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Dynamic Process of Flow and Heat Transfer in Cz Furnace

Research Project

Project/Area Number 07555546
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field 化学工学一般
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

OGINO Fumimaru  Kyoto Univ., Chem.Eng., Professor, 工学研究科, 教授 (50026069)

Co-Investigator(Kenkyū-buntansha) INAMURO Takaji  Kyoto Univ., Chem.Eng., Associate Professor, 工学研究科, 助教授 (20263113)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 1996: ¥2,900,000 (Direct Cost: ¥2,900,000)
KeywordsCzochralski Method / Crystal Growth / Rotating Flow / Numerical Simulation
Research Abstract

Recently, it is required to develop a new control system for the Czochralski crystal growth process based on the accurate knowledge of flow and heat transfer in the Cz furnace. Thus, we investigated experimentally and numerically flow and heat transfer in a cylindrical container with a rotating disk at the surface, and obtained the following results :
1.The effects of the rotating speed of the container and the crystal on heat transfer coefficients at the walls of the container and at the crystal are found.
2.The time variations of the heat transfer coeffficients with the oscillation of the crystal temperature are found.
3.The effects of the amplitude and the frequecny of the oscillation of the crystal temperature on the heat transfer coefficients are obtained.
Using the above results, we presented governing equations for the control system of the Czochralski crystal growth process. We calcultated the practical problems and obtained reasonable results.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] F. Ogino: "Turbulent Flow of Liquid in a Rotating Vertical Cylindrical Container with a Stationary Solid Cylinder at the Liquid Surface" Ninth Symposium on Turbulent Shear Flows. 3. 30-1-1-30-1-6 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] F. Ogino: "Heat Transfer in Liquid in a Cylindrical Container with a Rotating Disc at the Liquid Surface" Proc. the Tenth Int. Heat Transfer Conference. 4. 303-308 (1994)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] F. Ogino: "Heat Transfer in Liquid in a Rotating Cylindrical Container with a Rotating Disc at the Liquid Surface" 2nd European Thermal-Sciences and 14th UIT National Heat Transfer Conference 1996. 827-834 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] F. Ogino: "Heat Transfer in Czochralski Crystal Growth Process" Heat Transfer Science and Technology 1996. 29-41 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] F.Ogino, K.Kawai and K.Mayumi: "Turbulent Flow of Liquid in a Rotating Vertical Cylindrical Container with a Stationary Solid Cylinder at the Liquid Surface" Ninth Symposium on Turbulent Shear Flows. 30.1.1-30.1.6 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] F.Ogino, K.Kawai and Y.Saito: "Heat Transfer in Liquid in a Cylindrical Container with a Rotating Disc at the Liquid Surface" Proc.of the Tenth International Heat Transfer Conference. 303-308 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] F.Ogino, T.Inamuro, K.Kawai and T.Suzuki: "Heat Transfer in Liquid in a Rotating Cylindrical Container with a Rotating Disc at the Liquid Surface" 2nd European Thermal-Sciences and 14th UIT National Heat Transfer Conference 1996. 827-834 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] F.Ogino: "Heat Transfer in Czochralski Drystal Growth Process" Heat Transfer Science and Technology 1996. 29-41 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] F.Ogino: "Turbulent Flow of Liquid in a Rotating Vertical Cylindrical Container with a Stationary Solid Cylinder at the Liquid Surface" Ninth Symposium on Turbulent Shear Flows. 3. 30-1-1-30-1-6 (1993)

    • Related Report
      1996 Annual Research Report
  • [Publications] F.Ogino: "Heat Transfer in Liquid in a Cylindrical Container with a Rotating Disc at the Liquid Surface" Proc.the Tenth Int.Heat Transfer Confernce. 4. 303-308 (1994)

    • Related Report
      1996 Annual Research Report
  • [Publications] F.Ogino: "Heat Transfer in Liquid in a Rotating Cyindrical Container with a Rotating Disc at the Liquid Surface" 2nd European Thermal-Sciences and 14th UIT National Heat Transfer Conference 1996. 827-834 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] F.Ogino: "Heat Transfer in Czochralski Crystal Crystal Growth Process" Heat Transfer Science and Technology 1996. 29-41 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] F. Ogino: "Turbulent Flow of Liquid in a Rotating Vertical Cylindrical Container with a Stationary Solid Cylinder at the Liquid Surface" Ninth Symposium on Turbulent Shear Flows. 3. 30-1-1 - 30-1-6 (1993)

    • Related Report
      1995 Annual Research Report
  • [Publications] F. Ogino: "Heat Transfer in Liquid in a Cylindrical Container with a Rotating Disc at the Liquid Surface" Proc. the Tenth Int. Heat Transfer Conference. 4. 303-308 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] F. Ogino: "Heat Transfer in Liquid in a Rotating Cylindrical Container with a Rotating Disc at the Liquid Surface" 2nd European Thermal-Sciences and 14th UIT National Heat Transfer Conference. (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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