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Microvalves Using Functional Fluids

Research Project

Project/Area Number 07650191
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Fluid engineering
Research InstitutionTokyo Institute of Technology

Principal Investigator

YOKOTA Shinichi  Tokyo Institute of Technology, Precision and Intelligence Laboratory, Professor, 精密工学研究所, 教授 (10092579)

Co-Investigator(Kenkyū-buntansha) YOSHIDA Kazuhiro  Tokyo Institute of Technology, Precision and Intelligence Laboratory, Associate, 精密工学研究所, 助教授 (00220632)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1996: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1995: ¥1,600,000 (Direct Cost: ¥1,600,000)
KeywordsFunctional fluid / Micro control valve / Micromachine / Electro-rheological fluid / Magnetic fluid / Fluid power / Pressure control valve / Switching valve / 電気粘性流体
Research Abstract

To realize high power micromachines using fluid power, two kinds of microvalves using functional fluids such as ER (electro-rheological) fluid and magnetic fluid are developed. ER fluid has viscosity controlled by the applied electric field and magnetic fluid is pulled by the applied magnetic field.
1. Fabrication of a microvalve using ER fluid : A large model consisting of 12 stacked parallel plate electrodes are fabricated. It is ascertained through experiments that the pressure is linearly controlled by the applied electric field strength independent of flowrate and that the band width is 30Hz. Also a rheological equation for ER fluid is derived. Based on the equation, a 3-port micro ER valve with 12mm*12mm*12mm in size is fabricated. Control pressure range of 0.4MPa is realized with electric field strength of 5kV/mm. Furthermore, a servo system for a 1 DOF miniature manipulator is constructed.
2. Fabrication of a microvalve using magnetic fluid : A large model of stop valve is fabric … More ated and it is experimentally ascertained that the allowable pressure is in proportion to electromagnet current, intensity of magnetization of magnetic fluid and the number of serially connected valves. Also flow control characteristics are realized by using a magnetic pole with V-shaped groove. Next, to miniaturize the electromagnet, a micro switching valve using permanent magnet is proposed. A valve with 20mm*20mm*20mm in size is fabricated and the flow channel switching with 8kPa in pressure and 7Hz in frequency is experimentally verified. Furthermore, to establish and optimum design method, numerical analysis of shape of magnetic fluid in flow and magnetic field is investigated.
3. Application to an in-pipe mobile micromachine : A micro ER valve which has better performance than the other is designed in cylindrical shape with 9.8mm in diameter and applied to an in-pipe mobile micromachine for pipes with 14mm in diameter. Traveling velocity of 0.9mm/s is realized and the feasibility of the proposed valve is proved. Less

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (29 results)

All Other

All Publications (29 results)

