DEVELOPMENT OF MULTILA YERED FILMS WITH ULTRA-HIGH MAGNETOSTRICTION AND SOFT MAGNETIC PROPERTIES AND THEIR APPLICATIONS FOR MICRO-MAGNETIC
| Project/Area Number |
07650371
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | TOYOHASHI UNIVERSITY OF TECHNOLOGY |
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Principal Investigator |
INOUE Mitsuteru TOYOHASHI UNIVERSITY OF TECHNOLOGY,TECHNOLOGY DEVELOPMENT CENTER ASSOCIATE PROFESSOR, 技術開発センター, 助教授 (90159997)
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| Co-Investigator(Kenkyū-buntansha) |
FUJII Toshitaka TOYOHASHI UNIVERSITY OF TECHNOLOGY,DEPT.OF ELECTRICAL AND ELECTRONIC ENGNG., PRO, 電気・電子工学系, 教授 (90023168)
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| Project Period (FY) |
1995 – 1996
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| Project Status |
Completed (Fiscal Year 1996)
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| Budget Amount *help |
¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 1996: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1995: ¥600,000 (Direct Cost: ¥600,000)
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| Keywords | multilayr film / magnetostriction / magnetically soft films / micro-magnetic devices / actuator elements / thermal annealing / magnetic anisotropy / nano-crystalline / 超磁歪 / 軟磁性材料 / スパッタ薄膜 / アモルファス材料 |
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| Research Abstract |
TbFe and TbHoFe amorphous films :
Single films with Tb-Fe and Tb-Ho-Fe systems were fabricated by rf sputtering, and their magnetic and magnetoelastic properties were studied. Tb_<40>Fe_<60> and Tb_<27>Ho_<13>Fe_<60> amorphous films were found to be very attractive for magnetoacoustic applications owing to their large magnetostriction and considerably soft inplane magnetic properties. The effect of thermal annealing on their magnetoelastic properties were also investigated. The results suggest that the thermal annealing is useful for improving their low-field magnetostrictive response. This is considered to be mainly due to relief of internal stresses by annealing. Another possibility of formation of nanocrystalline TbFe_2 phase by annealing was also pointed out.
TbFe/FeB amorphous multilayr films :
Multilayr films with TbFe/FeB/TbFe sandwich structures and TbFe/FeB structures were formed by rf sputtering and their properties were investigated. The results revealed that a considerably soft inplane magnetization and a huge magnetostriction could be obtained in the sandwich films at room temperature, provided that the thickness of FeB interlayr was within the range of 10-40% of the total film thickness. As for TbFe/FeB multilayr films, their magnetoelastic properties were deteriorated by stacking many numbers of TbFe and FeB layrs. Thermal diffusion of Tb and B were found to be responsible for it, and further studies are necessary by fabricating multilayr films without such a problem.
Actuator elements with amorphous films :
Cantilever-type actuator elements were constructed using the Tb-Ho-Fe amorphous films with large magnetostriction and soft inplane magnetization. By using Kapton substrate with 12.5mum thickness, the actuator showed a displacement of 100mum.
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Report
(3 results)
Research Products
(24 results)
