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Growth of epitaxial ferromagnetic thin films on semiconductor substrates and their applications

Research Project

Project/Area Number 07555412
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionThe University of Tokyo

Principal Investigator

TANAKA Masaaki  Graduate School of Engineering, The University of Tokyo, Associate Professor, 大学院・工学系研究科, 助教授 (30192636)

Co-Investigator(Kenkyū-buntansha) HITONO Shigeru  NTT Interdisciplinary Research Laboratory, Senior Researcher, 境界領域研究所, 主任研究員
GERHARD Faso (ファーソル ゲルハルト)  ユーロテクノロジー, 主任研究員 (10251472)
NISHINAGA Tatau  Graduate School of Engineering, The University of Tokyo, Professor, 大学院・工学系研究科, 教授 (10023128)
FASOL Gerhart  Eurotechnology Corporation, Principal Reaearcher
EASOL Gerhar  ユーロテクノロジー, 主任研究員
Project Period (FY) 1995 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥5,400,000 (Direct Cost: ¥5,400,000)
Fiscal Year 1997: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1996: ¥2,900,000 (Direct Cost: ¥2,900,000)
Keywordsferromagnetic thin films / MnAs / GaAs / Si substrates / dissimilar heterostructures / molecular beam epitaxy (MBE) / ferromagnet-semiconductor heterostructures / nonvolatile magnetic memory / エピタキシャル成長 / 強磁性体半導体多層構造 / エピキシシャル成長 / エピタキシャル強磁性体超薄膜 / 半導体基板 / 磁気異方性 / 半導体 / 磁性体多層構造 / 一軸異方性 / 磁性体薄膜 / 金属間化合物 / 強磁性MnGa薄膜 / 垂直磁化 / ヘテロエピタキシ- / 強磁性MnAs薄膜 / 交番力マグネトメータ
Research Abstract

Recent progressf epitxial growth technology has made it possible to prepare a variety of new artificial thin films and heterostructures (HS's) consisting of dissimilar materials. Among them, stable epitaxial ferromagnet/semiconductor HS's offer unprecedented opportunities for basic and applied research, adding a new degree of freedom inmaterials design. We have performed a series of studies on epitaxial growth and physical properties of such novel dissimilar heterostructures with focus on ferromagnetic compound/semiconductor systems. Here we used both Si and GaAs as semiconductor saubstrates. We have successfully grown epitaxial ferromagnetic MnAs thin films on GaAs (001) and (111) B,and on Si (001) and (111) substrates, by using molecular beam epitaxy (MBE). Our original template approaches are found to be very effective to obtain high-quality epitaxial films in such heteroepitaxy of dissimilar materials, and also to control magnetic anisotropy of the ferromagnetic films. Furthermore, we have successfully grown MnAs/GaAs/MnAs ferromagnet-semiconductor trilayr heterostructures on GaAs (111) B and S (111) substrates by MBE.These new HSs are promising for future applications to magnetic nonvolitile memory devices and/or magnetic field sensors coupled with underlying Si and/or III-V semiconducror electronic/optical circuitry.

Report

(4 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • Research Products

    (37 results)

All Other

All Publications (37 results)

