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Effects of Inter-molecular Interaction of Surface Adsorbed Molecules in Synchrotron Radiation Stimulated CVD

Research Project

Project/Area Number 07650040
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionOkazaki National Research Institutes

Principal Investigator

URISU Tsuneo  Okazaki National Research Institutes, Institute for Molecular Science, Professor, 分子科学研究所, 教授 (50249950)

Co-Investigator(Kenkyū-buntansha) TSUSAKA Yoshiyuki  Okazaki National Research Institute, Institute for Molecular Science, research a, 理学部, 助手 (20270473)
MASE Kazuhiko  Okazaki National Research Institute, Institute for Molecular Science, research a, 分子科学研究所, 助手 (40241244)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1996: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 1995: ¥1,400,000 (Direct Cost: ¥1,400,000)
Keywordssynchrotron radiation / Core electron excitations / IRAS / carbon contamination / dimethyl aluminum hydride / disilanc / gas source MBE
Research Abstract

Surface SiHn on the Si (100) was in situ observed during the synchrotron radiation simulated Si gas source MBE by using the buried metal layr infrared reflection absorption spectroscopy. SiH was mainly observed at around 400 C,and SiH_2 and SiH_3 appeared and increased with decreasing substrate temperature. SiH_2 and SiH_3 were decomposed by the SR irradiation, but SiH was not decomposed.
Carbon contamination was investigated in the Al thin films deposited by the SR irradiations on the low temperature condensed layr of dimethyl aluminum hydride. The excitation wavelength dependence of the carbon contamination was measured by using LiF,C,and Al thin film filters. It was found that the carbon contamination was not decreased by the valence electron excitations, but decreased to about 1/2 by the core electron excitations. The deposition yield is two or three orders of magnitude larger in the core electron excitations compared with the valence electron excitations.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] Akitaka Yoshigoe: "In situ observation of silicon hydrides on si ( 100 ) surfaces during synchrotron radiation stimulated Si_2H_6 gas source molecular beam epitaxy" Apple.Phys.Lett.67. 2364-2366 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Akitaka Yoshigoe: "In situ detection of surface SiH_n in synchrotron radiation induced chemical yapor deposition of a-Si on SiO_2 substrate" J.Synchrotron Radiation. 2. 196-200 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Yoshiaki Imaizumi: "Infrared reflection absorption spectra of trimethylaluminum and dimethylalumum hydride condensed layers on an SiO_2 surface with a buriedmetal layer substrate" J.Molecular Structure. 352/353. 447-453 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Akitaka Yoshigoe: "Synchrotron radiation irradiation effects for SiHn on Si (100) surface inthe synchrotron radiation stimulated Si gas source molecular beam epitaxy" Jpn.J.App.Phys.34. 6894-6898 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Yoshiaki Imaizumi: "Synchrotron Radiation Irradiation Effects on Low-temperature Condensed Layer of Dimetthyl Aluminum Hidride on SiO_2" J.Electron Spectroscopy and Related Phenomena. 80. 93-96 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Tsuneo Urisu: "Synchrotron Radiation-Stimulated Semiconductor Process and New Prospects of Core Electron Excitation Photochemistry" Optoelectronics-Devices and Technologies-. 11. 57-70 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Yoshiaki Imaizumi, Yanping Zhang, Yoshiyuki Tsusaka, Tsuneo Urisu and Shinri Sato: "Structure of the Organoaluminum Compounds Condensed Layr Investigated by Buried Metal Layr Reflectin Absorption Spectroscopy." J.Mole.Structure. 352/353. 447-453 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Akitaka Yoshigoe, Mitsuru Nagasono, Kazuhiko Mase, Tsuneo Urisu, Setsuko Seki and Yoshitsugu Nakagawa: "In Situ Detection of Surface SiHn in Synchrotron-Radiation-Induced Chemical Vapor Deposition of a-Si on an SiO_2 Substrate" J.Synchrotron Red.2. 196-200 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Akitaka Yoshigoe, Kazuhiko Mase, Yoshiyuki Tsusaka, Tsuneo Urisu, Yoshihiro Kobayashi, and Toshio Ogino: "In Situ Observation of Silicon Hydrides on Si (100) Surfaces During Synchrotron-Radiation-Stimulated Si_2 H_6 Gas Source Molecular Beam Epitaxy" Appl.Phys.Lett.67. 2364-2366 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Akitaka Yoshigoe, Mitsuru Nagasono, Kazuhiko Mase, and Tsuneo Urisu: "Synchrotron Radiation Irradiation Effects for SiH_n on Si (100) Surface in the Synchrotron Radiation Stimulated Si Gas Source Molecular Beam Epitaxy." Jpn.J.Appl.Phys.34. 6894-6898 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Imaizumi, Y.Tsusaka, and T.Urisu: "Sychrotron Radiation Irradiation Effects on Low-Temperature Condensed Layr of Dimethyl Aluminum Hidride on SiO_2" J.Electron Spectroscopy and Related Phenomena. 80. 93-96 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Urisu, A.Yoshigoe, and Y.Imaizumi: "Synchrotron Radiation-Stimulated Semiconductor Process and New Prospects of Core Electron Excitation Photochemistry" Optoelectronics-Devices and Technologies-. 11. 57 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Imaizumi: "Synchrotron Radiation Irradiation Effects on Low-temperature Condensed Layer of Dimethyl Aluminum Hidride on SiO_2" J.Electron Spectroscopy and Related Phenomena. 80. 93-96 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] J.Ohara: "Metallization on Piezoelectric Ceramics Surfaces by Synchrotron Radiation Irradiation" J.Electron Spectroscopy and Related Phenomena. 80. 81-84 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Mase: "Development of Electron-Ion Coincidence Spectroscopy for the Study of Surface Dynamics" Bull.Chem.Soc.Jpn.69. 1829-1832 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] M.Nagasono: "Auger Electron-ion coincidence study for H_2O Adsorbed on SiO_2/Si(100) at 80 K" Surface Sci.363. 342-346 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] T.Urisu: "Synchrotron Radiation-Stimulated Semiconductor Process and New Prospects of Core Electron Excitation Photochemistry" Optoelectronics-Devices and Technologies-. 11. 57-70 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Young-Bae Park and Shi-Woo Rhee: "Structual Changes of Silicon Dioxide Films Caused by Synchrotron Irradiation" J.Appl.Phys.80. 1236 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Akitaka Yoshigoe: "In situ observation of silicon hydrides on si(100)surfaces during synchrotron radiation stimulated Si_2H_6 gas source molecular beam epitaxy" Appl.Phys.Lett.67. 2364-2366 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Akitaka Yoshigoe: "In situ detection of surface SiH_n in synchrotron radiation induced chemical vapor deposition of a-Si on SiO_2 substrate" J.Synchrotron Radiation. 2. 196-200 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Yoshiaki Imaizumi: "Infrared reflection absorption spectra of trimethylaluminum and dimethylalumum hydride condensed layers on an SiO_2 surface with a buriedmetal layer structure" J.Molecular Structure. 352/353. 447-453 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] Akitaka Yoshigoe: "Synchrotron radiation irradiation effects for SiHn on Si(100) surface inthe synchrotron radiation stimulated Si gas source molecular beam epitaxy" Jpn.J.Appl.Phys.34. 6894-6898 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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