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Formation of Functionally Gradient cBN Films Using Ion Beam

Research Project

Project/Area Number 07555521
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field Material processing/treatments
Research InstitutionOsaka University

Principal Investigator

MIYAKE Shoji  Osaka University, Joining & Welding Research Institute, Professor, 接合科学研究所, 教授 (40029286)

Co-Investigator(Kenkyū-buntansha) KOHATA Mamoru  Toshiba Tungaloy Co., Ltd., Tool Development Dep., Chief Res.Associate, 切削工具事業部, 主任研究員
OGATA Kiyoshi  Nissin Electric Co., Ltd., Basic Res.Dep., Chief Res.Associate, 先端技術研究開発部, 主席研究員
SETSUHARA Yuichi  Osaka University, Joining & Welding Research Institute, Res.Associate, 接合科学研究所, 助手 (80236108)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 1996: ¥2,200,000 (Direct Cost: ¥2,200,000)
KeywordsIon Beam / Ion Beam Assisted Deposition / cBN / Intrefacial Control / Adhesion / Functional Gdadient
Research Abstract

Boron nitride films were prepared by IBAD with N and/or Ar-mixtured ions. The c-BN films with improved tribological properties has been approached by inserting a B-rich buffer layr as a controlled buffer at the interface. Tribological characterization of the buffer layr indicated that the films with higher B/N transport ratio exhibited the simultaneous achievement of the highest adhesion strength tigether with the highest hardness value. The stoicheometric upper layr with high fraction of c-BN phase could be successfully grown on the B-rich layr formed on various substrates including highspeed-tool steel and WC.The insertion of the buffer layr exhibited the significant effect on the reduction of internal stress of the c-BN films and further on the enhancement of the tribological properties to obtain high hardness simultaneously with high adhesion strength. The double-layred BN films exhibited excellent characteristics in anti-corrosion capability, high-temperature phase stability and chemical innertness against various glass at elevated temperatures.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] T.Suzuki, Y.Tanaka, Y.Setsuhara, S.Miyake, M. Suzuki and M.Kumagai: "Studies on Buffer Layer for Practical Properties of c-BN Films by IBAD" Proc.4th Int.Symp.on Advanced Materials (ISAM'97). 141-146 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Setsuhara, T.Suzuki, Y. Tanaka and S.Miyake: "Formation of c-BN films with enhanced tribological properties by IBAD" Proc.Int.Symp.on Microwave, plasma and Thermochemical Processing of Advanced Materials. (掲載予定). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Setsuhara, T.Suzuki, Y.Tanaka, S.Miyake, M.Suzuki, M.Kumagai, K.Ogata, M.Kohata, K.Higeta, T.Einishi, Y.Suzuki, Y.Shimoitani and Y.Motonami: "INTERFACIAL STRUCTURE CONTROL OF CUBIC BORON NITRIDE FILMS PREPARED BY ION-BEAM ASSISTED DEPOSITION" Nuclear Instruments & Methods in Physics Research B. (掲載予定). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Kumagai, M.Suzuki, T.Suzuki, Y.Tanaka, Y.Setsuhara, S.Miyake, K.Ogata, M.Kohata, K.Higeta, T.Einishi, Y.Suzuki, Y.Shimoitani and Y.Motonami: "PROPERTIES OF DEPTH-PROFILE CONTROLLED BORON NITRIDE FILMS PREPARED BY ION-BEAM ASSISTED DEPOSITION" Nuclear Instruments & Methods in Physics Research B. (掲載予定). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T,Suzuki, Y.Tanaka, Y.Setsuhara, S.Miyake, M.Suzuki and M.Kumagai: "Studies on Buffer layr for Practical Properties of c-BN Films by IBAD" Proc.4th Int.Symp.on Advanced Materials (ISAM'97). 141-146 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Setsuhara, T.Suzuki, Y.Tanaka, and S.Miyake: "Formation of c-BN films with enhanced tribological properties by IBAD" Proc.Int.Symp.on Microwave, Plasma and Thermochemical Processing of Advanced Materials.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Setsuhara, T.Suzuki, Y.Tanaka, S.Miyake, M.Suzuki, M.Kumagai, K.Ogata, M.Kohata, K.Higeta, T.Einishi, Y.Suzuki, Y.Shimoitani and Y.Motonami: "INTERFACIAL STRUCTURE CONTROL OF CUBIC BORON NITRIDE FILMS PREPARED BY ION-BEAM ASSISTED DEPOSITION" Nuclear Instruments & Methods in Physics Research B.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Kumagai, M.Suzuki, T.Suzuki, Y.Tanaka, Y.Setsuhara, S.Miyake, K.Ogata, M.Kohata, K.Higeta, T.Einishi, Y.Suzuki, Y.Shimoitani and Y.Motonami: "PROPERTIES OF DEPTH-PROFILE CONTROLLED BORON NITRIDE FILMS PREPARED BY ION-BEAM ASSISTED DEPOSITION" Nuclear Instruments & Methods in Physics Research B.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Suzuki,Y.Tanaka,Y.Setsuhara,S.Miyake M.Suzuki and M.Kumagai: "Studies on Buffer Layer for Practical Properties of c-BN Films by IBAD" Proc.4th Int.Symp.on Advanced Mat.(ISAM'97). 141-146 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Setsuhara,T.Suzuki,Y.Tanaka,and S.Miyake: "Formation of c-BN films with enhanced tribological properties by IBAD" Proc.Int.Symp.on Microwave,Plasma and Thermochemical Processing of Advanced Materials(掲載予定). (in press). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] Y.Setsuhara,T.Suzuki,Y.Tanaka,S.Miyake,M.Suzuki,M.Kumagai,K.Ogata,M.Kohata,K.Higeta,T.Einishi,Y.Suzuki,Y.Shimoitani and Y.Motonami: "INTERFACIAL STRUCTURE CONTROL OF CUBIC BORON NITRIDE FILMS PREPARED BY ION-BEAM ASSISTED DEPOSITION" Nuclear Instruments & Methods in Physics Research B. (in press)(掲載予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Kumagai,M.Suzuki,T.Suzuki,Y.Tanaka,Y.Setsuhara,S.Miyake,K.Ogata,M.Kohata,K.Higeta,T.Einishi,Y.Suzuki,Y.Shimoitani and Y.Motonami: "PROPERTIES OF DEPTH-PROFILE CONTROLLED BORON NITRIDE FILMS PREPARED BY ION-BEAM ASSISTED DEPOSITION" Nuclear Instruments & Methods in Physics Research B. (in press)(掲載予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Kumagai,: "A study of implantation induced variation of crystalline phase of boron nitride" Proceeding of the 9th International Conference on Ion Beam Modification of Materials. 1081-1084 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Y.Setsuhara,: "Metastable Phase Formation by IBAD Process" Proceeding of Second Joint Wollonong-Osaka Symposium on Microwave and Plasma Processing of Materials. (to be published). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 節原裕一: "低エネルギー窒素イオン照射による窒化硼素の相変換効果" 表面改質. 2. 5-7 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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