RESEARCH OF PARTICLE TYPE PRESSURE MICROSENSOR
| Project/Area Number |
07650306
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | KYOTO UNIVERSITY |
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Principal Investigator |
KOTERA Hidetoshi KYOTO UNIVERSITY,Mechanical Eng., ASSOCIATE PROFESSOR, 工学研究科, 助教授 (20252471)
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| Co-Investigator(Kenkyū-buntansha) |
SHIMA Susumu KYOTO UNIVERSITY,Mechanical Eng., PROFESSOR, 工学研究科, 教授 (70026160)
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| Project Period (FY) |
1995 – 1997
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| Project Status |
Completed (Fiscal Year 1997)
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| Budget Amount *help |
¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1997: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1996: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 1995: ¥1,000,000 (Direct Cost: ¥1,000,000)
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| Keywords | PRESSUE SENSOR / MICROMASHINE / MEMS / PIEZOELECTICITY / ZnO THIN FILM / DIAMOND THIN FILM / 有限要素法解析 / マイクロ圧力センサー / ダイヤモンド / ZnO |
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| Research Abstract |
Diamond ; A pressure micro sensor made of p-type diamond film was developed. A boron-doped diamond film of 2mum thick was grown on a non-doped polycrystalline diamond substrate by a conventional microwave plasma chemical vapor deposition system. A strain gauge pattern (path size : 500mum*50mum) was produced by photolithography and reactive ion etching in oxygen plasma. A diaphragm structure was fabricated by mounting the diamond substrate on the base with a through hole. Relative change in the electrical resistance of the pressure sensor was proportional to the applied strain. Gauge factor of the sensorwas about 20 at room temperature.
Zn0 ; Piezoelectric properties of a zinc-oxide (ZnO) thin film were investigated. The ZnO thin film was grown on a silicon substrate by a plasma-enhanced metal organic chemical vapor deposition (MOCVD) . In order to enhance its resistivity, lithium (Li) was doped. The Li-doped ZnO thin film had higher electrical resistivity than non Li-doped one. A diaphragm structure for a pressure sensor was fabricated with a diamond drilling and chemical etching. Resonant frequency test was carried out to measure piezoelectric properties of a pressure micro sensor.
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Report
(4 results)
Research Products
(10 results)