  • [Publications] 横田,近藤: "電気粘性流体を用いた液圧制御弁(圧力制御弁への応用)" 日本機械学会論文集(C編). 62・601. 3471-3478 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 吉田,山中,横田,和田: "磁性流体を用いたマイクロ制御弁に関する研究(マイクロ切換弁の提案と基礎的検討)" 日本機械学会第73期全国大会講演論文集. IV. 268-269 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 横田,近藤,枝村,吉田: "電気粘性流体を応用した液圧制御弁(圧力制御弁への応用)" 日本機械学会第73期全国大会講演論文集. IV. 270-271 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 横田,近藤,枝村,吉田: "電気粘性流体を応用した液圧制御弁(圧力制御ERバルブを用いた1軸マニピュレータの試作)" 平成7年秋季油空圧講演会講演論文集. 13-16 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 吉田,山中,横田,和田: "磁性流体を用いたマイクロ制御弁(マイクロ切換弁の試作)" 日本機械学会第73期通常総会講演会講演論文集. IV. 39-40 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 横田,近藤,吉田: "電気粘性流体を応用したマイクロ制御弁" 日本機械学会第73期通常総会講演会講演論文集. IV. 65-66 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 吉田,山中,横田: "磁性流体を用いたマイクロ切換弁の試作" 第8回「電磁力関連のダイナミクス」シンポジウム講演論文集. 393-396 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 近藤,横田,吉田: "電気粘性流体を応用した液体マイクロ制御弁(管内走行マイクロマシンへの応用)" 日本機械学会ロボティクス・メカトロニクス講演会′96講演論文集. B. 1231-1232 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 横田,近藤,吉田,和田: "電気粘性流体を応用したマイクロ制御弁(小形ゴム人工筋の駆動)" 日本機械学会流体工学部門講演会講演論文集. 279-280 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 近藤,横田,吉田: "電気粘性流体を応用したマイクロ制御弁(管内走行マイクロマシン用マイクロ制御弁)" 日本機械学会第74期全国大会講演論文集. IV. 205-206 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Yokota and Y.Kondoh: "A Control Valve by Making Use of an Electro-rheological Fluid (Application to Pressure Control Valves)" Journal of JSME. Vol.62, No.601. 3471-3478 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Yoshida, Y.Yamanaka, S.Yokota and S.Wada: "A Study on a Microvalve Using Magnetic Fluid (Proposition of a Micro Directional Control Valve and Basic Experiments)" Proc.JSME 73rd Fall Annual Meeting. Vol.IV. 268-269 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Yokota, Y.Kondoh, K.Edamura and K.Yoshida: "A Flow Control Valve in Application of an Electro-rheological Fluid (Application to a Pressure Control Valve)" Proc.JSME 73rd Fall Annual Meeting. Vol.IV. 270-271 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] "A Flow Control Valve in Application of an Electro-rheological Fluid (Fabrication of a 1 DOF Manipulator Using Pressure Control ER Valve)" Proc.JHPS Fall Annual Conf.on Hydraulics and Pneumatics. 13-16 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Yoshida, Y.Yamanaka, S.Yokota and S.Wada: "A Microvalve Using Magnetic Fluid (Fabrication of a Micro Switching Valve)" Proc.JSME 73rd Spring Annual Meeting. Vol.IV. 39-40 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Yokota, Y.Kondoh and K.Yoshida: "A Micro Control Valve in Application of an Electrorheological Fluid" Proc.JSME 73rd Spring Annual Meeting. Vol.IV. 65-66 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Yoshida, Y.Yamanaka and S.Yokota: "Fabrication of a Micro Switching Valve Using Magnetic Fluid" Proc.8th Symp.on Electromagnetics and Dynamics. 393-396 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Kondoh, S.Yokota and K.Yoshida: "A Micro Control Valve in Application of an Electrorheological Fluid (Application to Micro In-pipe Mobile Machines)" Proc.JSME Annual Conf.on Robotics and Mechatronics. Vol.B. 1231-1232 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] S.Yokota, Y.Kondoh, K.Yoshida and S.Wada: "A Micro Control Valve in Application of an Electrorheological Fluid (Driving a Mini-artificial Rubber Muscle)" Proc.JSME Fluid Division Conf.279-280 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Y.Kondoh, S.Yokota and K.Yoshida: "A Micro Control Valve in Application of an Electro-rheological Fluid (A Micro Control Valve for Micro In-pipe Mobile Machines)" Proc.JSME 73rd Fall Annual Meeting. Vol.IV. 205-206 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] 1)横田,近藤: "電気粘性流体を用いた液圧制御弁(圧力制御弁への応用)" 日本機械学会論文集(C編). 62・601. 3471-3478 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 2)吉田,山中,横田,和田: "磁性流体を用いたマイクロ制御弁(マイクロ切換弁の試作)" 日本機械学会第73期通常総会講演会講演論文集. IV. 39-40 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 3)吉田,山中,横田: "磁性流体を用いたマイクロ切換弁の試作" 第8回「電磁力関連のダイナミクス」シンポジウム講演論文集. 393-396 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 4)近藤,横田,吉田: "電気粘性流体を応用した液体マイクロ制御弁(管内走行マイクロマシンへの応用)" 日本機械学会ロボティクス・メカトロニクス講演会'96講演論文集. B. 1231-1232 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 5)横田,近藤,吉田,和田: "電気粘性流体を応用したマイクロ制御弁(小形ゴム人工筋の駆動)" 日本機械学会流体工学部門講演会講演論文集. 279-280 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 6)近藤,横田,吉田: "電気粘性流体を応用したマイクロ制御弁(管内走行マイクロマシン用マイクロ制御弁)" 日本機械学会第74期全国大会講演論文集. 205-206 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] 吉田,山中,横田,和田: "磁性流体を用いたマイクロ制御弁に関する研究(マイクロ切換弁の提案と基礎的検討)" 日本機械学会第73期全国大会講演論文集. IV. 268-269 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 横田,近藤,枝村,吉田: "電気粘性流体を応用した液圧制御弁(圧力制御弁への応用)" 日本機械学会第73期全国大会講演論文集. IV. 270-271 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 横田,近藤,枝村,吉田: "電気粘性流体を応用した液圧制御弁(圧力制御ERバルブを用いた1軸マニピュレータの試作)" 平成7年秋季油空圧講演会講演論文集. 13-16 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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