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Topographic Imaging by Wavelet Correlation Method

Research Project

Project/Area Number 07650042
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionUniversity of Tsukuba

Principal Investigator

ITOH Masahide  University of Tsukuba, Institute of Applied Physics, Lectarer, 物理工学系, 講師 (30150874)

Co-Investigator(Kenkyū-buntansha) YATAGAI Toyohiko  University of Tsukuba Institute of Applied Physics Professor, 物理工学系, 教授 (90087445)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 1996: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 1995: ¥1,500,000 (Direct Cost: ¥1,500,000)
KeywordsWavelet Correlation / dettect measurement / Whitetight interterometer / Scatter light / non-contact measurement
Research Abstract

In the interferometry using incoherent light source, the interference fringes are generated only at the part of zero optical path difference between two arms of interferometer. Generally, because the indefiniteness of the wavelengths exists in the coherent interferometric measurement, the position of the isolated point is not able to be determined. The absolute position of the scattered seed can be measured from the position of the reference mirror where the interference fringes is generated by the sample and the mobile reference mirror. The interference method by such a low coherence light source is called as a wavefront correlation method.
In this study, we made Twyman-Green type interference meter. To improve more precision, it is examined about the phase shift method, that is commonly used in coherent interferometry. We analyzed about the points when applying the method to the interference method which used incoherent light source.
As the application of this study, we measured an absolute height of the block gage in the order of the few cm. The data is compared with the result of fractional technique using the numerous wavelength light source, and we evaluated an error. In case of living sample, because of the small S/N ratio of the interference fringes, we analyze the technique of wavelet conversion, sepstrum conversion and/or correlation method We also examined the possibility to use a semiconductor laser as the brighter light source. We performed to move about 50nm wavelength in the system of Littoman arrangement. Using this light source, more accurate measurement may be realized by scanning the wavelength in real-time.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] M.Itoh et al: "Broad-band light-wave correlation topography using wavelef-transform" Optical Review. 2. 135-138 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Yoshikawa et al: "Interporation of reconstructed image in Fourier transform" Optics Communications. 119. 33-40 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Huany et al: "Optial module for modified signed-digit computing pased encoding and pattern recognition" Optial Review. 2. 255-258 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] J.Ding et al: "optical incoherent correlator for noisy gray-scale image recognition" Optics Letters. 20. 2411-2413 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Itoh et al: "Broad-band light-wave correlation topography using wavelet transform" Optical Review. Vol.2. 135-138 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Yoshikawa et al: "Interporation of reconstructed image in Fourier transform" Optics Communications. Vol.119. 33-40 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Huang et al.: "Optical module for moditied signed-digit computing pased on encoding and pattern recognition" Optical Review. Vol.2. 255-258 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] J.Ding et al: "Optical incoherent correlator for noisy gray-scale image recognition" Optics Letters. Vol 20. 2411-2413 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Itoh et al.: "Broad-baud light wave correlation toporaphy using wavelet-transtomn" Opt.Reu.2. 135-138 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] N.Yoshikawa et al: "Interporation of reconstructed image in Fourier transtom." Opt.Commun. 119. 33-40 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Huang et al: "Optical module for modified signed-digit compafing based encoding and pattern recognition" Opt.Rev.2. 255 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] J.Ding et al: "Optical incohevent correlator for noisy gray-scale image recognition" Opt.Lett.20. 2411-2413 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] M. Itoh, et. al.: "Broad-band light-wave corvelation topography using wavelet-transtan" Opt. Rev.2. 135-8 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] N. Yoshikawa, et al: "Interporation of reunstructed image in houriet Transtern" Opt. Commun.119. 33-40 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H. Huang, et al.: "Optical module for modifiedsigned-digit compatingbased encordiug and pattern recognition" Opt. Rev.2. 255 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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