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SURFACE FINISHING PROCESS USING DIRECTIONALLY ALIGNED SIC WHISKER LAP

Research Project

Project/Area Number 07650161
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionTOYOTA NATIONAL COLLEGE OF TECHNOLOGY

Principal Investigator

HORAGUCHI Iwao  TOYOTA NATIONAL COLLEGE OF TECHNOLOGY,MECHANICAL ENGINEERING,ASSOCIATE PROFESSOR, 機械工学科, 助教授 (20110182)

Project Period (FY) 1995 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1997: ¥200,000 (Direct Cost: ¥200,000)
Fiscal Year 1996: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1995: ¥1,600,000 (Direct Cost: ¥1,600,000)
KeywordsSiC whisker / Directional control / Lapping / Fixed abrasive / Loading / Lap cleaner / Finished surface roughness / 固定研磨材 / SiCウイスカ / SiCウィスカ
Research Abstract

Fixed abrasives have been applied for the lapping of hard and brittle materials, such as ceramic, silicon wafer and glass, in order to perform the process automatically at a high production rate.
In a previous work, the authors developed a SiC whisker grinding wheel with its whiskers aligned normally to the grinding surface. The SiC whisker wheel is characterized by highperformance ultra precision grinding because of the high aspect ratio of whisker, which is 0.3-1 mu m in diameter and 30-50 mu m in length. The authors have studied the abrasive characteristics of this wheel.
In this work, a fixed abrasive lap of aligned SiC whisker was prepared, and its lapping performance was investigated. Moreover, an in-process cleaner was used to suppress the problems of loading and scratching involved in fixed abrasive lapping. The effectiveness of the cleaner in lapping process was examined with a SiC whisker lap.
Lapping using a SiC whisker unidirectionally aligned lap was examined. The following conclusions were obtained :
(1) The effects of lapping load and speed were clarified. A low load decreases the lapping efficiency but a better surface finish is obtained. A higher speed slightly improves the surface finish.
(2) In-process lap cleaning improved the lapping efficiency. Cleaner was found to be remarkably effective for glass and silicon wafer but not for hardened die steel lapping.
(3) The best surface finish was produced with a surface roughness of 18 nmRmax when using the cleaner in lapping the hardened die ateel.

Report

(4 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • Research Products

    (51 results)

All Other

All Publications (51 results)

