastic Moduli of Al-Li Allys Treated at a High Pressure of 5.4 GPa" J. Mater. Sci.31・12. 3309-3313 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M. Shikida: "Response Time Measurement of Electrostatic S-shaped Film Actuator Related to Environmental Gas Pressure Conditions" Proc. of IEEE MEMS Workshop. 210-215 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K. Sato: "Micro tensile-test system fabricated on a single crystal silicon chip" Proc. of IEEE MEMS Workshop. 360-364 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 中本 剛: "紫外線感光性樹脂を使ったマイクロストラクチュアの製造(第4報、集束ビーム描画法による三次元部品の製作)" 日本機械学会論文集(C編). 62・594. 677-682 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 中本 剛: "紫外線感光性樹脂を使ったマスクパターン 転写法とビーム描画法によるマイクロ部品の作製" 高分子論文集. 53・4. 209-217 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T. Nakamoto: "Manufacturing of Three-dimensional Micro-parts by UV Laser Induced Polymerization" J. Micromech. Microeng.6. 240-253 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T. Yamaguchi: "Manufacturing of High Aspect Ratio Micro Structures Using UV Sensitive Photopolymer" JSME Int. J.39・2. 387-396 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 松室昭仁: "C60バルク体の高圧力成形とその機械的性質" 日本機械学会論文集(A編)掲載予定. (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.Matsumuro: "Mechanical Propeties of Quasicrystalline Materials of M_g-A_l-Z_n Alloys Consolidated Using a High Pressure Technique" Proc.of IMMM'95. 219-226 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Shikida: "Fabrication of an electrostatic film actuator with an S-shaped film" Tech.Dig. of Transducers'95. 426-429 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Sato: "Recent Advances in MEMS Technologies" Proc.of the First InternationalMicromachine Symposium. 73-83 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Shikida: "Micromachined S-shaped Actuator" Proc.of IEEE 6th Int. Symp.on Micromachine and Human Science.167-172 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Sato: "Micromachining of 3-dimensional Microstructure by Etching Technologies." J.Jpn.Soc.Prec.Eng. 61-10(in Japanese). 1373-1376 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Mori: "Mechanism of Gradient Coating by Means of RF Magnetron Sputtering" Proc.of IMMM'95. 501-506 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Mori: "Analysis of Gradient Coating Mechanism of HardFilm" J.Jpn.Soc.Mech.Eng.A. 61-591(in Japanese). 2413-2420 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Yamaguchi: "Micromachining Using UV Laser Induced Polymerization" Proc.of IMMM'95. 535-542 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Sakai: "Improvements in Mechanical Properties of A_l-L_i Alloy Using High Pressure" High Pressure Research on Solids. 85-98 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Takahashi: "Synthesis of Polymerized Fcc-C60 Phase under High Pressure and Its Recovery by Heat Treatment at Ambient Pressure" J.Jpn, Inst.Metals. 60-8. 700-707 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Sakai: "Variations of Elastic Moduli during Ageing Process of A_l-L_i Solid Solutions Treated at High Pressure" J.Mater .Sci.31-11. 3009-3013 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Sakai: "Elastic Moduli of A_l-L_i Alloys Treated at a High Pressure of 5.4 GP_a" J.Mater.Sci.31-12. 3309-3313 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.Matsumuro: "Mechanical Propeties of Quasicrystalline Materials of M_g-A_l-Z_n Alloys Consolidated Using a High-Pressure Technique" Proc.of IMMM'95. 219-226 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Shikida: "Fabrication of an electrostatic film actuator with an S-shaped film" Tech.Dig.of Transducers'95. 426-429 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Sato: "Recent Advances in MEMS Technologies" Proc.of the First International Micromachine Symposium. 73-83 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Shikida: "Micrmachined S-shaped Actuator" Proc.of IEEE 6th Int.Symp.on Micromachine and Human Science.167-172 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Sato: "Micromachining of 3-dimensional Microstructure by Etching Technologies" J.Jpn.Soc.Prec.Eng.61-10(in Japanese). 1373-1376 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Mori: "Mechanism of Gradient Coating by Means of RF Magnetron Sputtering" Proc.of IMMM'95. 501-506 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Mori: "Analysis of Gradient Coating Mechanism of HardFilm" J.Jpn.Soc.Mech.Eng.A61-591(in Japanese). 