| Project/Area Number |
07555504
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
Structural/Functional materials
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| Research Institution | KYUSHU UNIVERSITY |
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Principal Investigator |
HAYASHI Yasunori Kyushu University, Faculty of Engineering, Professor, 工学部, 教授 (80010940)
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| Co-Investigator(Kenkyū-buntansha) |
TAKAGI Ken-ichi ULVAC co., Ultra High Vacuum Department, General Manager, 超高真空事業部開発部, 部長(研究員)
JYOKO Yukimi Kyushu University, Faculty of Engineering, Research Associate, 工学部, 助手 (40211974)
MASUDA Masataka Kyushu University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (40165725)
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| Project Period (FY) |
1995 – 1997
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| Project Status |
Completed (Fiscal Year 1997)
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| Budget Amount *help |
¥6,900,000 (Direct Cost: ¥6,900,000)
Fiscal Year 1997: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 1996: ¥5,200,000 (Direct Cost: ¥5,200,000)
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| Keywords | Induction Coupling Sputter / Artificial Lattice / Fe-Si-H / Magnetic Thin Film Head / Fe / Cr / 巨大磁気抵抗効果 |
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| Research Abstract |
The induction coupling sputtering machine was investigated at 1994 and was expected to give very fast formation in high vacuum. This means it can form very clean films cause of it mechanism. Although, there are some problems in this machine like mutual-and self-contamination. This phenomenon is explained that target particle comes on substrate and another target with a detour through a shutter plate. It is a fatal defect for the machine to form a atomic size order controlled film. We investigated new shield material and mechanism to reduce the mutul-and selfcontamination. We made improvement of a reduction coil to reduce contamination by using 1.0 turn coil. This coil is confirmed to generate stabilized reduction plasma. The rare earth magnet gives high and uniform magnetic field on target surface and increases plasma density and sputtering efficiency. This magnet makes possible to form films under higher vacuum and then get more clean films. To improve convenience of maintenance, we reformed the shape of cathode. We applied this machine on Fe-Si-H system. We investigated the effects of crystal structure on magnetic properties of soft magnetic materials. The hydrogen induction on films makes coarse crystal grain and gives refinement on magnetic properties.
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