  • [Publications] 洞口 巌: "SiCウイスカー強化樹脂の摩耗特性とその応用" 日本機械学会論文集(C編). 62・595. 1054-1059 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 山口 勝美: "ウイスカー強化樹脂のアブレシブ特性と研削砥石への応用" 先端加工. 15・1. 13-23 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] JED.Afaghani: "Whisker Behaviors and Tool Wearin Cutting of Unidirectional SiC Whisker Reinforced Plastic" Wear. Vol.195. 223-231 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Whisker Behaviors in Cutting of Unidirectional SiC Whisker Reinforced Epoxy Resin" Proceedings of the 2nd International Sympsium on Aeronautical Science and Technology in Indonesia. Vol.1. 336-347 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 山口 勝美: "SiCウイスカー強化樹脂の切削における焼結ダイヤモンドの摩耗(ウイスカー方位と工具結晶粒径の影響)" 日本機械学会論文集(C編). 62・599. 2857-2863 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Iwao Horaguchi: "Characterization and Application of th Sliding Wear of Hardened Die SteelAgainst SiC Whisker-Plastic Composite" Wear. Vol.198. 229-235 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 山口 勝美: "SiCウイスカー砥石による超精密研磨" 1996年度精密工学会秋季大会先進材料と超精密加工シンポジウム資料. 21-22 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 山口 勝美: "SiCウイスカー砥石の研磨特性(砥石構成と仕上げ面粗さ)" 精密工学会誌. 62・11. (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Grinding Performances of Directionally Aligned SiC Whisker Wheel(Constituents of Grinding Wheel and Finished Surface Roughness)" Progress of Cutting and Grinding ICPCG-96. Vol.III. 426-431 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 山口 勝美: "SiCウイスカー砥石の研磨特性(遊離砥粒による目づまり防止法)" 精密工学会誌. 63・2. 238-242 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 洞口 巌: "炭化けい素ウイスカーラップ砥石による加工" 砥粒加工学会誌. 41・11. 428-433 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Directionally Aligned SiC Whisker Wheel(Loading-Free Grinding)" ASPE 1997 Annual Meeting (1997 Proceedings). Vol.16. 258-261 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Iwao Horaguchi: "Surface Finishing Proccess Using Directionally Aligned SiC Whisker Lap" ICPE '97 Proceedings of the International Conference on Precision Engineering. Vol.1. 437-442 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Grinding with Directionally Aligned SiC Whisker Wheel(Loading-Free Grinding)" American Society for Precision Engineering (In print). 22・1. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Iwao Horaguchi: "Study on Wear Characteristics of SiC Whisker Reinforced Plastics and Thier Application" Transactions of the JSME(C). Vol.62, No.595. 1054-1059 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Study on Abrasive Characteristics of SiC Whisker Reinforced Plastic and Its Application for Grinding Wheel" Journal of the Japan Society of Advanced Production Technology. Vol.15, No.1. 13-23 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] JED.Afaghani: "Whisker Behaviors and Tool Wear in Cutting of Unidirectional SiC Whisker-Reinforced Plastic" Wear. 195. 223-231 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Whisker Behaviors in Cutting of Unidirectional SiC Whisker Reinforced Epoxy Resin" Proceedings of the 2nd International Symposium on Aeronautical Science and Technology in Indonesia. Vol.1. 336-347 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Wear of Polycrystalline Diamond Tool in Cutting of Unidirectional SiC Whisker-Reinfofced Plastic (Influence of Whisker Orientation and Grain Size of Diamond)" Transactions of the JSME(C). Vol.62, No.599. 2857-2863 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Iwao Horagushi: "Characterization and Application of the Sliding Wear of Hardened Die Steel Against SiC Whisker-Plastic Composite" Wear. Vol.198. 229-235 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Ultra Precision Polishing Using Directionally Aligned SiC Whisker Grinding Wheel" Advanced Material and Ultra Precition Machining Symposium on Japan Society for Precision Engineering '96. 21-22

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Grinding Performances of Directionally Aligned SiC Whisker Wheel (Constituents of Grinding Wheel and Finished surface Roughness)" Journal of the Japan Society for Precision Engineering. Vol.62, No.11. 1627-1631 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Grinding Performances of Directionally Aligned SiC Whisker Wheel (Constituents of Grinding Wheel" Progress of Cutting and Grinding. Vol.III,ICPCG-96.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Grinding Using Directionally Aligned SiC Whisker Wheel (Anti-Loading by Addition of Abrasive Grains to Grinding Fluid)" Journal of the Japan Society for Precision Engineering. Vol.63, No.2. 238-242 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Iwao Horaguchi: "Surface Finishing Process Using Directionally Aligned SiC Whisker Lap" Journal of the Society of Grinding Engineers. Vol.41, No.11. 428-433 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Directionally Aligned SiC Whisker Wheel (Loading-Free Grinding)" ASPE 1997 Annual Meeting(1997 Proceedings). Vol.16. 258-261 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Iwao Horaguchi: "Surface Finishing Process Using Directionally Aligned SiC Whisker Lap" ICPE '97 Proceedings of the International Conference on Precision Engineering. Vol.1. 437-442 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] Katsumi Yamaguchi: "Grinding with Directionally Aligned SiC Whisker Wheel (Loading Free Grinding)" American Society for Precision Engineering. Vol.22, No.1, (In Print).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 洞口 巖: "SiCウイスカー強化樹脂の摩耗特性とその応用" 日本機械学会論文集(C編). 62・595. 1054-1059 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] 山口勝美: "ウイスカー強化樹脂のアブレシブ特性と研削砥石への応用" 先端加工. 15・1. 13-23 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] JED.Afaghani: "Whisker Behaviors and Tool Wear in Cutting of Unidirectional SiC Whisker Reinforced Plastic" Wear. Vol.195. 223-231 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] Katsumi Yamaguchi: "Whisker Behaviors in Cutting of Unidirectional SiC Whisker Reinforced Epoxy Resin" Proceedings of the 2nd International Sympsium on Aeronautical Science and Technology in Indonesia. Vol.1. 336-347 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] 山口勝美: "SiCウイスカー強化樹脂の切削における焼結ダイヤモンドの摩耗(ウイスカー方位と工具結晶粒径の影響)" 日本機械学会論文集(C編). 62・599. 2857-2863 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] Iwao Horaguchi: "Characterization and Application of the Sliding Wear of Hardened Die Steel Against SiC Whisker-Plastic Composite" Wear. Vol.198. 229-235 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] 山口勝美: "SiCウイスカー砥石による超精密研磨" 1996年度精密工学会秋季大会先進材料と超精密加工シンポジウム資料. 21-22 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] 山口勝美: "SiCウイスカー砥石の研磨特性(砥石構成と仕上げ面粗さ)" 精密工学会誌. 62・11. (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] Katsumi Yamaguchi: "Grinding Performances of Directionally Aligned SiC Whisker Wheel(Constituents of Grinding Wheel and Finished Surface Roughness)" Progress of Cutting and Grinding ICPCG-96. Vol.III. 426-431 (1996)