2413-2420 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Yamaguchi: "Micromachining Using UV Laser Induced Polymerization" Proc.of IMMM'95. 535-542 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Sakai: "Improvements in Mechanical Properties of A_l-L_i Alloy Using High Pressure" High Pressure Research on Solids. 85-98 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Takahashi: "Synthesis of Polymerized Fcc-C60 Phase under High Pressure and Its Recovery by Heat Treatment at Ambient Pressure" J.Jpn, Inst.Metals. 60-8. 700-707 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Sakai: "Variations of Elastic Moduli during Ageing Process of A_l-L_i Solid Soluutions Treated at High Pressure" J.Mater.Sci.31-11. 3009-3013 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Sakai: "Elastic Moduli of A_l-L_i Alloys Treated at a High Pressure of 5.4 GP_a" J.Mater.Sci.31-12. 3309-3313 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] A.Matsumuro: "Mechanical Propeties of Quasicrystalline Materials of Mg-Al-Zn Alloys Consolidated Using a High-Pressure Technique" Proc.of IMMM'95. 219-226 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Shikida: "Fabrication of an electrostatic film actuator with an S-shaped film" Tech.Dig.of Transducers'95. 426-429 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Sato: "Recent Advances in MEMS Technologies" Proc.of the First International Micromachine Symposium. 73-83 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Shikida: "Micromachined S-shaped Actuator" Proc.of IEEE 6th Int.Symp.on Micromachine and Human Science. 167-172 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] 佐藤一雄: "エッチングによる微細な3次元構造体の加工" 精密工学会誌. 61・10. 1373-1376 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Mori: "Mechanism of Gradient Coating by Means of RF Magnetron Sputtering" Proceedings of IMMM'95. 501-506 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] 森敏彦: "硬質膜の傾斜機能コーティング機構の解明" 機械学会論文集A編. 61・591. 2413-2420 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Yamaguchi: "Micromachining Using UV Laser Induced Polymerization" Proc.of IMMM'95. 535-542 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Sakai: "Improvements in Mechanical Properties of Al-Li Alloy Using High Pressure" High Pressure Research on Solids. 85-98 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] 高橋裕: "超高圧による面心立方C60の重合と常圧熱処理における回復過程" 日本金属学会誌. 60・8. 700-707 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Sakai: "Variations of Elastic Moduli during Ageing Process of Al-Li Solid Solutions Treated at High Pressure" J.Mater.Sci.31・11. 3009-3013 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Sakai: "Elastic Moduli of Al-Li Alloys Treated at a High Pressure of 5.4 GPa" J.Mater.Sci.31・12. 3309-3313 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Shikida: "Response Time Measurement of Electrostatic S-shaped Film Actuator Related to Environmental Gas Pressure Conditions" Proc.of IEEE MEMS Workshop. 210-215 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Sato: "Micro tensile-test system fabricated on a single crystal silicon ship" Proc.of IEEE MEMS Workshop. 360-364 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 中本剛: "紫外線感光性樹脂を使ったマイクロストラクチュアの製造(第4報、集束ビーム描画法による三次元部品の製作)" 日本機械学会論文集(C編). 62・594. 677-682 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 中本剛: "紫外線感光樹脂を使ったマスクパターン転写法とビーム描画法によるマイクロ部品の作製" 高分子論文集. 53・4. 209-217 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Nakamoto: "Manufacturing of Three-dimensional Micro-parts by UV Laser Induced Polymerization" J.Micromech.Microeng.6. 240-253 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Yamaguchi: "Manufacturing of High Aspect Ratio Micro Structures Using UV Sensitive Photopolymer" JSME Int.J.39・2. 387-396 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 松室昭仁: "C60バルク体の高圧力成形とその機械的性質" 日本機械学会論文集(A編). (掲載予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] A.Matsumuro: "Mechanical Propeties of Quasicrystalline Materials of Mg-Al-Zn Alloys Consolidated Using a High-Pressure Technique" Proc.of IMMM'95. 219-226 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Sato: "Fabrication of an electrostatic film actuator with an S-shaped film" Tech.Dig.of Transducers'95. 426-429 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 森 敏彦: "硬質膜の傾斜機能コーティング機構の解明" 機械学会論文集A編. 61. 2413-2420 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 中本 剛: "紫外線感光樹脂を使ったマスクパターン転写法とビーム描画法によるマイクロ部品の作製" 高分子論文集. 53(印刷中). (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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