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Atomic scale wear of layred crystal structure material by atomic force microscope

Research Project

Project/Area Number 07650179
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 設計工学・機械要素・トライボロジー
Research InstitutionNippon Institute of Technology

Principal Investigator

MIYAKE Shojiro  Nippon Institute of Technology, Faculty of Engineering, Professor, 工学部, 教授 (70229813)

Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 1996: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1995: ¥1,100,000 (Direct Cost: ¥1,100,000)
KeywordsMicro tribology / Atomic scale wear / Scanning Probe Microscope / muscovite mica / nano lithography
Research Abstract

Atomic-scale topographic images and atomic-scale lateral force microscope (LFM) images of muscovite mica were observed simultaneously. Then, the atomic wear phenomenon was evaluated from lateral force and surface atomic topographic changes caused by sliding. Above about 100 nN load, grooves were formed on the damage-free mica surface. Wear about one nm deep in the mica surface corresponds to the depth from the surface of one cleavage plane to the surface of the cleavage plane immediately beneath it. By applying this wear mechanism atomic-scale mechanical processing of layred crystal structure materials such as muscovite mica was performed using an atomic force microscope (AFM). Processing began at a certain critical load, and the processing depth increased discretely with load. Fracture easily occurred at the two cleavage planes of SiO_4-K and K-SiO_4 interfaces. The processing depth dependence on load was evaluated. The depth of the wear grooves increased with load. Processing lateral force estimated from the torsion of the tip beam was divided into plowing force and friction force. The plowing force is proportional to processed depth. Several cycles of mechanical sliding of the tip generated a 1-nm-deep groove by removing potassium from the surfaces which corresponded to the distance from the top surface of SiO_4 to the top surface of the next SiO_4 layr beneath it. A groove with four steps of one-nm depth was processed by stepwise mechanical sliding. Atomic images of each step surface of the groove corresponding to the SiO_4 basal plane were observed. Then the letters NIT (scale 2000X600X1nm) was procesed by mechanical tip sliding.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] S.Miyake:"one nm depth processing of muscovite mica by mechanical sliding" Appl.Phys.Lett.67. 2925-2927 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] "原子力間顕微鏡によるマイカのナノメータスケールの機械加工" 精密工学会誌. 63. 381-385 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Miyake: "Potential Applications of Hard,Lubricating Coatings to Modern Triboelement," Proceeding of lntermational Tribology Conf.1995 Yokohama. 1. 563-568 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 三宅正二郎他3名: "ナノスケール摩耗時の水平力の研究" 日本トライボロジー学会トライボロジー会議′96東京. 270-272 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 三宅正二郎他3名: "超硬質膜のマイクロトライボロジー" トライボロジー会議′96北九州予稿集. 190-191 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 三宅正二郎他2名: "マイカのnmスケールの摩耗特性" トライボロジー会議′96北九州予稿集. 187-189 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 大竹利明、三宅正二郎: "マイカの機械的ナノリソグラフィー" 1997年精密工学会春季講演会講演論文集. 1. 379-380 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Miyake: "one nm depth processing of muscovite mica by mechanical sliding" Appl.Phys.Lett.Vol.67,13. 2925-2927 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Miyake, M.Ishi, T.Otake and N.Tsushima: "Nanometer-scale mechanical processing of muscovite mica by atomic force microscope" J.Japan Soc.Precision Eng.Vol.62,11. 381-385 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Miyake: "Potential Applications of Hard, Lubricating Coatings to Modern Triboelement" Proceeding of International Tribology Conf.1995 Yokohama. Vol.1. 563-568 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Miyake M.Ishi N.Tushima and T.Otake: "Lateral force of nanometer-scale wear" Proceedings of JAST Tribology Conference '96Tokyo. 270-270 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Miyake, Y.Akiyama, S.Watanabe and M.Murakawa: "Microtribology of super hard films" Proceedings of JAST Tribology Conference '96 Kitakyusyu. 190-191 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Otake, S.Miyake and M.Ishii: "Nanometer scale wear properties of mica" Proceedings of JAST Tribology Conference '96 Kitakyusyu. 190-191 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Otake and S.Miyake: "Mechanical nano lithography of mica" Proceedings of Spring meeting of J.Japan Soc.Precision Eng.Vol.1. 379-380 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 三宅正二郎他3名: "原子間力顕微鏡によるマイカのナノメータスケールの機械加工" 精密工学会誌. Vol63,3. 381-385 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 三宅正二郎他2名: "マイカのnmスケールの摩耗特性" トライボロジー会議'96北九州予稿集. 187-189 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 三宅正二郎他3名: "超硬質膜のマイクロトライボロジー" トライボロジー会議'96北九州予稿集. 190-191 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 大竹利明、三宅正二郎: "マイカの機械的ナノリソグラフィー" 1997年精密工学会春季講演会講演. (予定). (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] S. Miyake:"one nm depth processing of muscovite mica by mechanical sliding" Appl. Phys. Lett.67. 2925-2927 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 三宅正二郎他3名: "ナノスケール摩耗時の水平力の研究" 日本トライボロジー学会トライボロジー会議'96. (発表予定). (1996)

    • Related Report
      1995 Annual Research Report
  • [Publications] S. Miyake,: "Potential Applications of Hard, Lubricating Coatings to Modem Triboelement," Proceeding of International Tribology Conf. 1995 Yokohama. (掲載確定). (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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