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STUDIES ON MICRO-PUMP EMPLOYING ELECTRO-HYDRO-DYMAMIC STREAM

Research Project

Project/Area Number 07650069
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionTOYOTA TECHNOLOGICAL INSTITUTE (T.T.I.)

Principal Investigator

TSUCHIDA Nuio  T.T.I., FACULTY OF THCHNOLOGY,PROFESSOR, 工学部, 教授 (40023246)

Co-Investigator(Kenkyū-buntansha) MIGITAKA Masatoshi  T.T.I., FACULTY OF THCHNOLOGY,PROFESSOR, 工学部, 教授 (90165994)
今井 孝二  豊田工業大学, 工学部, 教授 (30231161)
OHOSAWA Jun  T.T.I., FACULTY OF THCHNOLOGY,ASSOCIATE PROFESSOR, 工学部, 助教授 (20176861)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1996: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1995: ¥1,000,000 (Direct Cost: ¥1,000,000)
KeywordsMicro machine / Micro pump / Micro actuator / Ion drag Force / EHD / EHD流
Research Abstract

We have developed micro pumps that use ion dragging generated by DCvoltage. Positive and negative electrodes are alternately placed, and a half of each electrode is covered with insulating film. The operating liquid is a mixture of 1-butyl alcohol : silicone=1 : 1. With three pairs of metal mesh electrodes, 18mm in diameter and 30mm in total length, pressure is proportional to the number of active pairs were obtained. Much smaller devices were fabricated on silicon wafers with 250 pairs of interdigitated electrodes. The width and spacing of the electrode fingers are both 20mm. Liquid flow rate of 2 mm/s was observed at the applied voltage of 50V,where the current was 10mA.When the composition of operating liquid is changed, flow of liquid was not observed even at the same current level. It is concluded that ion-drag micro pumps are possible when appropriate ion species are supplied and the liquid has appropriate resistivity for acceleration of ions at acceptably low voltages.
When a set of subsidiary electrodes covered with insulating film was used instead of covering a half of each electrode, the flow direction was reversed. This is explained by formation of an ion sheath around each subsidiary clectrode, since the subsidiary electrode is covered with insulating film, and charge exchange is prohibited on it. The ion sheath will build up a new electric field opposite to that of the applied voltage. This effect has then been applied to a novel ion-drag motor, which has subsidiary covered electrodes between each of the main bare electrodes. In this new device, the polarity of the voltage applied to the subsidiary electrodes can successfully control the rotating direction of motor.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] 土田縫夫: "イオンドラグ力を応用したマイクロソ-ラボ-トの開発" 電気学会論文誌. 116-C. 43-48 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 牧内弘和: "イオンドラグマイクロポンプの試作" 電気関係学会東海支部連合大会講演論文集. 425- (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 亀谷浩二: "マイクロソ-ラボード(MSB)の研究・開発" 電気関係学会東海支部連合大会講演論文集. 424- (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 牧内弘和: "試作イオンドラグマイクロポンプの動作" 電気学会全国大会講演論文集. 4. 996- (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 伊藤博之: "マイクロソ-ラボ-ト(MSB)の研究" 電気学会全国大会講演論文集. 3. 553- (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 青木浩和: "マイクロ櫛形電極による液体駆動の観測" 電気学会全国大会講演論文集. (予定). (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 土田縫夫他: "センサ・アクチュエータの最新技術動向" 日本機械学会東海支部,同学会機素潤滑設計部門合同企画講習会, 42 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Tsuchida, J.Ohosawa et al.: "Development of Micro-Solar Boat Employing Ion Drag Force" Trans.of IEE of Japan. Vol.116-C,No.1. 43-48 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Ishii, N.Tsuchida et al.: "Multiple Carriers and Transient Current Waveforms in Silicone Oil" Proc.Inst.Electrostat.Jpn. Vol.19, No3. 225-234 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Makiuchi, N.Tsuchida, et al.: "Development of Ion Drag Micro Pump" Record of 1995 Tokai Section Joint Conference of The Six Institute of Electrical and Related Engineer. No.425. (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Kametani, H.Itoh, et al.: "Study and Development of Micro Solar Boat (MSB)" idid. No.424. (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Makiuchi, A.Ohohashi, et al.: "Movement of Trial Ion Drag Micro Pump" 1996 National Convention Record IEE Japan. Vol.4. 996 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Itoh, K.Kametani, et al.: "Study on Micro Solar Boat (MSB)" idid. Vol.3. 553 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Aoki, J.Ohosawa, et al.: "Observation of Liquid Stream by Interdigitated Micro Electrode" In the same record of 1997. (in press). (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] N.Tsuchida: Text of Corse on The Latest Trend of a Sensor・Actuator, by Tokai section of Inst.Mech.Eng.of Jpn and etc.Microactuator employing EHD Stream by Ion Drag Force, 1-6 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 牧内弘和: "試作イオンドラグマイクロポンプの動作" 電気学会全国大会講演論文集. Vol.4. 996- (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 伊藤博之: "マイクロソ-ラボ-ト(MSB)の研究" 電気学会全国大会講演論文集. Vol.3. 553- (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 青木浩和: "マイクロ櫛形電極による液体駆動の観測" 電気学会全国大会講演論文集. 発表予定. (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 土田縫夫 他5名: "センサ・アクチュエータの最新技術動向(講演会予稿)" 日本機械学会東海支部,同学会機素潤滑設計部門合同企画, 42 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 土田縫夫: "イオンドラグ力を応用したマイクロソ-ラボ-トの開発" 電気学会論文誌C. 116-C. 43-49 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] 竹内弘和: "イオンドラグマイクロポンプの試作" 電気関係学会、東海支部連合大会講演論文集. 213 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 亀谷浩二: "マイクロソ-ラボ-トの研究・開発" 電気関係学会東海支部連合大会講演論文集. 212 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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