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Study on Energy Flow in Micromachine and Design of Integrated Mechanical System

Research Project

Project/Area Number 07650180
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 設計工学・機械要素・トライボロジー
Research InstitutionThe University of Tokyo (1996-1997)
Chuo University (1995)

Principal Investigator

ITAO Kiyoshi  The University of Tokyo, Department of Precision Professor Machinery Engineering, Professor, 大学院・工学系研究科, 教授 (80245985)

Project Period (FY) 1995 – 1997
Project Status Completed (Fiscal Year 1997)
Budget Amount *help
¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 1997: ¥300,000 (Direct Cost: ¥300,000)
Fiscal Year 1996: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 1995: ¥1,300,000 (Direct Cost: ¥1,300,000)
KeywordsMicromachine / Microenergy / Vivrathion Damping / Micro-Dynamics / Oscillator / Cantilever / エネルギ損失 / メカトロニクス / マイクロセンサ / マイクロアクチュエータ / 振動
Research Abstract

In the micromechanical information devices, positioning mechanism that slide on flat surfaces have been miniaturized. For example, optical fiber alignment, magnetic head positionig, AFM scanning (sliding mode) and rotatable actuator in optical disk have been manufactured and developed, Moreover, it is predicted that thier size will be miniaturized by using micromachining technology more.
The micro-motion and micro-positioning mechanisms are generally influenced by frecrion force much more than inertial force becarse the mass decreases in proportion to the third power of dimention with miniaturization of the mechanism size. As a result, frictional dead zone expands resoectively and stic-slip appears easier in the micromechanisms than in the ordinary sized mechanisms. The phenomena depending on friction force are the inevitable factors for the micro-motion and micro-positioning mechanisms design, because they comlicate motion control and decreases positioning accuracy. But it is difficult to introduce a lubrication system, to increase mechanical stiffness or position sensing for avoiding the influence of frictional dead zone and stick-slip in the micromechanisms. This is the reason why the design method free from the friction force phenomena becomes much important.
This reseatch treated with the positioning of low-mass systems such as simple cantilevers that slide on flat surfaces.First a micromechanism (cantilever) was modeled by a one-degree-of freedom system and its positioning error when it suddenly stops from a constnat velocity motion was analyzed. The characteristics of stic-slip and frictional dead zone were clarified.
Next, on the basis of the results, a design method of open loop positioning system that restrains influence of frictional dead zone and stick-slip was proposed. The validity of the analysis and the effectiveness of the proposed method were verified by an experiment in which an optical fiber is positioned on aglass cylinder.

Report

(4 results)
  • 1997 Annual Research Report   Final Research Report Summary
  • 1996 Annual Research Report
  • 1995 Annual Research Report
  • Research Products

    (23 results)

All Other

All Publications (23 results)

  • [Publications] 鈴木 哲也: "マイクロメカニズムにおけるしゅう動位置決め法の研究" 精密工学会誌. Vol.64点No.2. 226-230 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 黒田 進: "マイクロカンチレバ-の振動減衰に関する研究" Vol62,No.5. 742-746 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 板生 清: "マイクロ振動子における微小エネルギーフローの研究" 日本時計学会誌. No.157. 15-21 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 伊予木 誠人: "複合共振形光センサにおける微小機構のカセンシング" 日本機械学会論文集. 62巻602号. 768-771 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 板生 清: "マルチメディア情報・通信機器とマイクロシステム技術" 精密工学会誌. Vol.62,No9. (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 板生 清: "情報マイクロシステム-微小振動論" 朝倉書店, 250 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] T.suzuki: "Theoretical and Experrimental Study on Precise Positioning of Slinding Micromechanisms" Journal of the Japan Society for Precision Engineering. 64-2. 226-230 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] M.Iyoki: "Micromechanism Force Sensing Using Coupled Cavity Laser Diode Sensor" Transactions of the Japan Society of Mechanical Engineers. 62-602. 141-146 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.Itao: "Microsystem Technology for Innovation in the Information and communications Systems" Journal of the Japan Society for Precision Engineering. 62-9. 1227-1232 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.itao: "A Micro-Energy Flow of a Microcantilever" Journal of Horological Insitute of Japan. 157. 15-21 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] S.Kuroda: "Study on Vibrational Damping of Microcantilevers" Journal of the Japan Society for Precision Engineering. 62. 742-746 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] K.itao: Information Microsystem. Asakura bookstore, 250 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1997 Final Research Report Summary
  • [Publications] 鈴木 哲也: "マイクロメカニズムにおけるしゅう動位置決め法の研究" 精密工学会誌. Vol.64,No.2. 226-230 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 板生 清: "情報マイクロシステム-微小振動論-" 朝倉書店, 250 (1998)

    • Related Report
      1997 Annual Research Report
  • [Publications] 黒田 進: "マイクロカンチレバ-の振動減衰に関する研究" 精密工学会誌. Vol.62,No.5. 742-746 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 板生 清: "マイクロ振動子における微小エネルギーフローの研究" 日本時計学会誌. No.157. 15-21 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 伊与木 誠人: "複合共振形光センサにおける微小機構の力センシング" 日本機械学会論文集. 62巻602号. 768-771 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 板生 清: "マルチメディア情報・通信機器とマイクロシステム技術" 精密工学会誌. Vol.62,No.9. 1227-1232 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 板生 清(分担): "情報機器のダイナミックスと制御" 日本機械学会, 264 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 板生 清(分担): "マイクロオプトメカトロニクス事典" 朝倉書店, 300 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] 保坂寛: "振動減衰のマイクロダイナミクス" 精密工学会誌. 60. 225-229 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] K.Itao(板生清): "A micro-Energy Flow of a Beam-Shapcd Microactuators and Sensors" Proceedings of Tenth CISM-IFToMM Symosieum on Theory. 329-334 (1994)

    • Related Report
      1995 Annual Research Report
  • [Publications] 黒田進: "マイクロカンチレバ-の振動減衰に関する研究" 精密工学会誌. 62(予定). (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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