    • Related Report
      1997 Annual Research Report
  • [Publications] 山口勝美: "SiCウイスカー砥石の研磨特性(遊離砥粒による目づまり防止法)" 精密工学会誌. 63・2. 238-242 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 洞口 巖: "炭化けい素ウイスカーラップ砥石による加工" 砥粒加工学会誌. 41・11. 428-433 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Katsumi Yamaguchi: "Directionally Aligned SiC Whisker Wheel(Loading-Free Grinding)" ASPE 1997 Annual Meeting(1997 Proceedings). Vol.16. 258-261 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Iwao Horaguchi: "Surface Finishing Process Using Directionally Aligned SiC Whisker Lap" ICPE'97 Proceedings of the International Conference on Precision Engineering. Vol.1. 437-442 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] Katsumi Yamaguchi: "Grinding with Directionally Aligned SiC Whisker Wheel(Loading-Free Grinding)" American Society for Precision Engineering(In print). 22・1. (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] JED.Afaghani: "Whisker Behaviors and Tool Wear in Cutting of Unidirectional SiC Whisker Reinforced Plastic" Wear. 195号. 223-231 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 山口勝美: "SiCウイスカ強化樹脂の切削における焼結ダイヤモンド工具の摩耗(ウイスカ方位と工具結晶粒径の影響)" 日本機械学会論文集 C編. 62巻599号. 2857-2863 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Iwao Horaguchi: "Characterization and Application of the Sliding Wear of Hardened Die Steel Against SiC Whisker-Plastic Composite" Wear. 198号. 229-235 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 山口勝美: "SiCウイスカ砥石の研磨特性(砥石構成と仕上げ面粗さ)" 精密工学会誌. 62巻11号. 1627-1631 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Yamaguchi: "Grinding Performances of Directionally Aligned SiC Whisker Wheel (Constituents of Grinding Wheel and Finished Surface Roughness)" PROGRESS OF CUTTING AND GRINDING,Vol.III With Some Problemsin CADCAM,FMS and Mechatronics ICPCG-96. Vol.III. 426-431 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 山口勝美: "SiCウイスカ砥石の研磨特性(遊離砥粒による目づまり防止法)" 精密工学会誌. 63巻2号. 238-242 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Yamaguchi: "Development of Directionally Aligned SiC Whisker Wheel" American Sosiety for Precision Engineering. 17. 5-9 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 洞口巖: "SiCウィスカ強化樹脂の摩耗特性とその応用" 日本機械学会論文集(C編). 62. 1054-1059 (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] J.E.D.Afaghani: "Whisker Behaviours and Tool Wear in Catting of Unidirectional SiC Whisker Reinforced Plastic" Wear. (掲載予定).

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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