  • [Publications] K.Saito, M.Tanaka, M.Hamamura, and T.Nisinaga: "“Epitaxial Growth AND Properties of MnAs/GaAs/MnAs Trilayers on GaAs(111)B and on Si(111)Substrates"" Record of the 16th Electronic Materials Symposium. 16. 53-56 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 田中 雅明: "「半導体と磁性体の一体化による新機能ヘテロ構造材料の形成」" 機能材料. 1997年7月号. 5-12 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tanaka: ""Epitaxial Ferromagnetic Thin Films and Heterostructures of Mn-Based Metallic and Semicounducting Compounds on GaAs"" 電気学会マグネティクス研究会資料. MAG97-189. 31-31 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 田中 雅明: "「半導体と不揮発性磁気メモリのハイブリッド化」" オプトロニクス. 1998年3月号(No.3). 123-128 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masaaki Tanaka: "“Epitaxial Ferromagnetic Thin Films and Heterostructures of Mn-Based Metallic and Semicounducting Compounds on GaAs"" J.Physics(Physica B). 印刷中. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tanaka: "“Magnetic compound/compound Semicounductor Heterostrures"" J.Vac.Sci.&Technol.印刷中. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tanaka: "Epitaxial Ferromagnetic Thin Films and Multilayrs of Mn-based Metallic Compounds on GaAs" J.Mater.Sci & Eng.B31. 117-122 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tanaka, J.P.Harbison and G.M.Rothberg: "Epitaxial Ferromagnetic MnAs Thin Films on (001) GaAs : Template and Epitaxial Orientations" J.Crystal Growth. 150. 1132-1138 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Akeura, M.Tanaka M.Ueki and T.Nishinaga: "Epitaxial Ferromagnetic MnAs Thin Films Grown by Molecular Beam Epitaxy on Si (001) Sbstrates" Appl.Phys.Lett.67. 3349-3351 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Huang, Z.H.Ming, Y.L.Soo, Y.H.Kao, M.Tanaka, H.Munekata: "X-ray Scattering and Absorption Studies of MnAs/GaAs Heterostrutures" J.Appl.Phys.79. 1435-1440 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Akeura, M.Tanaka, T.Nishinaga, and J.DeBoeck: "Epitaxial Growth and Magnetic Properties of MnAs Thin Films Directly Grown on Si (001)" J.Appl.Phys.79. 4957-4959 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.C.Park, Y.Park, T.Shin, G.M.Rothberg, M.Tanaka, J.P.Harbison: "Galvanomagnetic Properties and Magnetic Domain Structure of Epitaxial MnAs Thin Films on GaAs"" J.Appl.Phys.79. 4967-4969 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tanaka, J.P.Harbison and G.M.Rothberg: "Epitaxial MnAs/NiAs Magnetic Multilayrs on (001) GaAs Grown by Molecular Beam Epitaxy" J.Magnetism & Magnetic Materials. 156. 306-308 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tanaka: "Structures, Properties and Functions of Epitaxial Ferromagnetic Metal/Semiconductor Heterostructures " (Japanese)" J.Magnetics Society of Japan. Vol.20. 950-959 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.Shin, M.C.Park, Y.Park, G.M.Rothberg, J.P.Harbison, and M.Tanaka: "Magnetism of Epitaxial MnxNil-xAsFilms on GaAs (001)" Appl.Phys.Lett.70. 258-260 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Tanaka: "Recent Progress in Ferromagnetic Metal/Semiconductor Hybrid Heterostructures " (in Japanese)" Oyo Buturi. Vol.66 No.2. 132-136 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Saito, M.Tanaka, M.Hamamura, and T.Nishinaga: "Epitaxial Growth and Properties of MnAs/GaAs/MnAs Trilayrs on GaAs (111) B and on Si (111) Substrates" Record of the 16th Electronic Materials Symposium, Minoo, July 1997. 53-56 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masaaki Tanaka (Invited Paper): "Ferromagnetic Compound/ Compound Semiconductor Heterostructures" 25th Conf.on the Physics and Chemistry of Semiconductor Interfaces, Salt Lake City, January 1998., J.Vac.Sci.& Technol.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Masaaki Tanaka (Invited Paper): "Epitaxial Ferromagnetic Thin Films and Heterostructures of Mn-based Metallic and Semiconducting Compounds on GaAs" 8th Int.Conf.on Modulated Semiconsuctor Structures, Santa Barbara, July 1997, Physica E (J.Phys.E). (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Saito, M.Tanaka, M.Hamamura, and T.Nishinaga: ""Epitaxial Growth and Properties of MnAs/GaAs/MnAs Trilayers on GaAs (111) B and Si (111) Substrates" Record of the 16th Electronic Materials Symposium". 16. 53-56 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 田中雅明: "「半導体と磁性体の一体化による新機能ヘテロ構造材料の形成」" 機能材料. 1997年7月号. 5-12 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Tanaka: ""Epitaxial Ferromagnetic Thin Films and Heterostructures of Mn-Based Metallic and Semiconducting Compounds on GaAs"" 電気学会マグネティクス研究会資料. MAG97-189. 31-38 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 田中雅明: "「半導体と不揮発性磁気メモリのハイブリッド化」" オプトロニクス. 1998年3月号(No.3). 123-128 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] Masaaki Tanaka: ""Epitaxial Ferromagnetic Thin Films and Heterostructures of Mn-based Metallic and Semiconducting Compounds on GaAs"" J.Physics (Physica B). (印刷中). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Tanaka: ""Magnetic compound/Compound Semi conductor Heterostructures"" J.Vac.Sci.& Technol.(印刷中). (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] M.Tanaka: ""Structures,Properties and Functions of Epitaxial Ferromagnetic Metal/Semiconductor Heterostructures"" J.Magnetics Society of Japan. 20. 950-959 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Tanaka,J.P.Harbison and G.M.Rothberg: ""Epitaxial MnAs/NiAs Magnetic Multilayers on (001)GaAs Grown by Molecular Beam Epitaxy"" J.Magnetism & Magnetic Materials. 156. 306-308 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Akeura,M.Tanaka.T.Nishinaga,and J.DeBoeck: ""Epitaxial Growth and Magnetic Properties of MnAs Thin Films Directly Grown on Si(001)"" J.Appl.Phys.79. 4957-3959 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.C.Park,Y.Park,T.Shin,M.Tanaka,J.P.Harbison,: ""Galvanomagnetic Properties and Mgnetic Domain Structure of Epitaxial MnAs Thin Films on GaAs"" J.Appl.Phys.79. 4967-4969 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Tanaka,C.J.Palmstrom,M.Tsuda and T.Nishinaga: ""Epitaxial Semimetal(ErAs)/Semiconductor(III-V) Heterostructures: Negative Differential Resistance in Novel Resonant Tunneling Structures Having a Semimetallic Quantum Well"" J.Magnesism & Magnetic Materials. 156. 276-278 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Tanaka,M.Tsuda,T.Nishinaga and C.J.Palmstrom: ""Room Temperature Negative Differential Resistance in AlAs/ErAs/AlAs Heterostructures Grown on(001)GaAs"" Applied Physics Letters.68. 84-86 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M. Tanaka: "Epitaxial Ferromagnetic Thin films and Multilayers of Mn-based Metallic Compounds on GaAs" J. Materials Science & Engineering. B31. 117-125 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] M. Tanaka, J. P. Harbison G. M. Rothberg: "Epitaxial Ferromagnetic MnAs Thin Films on (001) GaAs: Template and Epitaxial Orientations" J. Crystal Growth. 150. 1132-1139 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K. Akeura, M. Tanaka M. Ueki, T. Nishinaga: "Epitaxial Ferromagnetic MnAs Thin Films Grown by Molecular Beam Epitaxy on si(001) Sbstrates" Applied Physics Letters. 67. 3349-3351 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] K. Akeura, M. Tanaka, M. Ueki, T. Nishinaga: "Epitaxial Ferromagnetic MnAs Thin Films on Si(001) Substrates" Record of the 14th Electronic Materials Symposium, Izu-Nagaoka,. (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 田中雅明: "エピタキシャル強磁性薄膜/半導体構造の形成とその物性" 物性研だより. 35. 36-37 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 明浦公彦、田中雅明: "Si基板上の強磁性MnAsの成長及びその評価" 物性研だより. 35. 71-72 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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