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Basic Study of ultra fine beam by field emitter arrays

Research Project

Project/Area Number 07650389
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionTohoku University

Principal Investigator

SHIMAWAKI Hidetaka  Research Institute of Electrical Communication, Tohoku University, Research Associate, 電気通信研究所, 助手 (80241587)

Co-Investigator(Kenkyū-buntansha) SHIHO Makoto  Japan Atomic Energy Research Institute, Naka Fusion Research Establishment, Proj, 那珂研究所, 主任研究員
YOKOO Kuniyoshi  Research Institute of Electrical Communication, Tohoku University, Professor, 電気通信研究所, 教授 (60005428)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 1996: ¥400,000 (Direct Cost: ¥400,000)
Fiscal Year 1995: ¥1,800,000 (Direct Cost: ¥1,800,000)
Keywordscold cathode / field emission / electronbeam / electro-optics / vacuum microelectronics
Research Abstract

Si field emitter is a promising candidate for electron sources in vacuum microelectronics. The current control and the stabilization in the field emission of gated emitter arrays (FEAs) are the highest demand for applications to a flat panel display and other beam devices. The beam focusing technique, additionally, might be necessary for a high quality microbeam. By fabricating FEA monolithically with FET of TFT,the emission current will be controlled and stabilized by applying a few volts on the gate of FET of TFT.We proposed and fabricated a monolithic emitter with Si-FEA and JFET.The controllability and the stability of the emission current from Si-FEA were significantly improved by the monolithic emitter. For the development of a high brightness microbeam, we fabricated a new FEA structure with an in-plane focusing electrode which surrounds an individual gated emitter or a block of gated emitter array. Experimental results showed that the divergence of emitted electron was well focused by decreasing the focusing gate voltage.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (11 results)

All Other

All Publications (11 results)

  • [Publications] H.Ishizuka,et al.: "Beam Extraction Experiment with Field-Emission Arrays" Nucl.Instr.and Meth.A375. 116-118 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Yokoo, M.Arai, M.Mori, J.Bae and S.Ono: ""Active control of emission current of field emitter arrays"" J.Vac.Sci.Technol.B13(2). 491-493 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Ishuzuka, A.Watanabe, M.Shiho, S.kawasaki, J.Itoh, M.Arai, H.Shimawaki and K.Yokoo: ""Bwam Extraction Experiment with Field-emission Arrays"" Tech.Report of IEICE. ED95-129. 1-8 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] M.Arai, M.Mori, H.Kayama, M,Kawakami, H.Shimawaki and K.Yokoo: ""Emission Characteristics of Si Field Emitter Array"" Tech.Report of IEICE. ED95-136. 1-8 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Ishuzuka, S.kawasaki, A.Watanabe, M.Shiho, J.Itoh, M.Arai, H.Shimawaki and K.Yokoo: ""Applications of field-emitter arrays in beam physics"" Nucl.Inst.And Math. A375. 116-118 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H. Ishizuka,: "Beam Extraction Experiment with Field-Emission Arrays" Nucl. Instr. and Meth.A375. 116-118 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Yokoo: "Active Control of the Emission Current of Field Emitter Arrays" J. Vacuum Sci. and Tech. B. 13. 491-493 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Ishizuka: "Beam Extraction Experiment with Field Emission Arrays" Tech. Digest of 17th Free Electron Laser Conf.1- (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 石塚 浩: "ビーム物理研究における微小電子源の利用" 信学技報. ED95-129. 1-8 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] 新井 学: "Si電界放射冷陰極の電子放射特性" 信学技報. ED95-136. 1-8 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Kawasaki: "Dynmics of Microbeam from a Point Emitter and its Array" 8th ICFA Advanced Beam Dynanics Workshop. (to be presented). (1996)

    • Related Report
      1995 Annual Research Report

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Published: 1995-04-01   Modified: 2016-04-21  

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